Patents by Inventor Tsutomu Shinohara

Tsutomu Shinohara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220196163
    Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.
    Type: Application
    Filed: January 17, 2020
    Publication date: June 23, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Daihi TSUCHIGUCHI, Toshihide YOSHIDA, Ryutaro TANNO, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Patent number: 11365830
    Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: June 21, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20220186845
    Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.
    Type: Application
    Filed: January 21, 2020
    Publication date: June 16, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshiyuki INADA, Kazunari WATANABE, Kenji AIKAWA, Kohei SHIGYOU, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Patent number: 11346461
    Abstract: To provide a manual valve device suitable for a miniaturized and integrated fluid control system, the manual valve device includes a casing having a tubular shape and incorporating a drive mechanism, an operation member for activating the drive mechanism, and a cam part that converts a force acting on the operation member into a driving force of the drive mechanism. The manual valve device further includes a protective cover provided on an upper end side of the casing and covering at least a portion of the operation member. The operation member includes an attaching part that allows removable attaching of an auxiliary tool for causing a force required for activation of the drive mechanism to act on the operation member. The protective cover is formed so as to allow access to the attaching part of the operation member by the auxiliary tool.
    Type: Grant
    Filed: September 4, 2018
    Date of Patent: May 31, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Tomohiro Nakata, Toshiyuki Inada, Tsutomu Shinohara
  • Patent number: 11340636
    Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: May 24, 2022
    Assignee: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Patent number: 11339881
    Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: May 24, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Yohei Sawada, Tomohiro Nakata, Tsutomu Shinohara
  • Patent number: 11322372
    Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Toshihide Yoshida, Yukio Minami, Tsutomu Shinohara
  • Patent number: 11320056
    Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Patent number: 11306830
    Abstract: A valve device includes a valve body; a valve seat; an inner disk made of a metal alloy having an inner annular portion, outer annular portion and a connecting portion that connects the inner annular portion and the outer annular portion; a diaphragm made of a metal alloy covering the inner disk and the valve seat and moving between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat to enable and shuts off communication between the first flow path and the second flow paths; and a presser adapter that presses a peripheral edge portion of the diaphragm toward the outer annular portion; and the inner disk has a hardness higher than the valve seat and lower than both the valve body and the diaphragm.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: April 19, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Tsutomu Shinohara, Tomohiro Nakata, Hidenobu Sato
  • Publication number: 20220082176
    Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.
    Type: Application
    Filed: January 23, 2020
    Publication date: March 17, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ryutaro TANNO, Toshihide YOSHIDA, Daihi TSUCHIGUCHI, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Patent number: 11261990
    Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: March 1, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta Kondo, Hidenobu Sato, Tomoko Yuhara
  • Patent number: 11255458
    Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 22, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata, Tsutomu Shinohara
  • Patent number: 11243549
    Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: February 8, 2022
    Assignee: Fujikin Inc.
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Patent number: 11242934
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: February 8, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Toshihide Yoshida, Masahiko Takimoto, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura, Masahiko Nakazawa
  • Patent number: 11231026
    Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: January 25, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20220019187
    Abstract: A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.
    Type: Application
    Filed: November 25, 2019
    Publication date: January 20, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Yuto KAWAUCHI, Yuya SUZUKI, Ryutaro TANNO, Akihiro HARADA, Tsutomu SHINOHARA
  • Patent number: 11226257
    Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: January 18, 2022
    Assignee: Fujikin Inc.
    Inventors: Akihiro Harada, Kouji Nishino, Ryousuke Dohi, Koji Kawada, Katsuyuki Sugita, Nobukazu Ikeda, Michio Yamaji, Tsutomu Shinohara, Ryutaro Tanno, Yuto Kawauchi
  • Publication number: 20210404505
    Abstract: A bolt holding member is made of metal and holds a bolt in a fastened member. The bolt holding member includes: a main body portion that has a cylindrical shape; a first engaging piece that extends from the main body portion toward an inside of the main body portion at an incline relative to an axial direction of the main body portion; and a second engaging piece that extends from the main body portion toward an outside of the main body portion at an incline relative to the axial direction of the main body portion.
    Type: Application
    Filed: June 30, 2021
    Publication date: December 30, 2021
    Inventors: Tsutomu SHINOHARA, Tomohiro NAKATA, Takahiro MATUSDA, Kazunari WATANABE, Tomoki NAKADA, Yoshiaki WATANABE, Tomoko YUHARA, Kengo TSUJINO, Masanori UEBAYASHI
  • Publication number: 20210396326
    Abstract: A fluid control device comprises includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.
    Type: Application
    Filed: October 18, 2019
    Publication date: December 23, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Tomohiro NAKATA, Toshiyuki INADA, Akihiro HARADA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20210388914
    Abstract: A valve device has a structure more suitable for miniaturization and integration and is used for a semiconductor manufacturing process or the like. A valve device includes: a valve body which is accommodated in an accommodation recess and has a first port and a second port in a bottom surface; and a bonnet nut which has a screw portion formed on an outer periphery thereof and is screwed with the inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has first and second annular protrusions for sealing which are formed around the first port and the second port and protrude from a bottom surface. The first and the second annular protrusions are formed so as to share a part thereof.
    Type: Application
    Filed: October 21, 2019
    Publication date: December 16, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Takahiro MATSUDA, Akihiro HARADA, Kazunari WATANABE, Tomohiro NAKATA, Tsutomu SHINOHARA