Patents by Inventor Troy Palm

Troy Palm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus to assist the processing of deformed substrates
    Patent number: 10014228
    Abstract: A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: July 3, 2018
    Assignee: Rudolph Technologies, Inc.
    Inventors: James H. Greer, Troy Palm
  • Edge grip substrate handler
    Patent number: 9460953
    Abstract: A mechanism for handling substrates such as semiconductor wafers is disclosed. The mechanism supports the substrate in a tilted orientation to ensure that undesirable contact between a bowed substrate and the mechanism does not occur. The structure that supports the substrate in a tilted orientation may be fixed or adjustable. A sensor may be provided to measure and/or monitor a distance between a substrate and the mechanism. Alternatively, a sensor for determining contact between the substrate and the mechanism may be provided.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: October 4, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Isao Sato, Hiroki Ueno, Yasutoshi Ito, Masataka Ryu, Troy Palm
  • Substrate handler
    Patent number: 9437467
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: September 6, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey Monjoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • Wafer inversion mechanism
    Patent number: 9431282
    Abstract: A BOLTS compatible module includes a support mechanism for gripping a wafer. The support mechanism is coupled to a rotary mechanism for rotating the support mechanism with a wafer grip therein. The rotary mechanism is coupled to the module and capable of at least 180° of rotation.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: August 30, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventor: Troy Palm
  • Support for semiconductor substrate
    Patent number: 9401299
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: July 26, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson
  • Method and Apparatus to Assist the Processing of Deformed Substrates
    Publication number: 20160148831
    Abstract: A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.
    Type: Application
    Filed: November 18, 2015
    Publication date: May 26, 2016
    Applicant: RUDOLPH TECHNOLOGIES, INC.
    Inventors: James H. Greer, Troy Palm
  • EDGE GRIP SUBSTRATE HANDLER
    Publication number: 20150371886
    Abstract: A mechanism for handling substrates such as semiconductor wafers is disclosed. The mechanism supports the substrate in a tilted orientation to ensure that undesirable contact between a bowed substrate and the mechanism does not occur. The structure that supports the substrate in a tilted orientation may be fixed or adjustable. A sensor may be provided to measure and/or monitor a distance between a substrate and the mechanism. Alternatively, a sensor for determining contact between the substrate and the mechanism may be provided.
    Type: Application
    Filed: December 20, 2013
    Publication date: December 24, 2015
    Applicant: RUDOLPH TECHNOLOGIES, INC.
    Inventors: Isao Sato, Hiroki Ueno, Yasutoshi Ito, Masataka Ryu, Troy Palm
  • SUBSTRATE HANDLER
    Publication number: 20140314535
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Application
    Filed: April 15, 2014
    Publication date: October 23, 2014
    Applicant: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey Monjoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • Substrate handler
    Patent number: 8698327
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: April 15, 2014
    Assignee: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey MonJoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • SUPPORT FOR SEMICONDUCTOR SUBSTRATE
    Publication number: 20130330154
    Abstract: A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
    Type: Application
    Filed: September 26, 2011
    Publication date: December 12, 2013
    Inventors: Ralph Sowden, Kevin Barr, Matthew Laberge, Troy Palm, Dennis Benson
  • SUBSTRATE HANDLER
    Publication number: 20120257952
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Application
    Filed: January 17, 2012
    Publication date: October 11, 2012
    Applicant: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey MonJoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh