Abstract: An acoustic wave device includes a piezoelectric layer, a pair of comb-shaped electrodes disposed on a first surface of the piezoelectric layer, each of the pair of comb-shaped electrodes including electrode fingers that excite an acoustic wave, a support substrate disposed at a second surface side of the piezoelectric layer, and having protruding portions and/or recessed portions on a first surface, which is closer to the piezoelectric layer, of the support substrate, each of the protruding portions and/or the recessed portions having a shape in which each of left and right side surfaces has linear slopes inclined at different angles with respect to the first surface of the piezoelectric layer in a cross-sectional view, and a second insulating layer located between the piezoelectric layer and the support substrate and disposed on the third surface, on which the protruding portions and/or the recessed portions are formed, of the support substrate.

Abstract: An acoustic wave device including a support substrate, a piezoelectric layer provided over the support substrate, at least one pair of comb-shaped electrodes disposed on the piezoelectric layer, each of the at least one pair of comb-shaped electrodes including electrode fingers, a temperature compensation film interposed between the support substrate and the piezoelectric layer, the temperature compensation film having a temperature coefficient of elastic constant opposite in sign to a temperature coefficient of elastic constant of the piezoelectric layer; and an insulating layer interposed between the support substrate and the temperature compensation film, a first surface of the insulating layer having first protruding portions and/or first recessed portions, a second surface of the insulating layer having second protruding portions and/or second recessed portions, the first surface being closer to the support substrate, the second surface being closer to the temperature compensation film.

Abstract: [Object] To observe the sign or occurrence of an unstable operation of a turbo-machine. [Solving Means] An observation apparatus 1 includes: a detection unit 10 including one or two or more sensors 11, 12 that are disposed in a turbo-machine 2, are highly time responsive, and observe unsteady fluctuations of the turbo-machine 2; a computation unit 20 that output signals from the one or two or more sensors 11, 12 every moment, stores time series data for a predetermined period, and calculates in real time a parameter for detecting an unstable operation of the turbo-machine; and a determination unit 30 that compares the parameter for detecting the unstable operation with a predetermined threshold and outputs in real time a determination result of a sign or occurrence of the unstable operation.

Abstract: An acoustic wave device includes a piezoelectric layer, a pair of comb-shaped electrodes disposed on a first surface of the piezoelectric layer, each of the pair of comb-shaped electrodes including electrode fingers that excite an acoustic wave, a support substrate disposed at a second surface side of the piezoelectric layer, and having protruding portions and/or recessed portions on a first surface, which is closer to the piezoelectric layer, of the support substrate, each of the protruding portions and/or the recessed portions having a shape in which each of left and right side surfaces has linear slopes inclined at different angles with respect to the first surface of the piezoelectric layer in a cross-sectional view, and a second insulating layer located between the piezoelectric layer and the support substrate and disposed on the third surface, on which the protruding portions and/or the recessed portions are formed, of the support substrate.

Abstract: An acoustic wave device including a support substrate, a piezoelectric layer provided over the support substrate, at least one pair of comb-shaped electrodes disposed on the piezoelectric layer, each of the at least one pair of comb-shaped electrodes including electrode fingers, a temperature compensation film interposed between the support substrate and the piezoelectric layer, the temperature compensation film having a temperature coefficient of elastic constant opposite in sign to a temperature coefficient of elastic constant of the piezoelectric layer; and an insulating layer interposed between the support substrate and the temperature compensation film, a first surface of the insulating layer having first protruding portions and/or first recessed portions, a second surface of the insulating layer having second protruding portions and/or second recessed portions, the first surface being closer to the support substrate, the second surface being closer to the temperature compensation film.

Abstract: An acoustic wave device includes a support substrate, a piezoelectric layer located over the support substrate, a pair of comb-shaped electrodes disposed on the piezoelectric layer and including electrode fingers exciting an acoustic wave, a temperature compensation film interposed between the support substrate and the piezoelectric layer, having a thickness equal to or less than 2 times an average pitch of the electrode fingers, and having a temperature coefficient of elastic constant opposite in sign to that of the piezoelectric layer, and a boundary layer interposed between the support substrate and the temperature compensation film and having a thickness equal to or greater than 2.2 times the average pitch, an acoustic velocity of a lateral wave propagating through the boundary layer being less than that of a lateral wave propagating through the support substrate and greater than that of a lateral wave propagating through the temperature compensation film.

Abstract: [Object] To observe the sign or occurrence of an unstable operation of a turbo-machine. [Solving Means] An observation apparatus 1 includes: a detection unit 10 including one or two or more sensors 11, 12 that are disposed in a turbo-machine 2, are highly time responsive, and observe unsteady fluctuations of the turbo-machine 2; a computation unit 20 that output signals from the one or two or more sensors 11, 12 every moment, stores time series data for a predetermined period, and calculates in real time a parameter for detecting an unstable operation of the turbo-machine; and a determination unit 30 that compares the parameter for detecting the unstable operation with a predetermined threshold and outputs in real time a determination result of a sign or occurrence of the unstable operation.

