Abstract: An angular velocity sensor includes a tuning fork resonator having multiple arms that extend from a base, a single lead frame that supports the base, and a package that supports the single lead frame. The package and lead frame defines a space therebetween.

Abstract: A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.

Abstract: The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle ? with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=?x (Ax×cos ?+Az×sin ?), and output Apz of the axis direction of the second force sensor is found as Apz=?z (Ax×sin ?+Az×cos ?), and, when ?x and ?z are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient ?z of second force sensor is set as ?z=?x tan ?, and the detected stress Ax is found as Ax=(Apx?Apz)/?x(cos ??tan ?×sin ?).

Abstract: A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.

Abstract: A filter element includes resonators that are arranged in series arms and parallel arms in a circuit. In this filter element, at least one of the series-arm resonators includes a plurality of single-terminal pair piezoelectric thin-film resonators connected in parallel.

Abstract: A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.

Abstract: An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in the package so that a width direction of the vibrator coinciding with a long-side direction of the package. The vibrator may be attached to the package so that the vibrator is inclined with respect to a vertical direction.

Abstract: An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

Abstract: A filter chip includes multiple series-arm resonators arranged in series arms of a ladder arrangement, and multiple parallel-arm resonators arranged in parallel arms of the ladder arrangement. A common line is connected to first electrodes of at least two parallel-arm resonators among the multiple parallel-arm resonators. Second electrodes of said at least two parallel-arm resonators are connected to associated series-arm resonators among the multiple series-arm resonators.

Abstract: An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in a diagonal direction of the package. The angular velocity sensor includes a circuit board that supports the package. The vibrator is attached to the circuit board so that the vibrator is inclined to a vertical direction by a given angle.

Abstract: An electrical contact device (X1) includes a first contactor with contact portions (C1, C2) and a second contactor with contact portions (C3, C4). The device (X1) also includes an electrical circuit having a branch path (YA) provided by the contact portions (C1, C3) and a branch path (YB) provided by the contact portions (C2, C4). When closed, the branch path (YA) has a smaller resistance, and the branch path (YB) a greater resistance. In a closing operation, the first and second contactors approach each other. Then the contact portion (C1) and the contact portion (C3) contact with each other after the contact portion (C2) and the contact portion (C4) contact with each other. In an opening operation, the first and second contactors separate from each other. Then the contact portion (C1) and the contact portion (C3) separate after the contact portion (C2) and the contact portion (C4) separate.

Abstract: An angular velocity sensor includes a tuning fork resonator having multiple arms that extend from a base, a single lead frame that supports the base, and a package that supports the single lead frame. The package and lead frame defines a space therebetween.

Abstract: An electrical contact device (X1) includes a first contactor with contact portions (C1, C2) and a second contactor with contact portions (C3, C4). The device (X1) also includes an electrical circuit having a branch path (YA) provided by the contact portions (C1, C3) and a branch path (YB) provided by the contact portions (C2, C4). When closed, the branch path (YA) has a smaller resistance, and the branch path (YB) a greater resistance. In a closing operation, the first and second contactors approach each other. Then the contact portion (C1) and the contact portion (C3) contact with each other after the contact portion (C2) and the contact portion (C4) contact with each other. In an opening operation, the first and second contactors separate from each other. Then the contact portion (C1) and the contact portion (C3) separate after the contact portion (C2) and the contact portion (C4) separate.

Abstract: An electrical contacting device includes a plurality of current paths connected in parallel to each other, and a plurality of electrical contact points each having a first contact and a second contact that are mechanically opened and closed. Each current path is provided with a corresponding one of the contact points. For prevention of the occurrence of arc discharge at the contact points, each current path has its electrical characteristics adjusted in order not to allow the passage of the minimum discharge current.

Abstract: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.

Abstract: An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided.

Abstract: A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.

Abstract: A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.

Abstract: A magnetic head supporting mechanism includes a fixing member, a piezoelectric element supported by the fixing member, and a head supporting member provided on the piezoelectric element, a magnetic head being supported by the head supporting member. An acceleration sensor is formed by the head supporting member and the piezoelectric element so as to be incorporated into the mechanism.

Abstract: A SAW filter includes a first SAW resonator having a pair of terminals and a predetermined resonance frequency (frp), the first SAW resonator being provided in a parallel arm of the SAW filter. A second SAW resonator has a pair of terminals and a predetermined resonance frequency (frs) approximately equal to a predetermined antiresonance frequency of the first SAW resonator (fap). The second SAW resonator is provided in a series arm of the SAW filter. An inductance element is connected in series to the first SAW resonator.