Patents by Inventor Trond Karsten Varslot
Trond Karsten Varslot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11821852Abstract: A method of investigating a specimen using tomographic imaging, comprising the steps of providing a specimen and a source, directing a beam of radiation from said source to said specimen, and detecting a flux of radiation transmitted through said specimen. The method further comprises the steps of moving at least one of said specimen and said source for providing relative motion of the source with respect to the specimen; and imaging the specimen along a series of different viewing axes, which intersect a virtual reference surface that surrounds the specimen and is substantially centered thereon, wherein said combined steps of moving and imaging generate a sampling geometry on said virtual reference surface. As defined herein, the steps of moving and imaging are coordinated in such a way that said sampling geometry comprises a plurality of spaced apart line segments.Type: GrantFiled: September 30, 2021Date of Patent: November 21, 2023Assignee: FEI CompanyInventors: Andrew M. Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Trond Karsten Varslot
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Patent number: 11574794Abstract: Methods include holding a sample with a movement stage configured to rotate the sample about a rotation axis, directing an imaging beam to a first sample location with the sample at a first rotational position about the rotation axis and detecting a first transmitted imaging beam image, rotating the sample using the movement stage about the rotation axis to a second rotational position, and directing the imaging beam to a second sample location by deflecting the imaging beam in relation to an optical axis of the imaging beam and detecting a second transmitted imaging beam image, wherein the second sample location is spaced apart from the first sample location at least at least in relation to the optical axis. Related systems and apparatus are also disclosed.Type: GrantFiled: March 23, 2021Date of Patent: February 7, 2023Assignee: FEI CompanyInventors: Ond{hacek over (r)}ej L. Shán{hacek over (e)}l, Trond Karsten Varslot, Ond{hacek over (r)}ej R. Ba{hacek over (c)}o, Martin Schneider
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Publication number: 20220310354Abstract: Methods include holding a sample with a movement stage configured to rotate the sample about a rotation axis, directing an imaging beam to a first sample location with the sample at a first rotational position about the rotation axis and detecting a first transmitted imaging beam image, rotating the sample using the movement stage about the rotation axis to a second rotational position, and directing the imaging beam to a second sample location by deflecting the imaging beam in relation to an optical axis of the imaging beam and detecting a second transmitted imaging beam image, wherein the second sample location is spaced apart from the first sample location at least at least in relation to the optical axis. Related systems and apparatus are also disclosed.Type: ApplicationFiled: March 23, 2021Publication date: September 29, 2022Applicant: FEI CompanyInventors: Ondrej L. Shánel, Trond Karsten Varslot, Ondrej R. Baco, Martin Schneider
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Patent number: 11428828Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in saType: GrantFiled: February 25, 2019Date of Patent: August 30, 2022Assignee: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
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Patent number: 11430633Abstract: Apertures having references edges are situated to define a sample irradiation zone and a shielded zone. The sample irradiation zone includes a portion proximate the shielded zone that is conjugate to a detector. A sample is scanned into the sample irradiation zone from the shielded zone so that the sample can remain unexposed until situated properly with respect to the detector for imaging. Irradiation exposure of the sample is reduced, permitting superior imaging.Type: GrantFiled: December 29, 2020Date of Patent: August 30, 2022Assignee: FEI CompanyInventors: Ondrej L. Shanel, Trond Karsten Varslot, Martin Schneider, Maarten Kuijper, Ondrej R. Baco, Václav Batelka
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Publication number: 20220208511Abstract: Apertures having references edges are situated to define a sample irradiation zone and a shielded zone. The sample irradiation zone includes a portion proximate the shielded zone that is conjugate to a detector. A sample is scanned into the sample irradiation zone from the shielded zone so that the sample can remain unexposed until situated properly with respect to the detector for imaging. Irradiation exposure of the sample is reduced, permitting superior imaging.Type: ApplicationFiled: December 29, 2020Publication date: June 30, 2022Applicant: FEI CompanyInventors: Ondrej L. Shanel, Trond Karsten Varslot, Martin Schneider, Maarten Kuijper, Ondrej R. Baco, Václav Batelka
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Publication number: 20220099600Abstract: A method of investigating a specimen using tomographic imaging, comprising the steps of providing a specimen and a source, directing a beam of radiation from said source to said specimen, and detecting a flux of radiation transmitted through said specimen. The method further comprises the steps of moving at least one of said specimen and said source for providing relative motion of the source with respect to the specimen; and imaging the specimen along a series of different viewing axes, which intersect a virtual reference surface that surrounds the specimen and is substantially centered thereon, wherein said combined steps of moving and imaging generate a sampling geometry on said virtual reference surface. As defined herein, the steps of moving and imaging are coordinated in such a way that said sampling geometry comprises a plurality of spaced apart line segments.Type: ApplicationFiled: September 30, 2021Publication date: March 31, 2022Applicant: FEI CompanyInventors: Andrew M. Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Trond Karsten Varslot
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Patent number: 10685759Abstract: A method of analyzing a specimen using X-rays, comprising the steps of: Irradiating the specimen with input X-rays; Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation, which method further comprises the following steps: Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1. For each pixel pi in each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i; A variance ?2S in S per pixel position i. Using these values S and ?2S to produce a map of mean X-ray photon energy E per pixel.Type: GrantFiled: January 16, 2017Date of Patent: June 16, 2020Assignee: FEI CompanyInventors: Wilfred Kelsham Fullagar, Andrew Maurice Kingston, Glenn Robert Myers, Mahsa Paziresh, Trond Karsten Varslot
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Publication number: 20190187306Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in saType: ApplicationFiled: February 25, 2019Publication date: June 20, 2019Applicant: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
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Patent number: 10254419Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.Type: GrantFiled: August 15, 2016Date of Patent: April 9, 2019Assignee: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
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Patent number: 10152785Abstract: A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.Type: GrantFiled: July 27, 2016Date of Patent: December 11, 2018Assignee: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Benoit Recur, Trond Karsten Varslot
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Patent number: 10043274Abstract: A method for processing image data of a sample is disclosed. The method comprises registering a first and a second images of at least partially overlapping spatial regions of the sample and processing data from the registered images to obtain integrated image data comprising information about the sample, said information being additional to that available from said first and second images.Type: GrantFiled: September 2, 2014Date of Patent: August 7, 2018Assignee: FEI CompanyInventors: Trond Karsten Varslot, Andrew Maurice Kingston, Adrian Paul Sheppard, Mark Alexander Knackstedt, Robert Martin Sok, Shane Jamie Latham
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Publication number: 20180204647Abstract: A method of analyzing a specimen using X-rays, comprising the steps of: Irradiating the specimen with input X-rays; Using a detector to detect a flux of output X-rays emanating from the specimen in response to said irradiation, which method further comprises the following steps: Using the detector to intercept at least a portion of said flux so as to produce a set {Ij} of pixeled images Ij of at least part of the specimen, whereby the cardinality of the set {Ij} is M>1. For each pixel piin each image Ij, determining the accumulated signal strength Sij, thus producing an associated set of signal strengths {Sij}. Using the set {Sij} to calculate the following values: A mean signal strength S per pixel position i; A variance ?2S in S per pixel position i. Using these values S and ?2S to produce a map of mean X-ray photon energy E per pixel.Type: ApplicationFiled: January 16, 2017Publication date: July 19, 2018Applicant: FEI CompanyInventors: Wilfred Kelsham Fullagar, Andrew Maurice Kingston, Glenn Robert Myers, Mahsa Paziresh, Trond Karsten Varslot
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Publication number: 20170061610Abstract: A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.Type: ApplicationFiled: July 27, 2016Publication date: March 2, 2017Applicant: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Benoit Recur, Trond Karsten Varslot
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Publication number: 20170052264Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.Type: ApplicationFiled: August 15, 2016Publication date: February 23, 2017Applicant: FEI CompanyInventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
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Patent number: 9384567Abstract: A computed tomography imaging process, including: acquiring projection images of an object by detecting radiation that has passed through the object for respective different relative orientations of the object and the radiation; and processing the projection images to generate a tomogram of the object; wherein the radiation passes through the object in the form of a diverging beam, and the different relative orientations of the object and the beam of radiation define two or more complete trajectories of the beam along the object, the complete trajectories being mutually offset to reduce the degradation of spatial resolution in portions of the generated tomogram due to the divergence of the beam through the object.Type: GrantFiled: October 3, 2012Date of Patent: July 5, 2016Assignee: FEI CompanyInventors: Adrian Paul Sheppard, Andrew Maurice Kingston, Trond Karsten Varslot
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Patent number: 9129425Abstract: Disclosed is a method of reconstructing a multi-dimensional data set representing a dynamic sample at a series of reconstruction instants. The multi-dimensional data set comprises a static component and a dynamic component. The method comprises acquiring a plurality of projection images of the dynamic sample; reconstructing a static component of the multi-dimensional data set from the acquired projection images; acquiring a further plurality of projection images of the dynamic sample; and reconstructing a dynamic component of the multi-dimensional data set at each reconstruction instant from the further plurality of acquired projection images using a priori information about the sample. The multi-dimensional data set is the sum of the static component and the dynamic component at each reconstruction instant.Type: GrantFiled: December 21, 2011Date of Patent: September 8, 2015Assignee: FEI CompanyInventors: Glenn Robert Myers, Adrian Paul Sheppard, Andrew Maurice Kingston, Trond Karsten Varslot
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Publication number: 20150104078Abstract: A method for processing image data of a sample is disclosed. The method comprises registering a first and a second images of at least partially overlapping spatial regions of the sample and processing data from the registered images to obtain integrated image data comprising information about the sample, said information being additional to that available from said first and second images.Type: ApplicationFiled: September 2, 2014Publication date: April 16, 2015Inventors: Trond Karsten Varslot, Andrew Maurice Kingston, Adrian Paul Sheppard, Mark Alexander Knackstedt, Robert Martin Sok, Shane Jamie Latham
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Patent number: 8938111Abstract: A computed tomography imaging process, including: accessing projection data representing two-dimensional projection images of an object acquired using a misaligned tomographic imaging apparatus; and processing the projection data to generate misalignment data representing one or more values that quantify respective misalignments of the tomographic imaging apparatus.Type: GrantFiled: January 13, 2011Date of Patent: January 20, 2015Assignee: FEI CompanyInventors: Andrew Maurice Kingston, Adrian Paul Sheppard, Trond Karsten Varslot, Shane Jamie Latham, Arthur Sakellariou
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Patent number: 8854430Abstract: A method for processing image data of a sample is disclosed. The method comprises registering a first and a second images of at least partially overlapping spatial regions of the sample and processing data from the registered images to obtain integrated image data comprising information about the sample, said information being additional to that available from said first and second images.Type: GrantFiled: May 22, 2009Date of Patent: October 7, 2014Assignee: FEI CompanyInventors: Trond Karsten Varslot, Andrew Maurice Kingston, Adrian Paul Sheppard, Mark Alexander Knackstedt, Robert Martin Sok, Shane Jamie Latham