Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

Abstract: An actuator includes: a casing; a pressure reducing valve and a piston. The pressure reducing valve is provided in the casing to reduce a pressure of a driving fluid supplied from an outside of the casing to a predetermined level. The piston is provided in the casing to form a pressure chamber together with the casing. The piston is driven by the driving fluid that has been pressure-reduced to the predetermined level.

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

Abstract: A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

Abstract: A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.

Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.

Abstract: A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.

Abstract: A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.

Abstract: A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives an upper stage over three lines, with each of the lines including an inlet extension of a flow rate controller, and two inlet-side on-off valves arranged in series with the inlet extension. The plural-line passage block has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Abstract: A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Channel blocks on a lower stage include a plural-line (three-line) passage block 21 disposed over a plurality of lines. The plural-line passage block 21 receives an upper stage over three lines, with each of the lines including an inlet extension 16b of a flow rate controller 16, and two inlet-side on-off valves 14, 15 arranged in series with the inlet extension 16b. The plural-line passage block 21 has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.

Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.