Abstract: A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98).

Abstract: Micromechanical microwave switches with both ohmic and capacitive coupling of rf lines and integration in multiple throw switches useful in microwave arrays.

Abstract: A plating of an inertial mass (207) in a micromechanical accelerometer (200) to increase sensitivity to smaller accelerations. The inertial mass (207) may be on a plate (206) suspended by hinges (208) over a sensing electrode (212) to measure displacement of the inertial mass (207) relative to the sensing electrode (212).

Abstract: This is a processing module which may be used for parallel processing. Multiple software configurable optical interconnections provide for high speed processing which preferably use computer generated holograms to communicate among multiple processing elements. Other methods and devices are disclosed.

Abstract: This is a programmable processing system which comprises: one or more computer networks each of the networks has at least one population of processor nodes; at least one population of storage nodes; and at least one switch to provide transfer of information between the processor nodes and the storage nodes. Each processor node has at least one processing module comprising spatial light modulators; processors; and at least one hologram. Other methods and devices are disclosed.

Abstract: A phase shift illuminator (700) is comprised of a light source (704) and a phase modulator (716), typically a flexure beam micromirror array, which transversely modulates the incident light beam. When a flexure beam micromirror array is used as the phase modulator (716) a polarizing beam splitter (712) and a quarter-wave plate (714) are used to separate the incident and reflected light beams. The phase modulated light beam (720) from the optical illuminator may be used in optical lithography by passing the light beam through a lithography mask (724), typically after the light beam is phase modulated, and focusing the light beam onto a target wafer (726).

Abstract: A phase shift illuminator (700) is comprised of a light source (704) and a phase modulator (716), typically a flexure beam micromirror array, which transversely modulates the incident light beam. When a flexure beam micromirror array is used as the phase modulator (716) a polarizing beam splitter (712) and a quarter-wave plate (714) are used to separate the incident and reflected light beams. The phase modulated light beam (720) from the optical illuminator may be used in optical lithography by passing the light beam through a lithography mask (724), typically after the light beam is phase modulated, and focusing the light beam onto a target wafer (726).

Abstract: A phase-contrast DMD based image system 36 for projecting an amplitude and phase modulated image. A flexure beam DMD array 34 is used to allow analog phase modulation of reflected light 38. The phase modulation is converted to amplitude modulation by the phase-contrast imaging optics including a phase plate 42. The resulting amplitude modulated wave is flicker-free and does not need to be synchronized to optical image sensors.

Abstract: An image simulation system 20 for testing sensor systems 26 and for training image sensor personnel wherein synthetic image data is generated by a scene generator 21 and projected by an image projector 23. The image projector 23 uses a digital micromirror device array 27 to modulate the incident energy and create an image. Four modulation schemes are discussed including digital pulse-width modulation, phase contrast modulation, full complex modulation, and analog modulation. The digital pulse width modulation technique will typically require synchronizing the image sensor and the image projector. Phase contrast modulation, full complex modulation, and analog modulation do not require synchronizing the image projector 23 and the sensor system 26. Phase contrast modulation and full complex modulation have the capability to produce phase information within the image. The image simulation system 20 can produce high contrast images and is more flexible than prior art system.

Abstract: This is a board to transport and convert optical outgoing free-space signals from a spatial light modulator which comprises: at least one detector to process the outgoing free-space signal; at least one signal transmitter to process the outgoing free-space signal; and at least one outgoing optical signal carrier to carry a converted outgoing signal. Other methods and devices are disclosed.

Abstract: A method and apparatus for performing free space optical interconnection. A micro-mirror type of spatial light modulator has an array of mirror elements, whose height with respect to a deflection plane can be individually adjusted. These heights are adjusted such that an input beam of light is phase modulated, and by interference, it is deflected to a desired detector. More than one input beam can be used with the same spatial light modulator, whose mirror elements are adjusted in patterns for deflecting and focussing to multiple detectors.

Abstract: This is a crossbar switch which comprises: X rows by Y columns of modular optical switches each comprising X or more channel inputs and X or more channel outputs where X is greater than one; and each of columns 1 to Y-1 of the modular optical switches having 1/Xth of the channel outputs optically connected to 1/Xth of the channel inputs of each of the modular optical switches in a next column. Other methods and devices are disclosed.

Abstract: This is an optical interconnect system. The system comprises: at least one signal transmitter; at least two signal receivers; at least one DMD in the same plane as the signal transmitter; and a hologram, whereby the phase of the original beam from the signal transmitter may be programmably changed, by a DMD, such that the beams received at the signal receiver may cancel or reinforce. Other methods and devices are disclosed.