Abstract: An acoustic wave filter includes: one or more series resonators connected in series between an input terminal and an output terminal; and parallel resonators connected in parallel between the input terminal and the output terminal and formed of piezoelectric thin film resonators, wherein each of at least two resonators of the parallel resonators includes an additional film having island-shaped patterns or aperture patterns formed at equal pitch intervals in a resonance region in which a lower electrode and an upper electrode face each other across a piezoelectric film, and a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in one of the at least two resonators differs from a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in another one of the at least two resonators.

Abstract: An acoustic wave filter includes: one or more series resonators connected in series between an input terminal and an output terminal; and parallel resonators connected in parallel between the input terminal and the output terminal and formed of piezoelectric thin film resonators, wherein each of at least two resonators of the parallel resonators includes an additional film having island-shaped patterns or aperture patterns formed at equal pitch intervals in a resonance region in which a lower electrode and an upper electrode face each other across a piezoelectric film, and a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in one of the at least two resonators differs from a pitch interval of the island-shaped patterns or the aperture patterns in the additional film included in another one of the at least two resonators.

Abstract: An acoustic wave device includes: a substrate; an input terminal that is located on a first surface of the substrate, and to which a high-frequency signal is input; a resonator that is connected to the input terminal, and to which a high-frequency signal input to the input terminal is input; and an insulating layer that is located between the input terminal and the substrate, and has a permittivity smaller than that of the substrate.

Abstract: An acoustic wave filter includes a piezoelectric substrate, an insulating pattern that has higher thermal conductivity than the piezoelectric substrate formed on the piezoelectric substrate, at least two pads formed on the piezoelectric substrate or the insulating pattern, at least one pad formed on the insulating pattern, at least one acoustic resonator formed on the insulating pattern, and at least one acoustic resonator directly formed on the piezoelectric substrate.

Abstract: A filter includes: a filter circuit connected between a first terminal and a second terminal; and a matching circuit connected between the filter circuit and the second terminal, wherein an impedance viewed from the second terminal toward the matching circuit is less than an impedance viewed from a node between the filter circuit and the matching circuit toward the filter circuit.

Abstract: Provided is a duplexer that can maintain isolation characteristics while being able to independently adjust the input/output ground inductances and the common ground inductance of the double-mode filter.

Abstract: A filter includes: a plurality of piezoelectric thin film resonators, each having a multilayered film including a lower electrode located on a substrate, a piezoelectric film located on the lower electrode, and an upper electrode located on the piezoelectric film so as to face the lower electrode, wherein at least two piezoelectric thin film resonators have thick film portions, in each of which the multilayered film is thicker in at least a part of an outer peripheral portion than in an inner portion of a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, and lengths of the thick film portions from edges of the resonance regions are different from each other in the at least two piezoelectric thin film resonators.

Abstract: A duplexer includes a package substrate having layers stacked, a transmission filter and a reception filter that are provided on an upper surface of a first layer that is one of the layers of the package substrate, the transmission and reception filters being acoustic wave filters, a metal pattern provided on the upper surface of the first layer and formed to surround the transmission and reception filters, a transmission line provided on an upper surface of a second layer that is one of the layers of the package substrate and is positionally lower than the first layer, the transmission line electrically connecting the transmission filter and a transmission terminal together, and a reception line that is provided on the upper surface of the second layer and electrically connects the reception filter and a reception terminal. The thickness of the first layer is greater than that of the second layer.

Abstract: An acoustic wave filter includes a piezoelectric substrate, an insulating pattern that has higher thermal conductivity than the piezoelectric substrate formed on the piezoelectric substrate, at least two pads formed on the piezoelectric substrate or the insulating pattern, at least one pad formed on the insulating pattern, at least one acoustic resonator formed on the insulating pattern, and at least one acoustic resonator directly formed on the piezoelectric substrate.

Abstract: Provided is a duplexer that can maintain isolation characteristics while being able to independently adjust the input/output ground inductances and the common ground inductance of the double-mode filter.

Abstract: A filter includes: a filter circuit connected between a first terminal and a second terminal; and a matching circuit connected between the filter circuit and the second terminal, wherein an impedance viewed from the second terminal toward the matching circuit is less than an impedance viewed from a node between the filter circuit and the matching circuit toward the filter circuit.

Abstract: An acoustic wave device includes an input terminal; a balun that is connected to the input terminal, converts a signal input from the input terminal into two anti-phase signals, and outputs the two anti-phase signals; and a filter that is connected to the balun, and outputs the two anti-phase signals input from the balun as balanced output signals. An output impedance of the balun is equal to an input impedance of the filter, and is larger than an output impedance of the filter.

Abstract: A duplexer includes a package substrate having layers stacked, a transmission filter and a reception filter that are provided on an upper surface of a first layer that is one of the layers of the package substrate, the transmission and reception filters being acoustic wave filters, a metal pattern provided on the upper surface of the first layer and formed to surround the transmission and reception filters, a transmission line provided on an upper surface of a second layer that is one of the layers of the package substrate and is positionally lower than the first layer, the transmission line electrically connecting the transmission filter and a transmission terminal together, and a reception line that is provided on the upper surface of the second layer and electrically connects the reception filter and a reception terminal. The thickness of the first layer is greater than that of the second layer.