Abstract: Disclosed is a method of manufacturing a semiconductor device which has reliable buried interconnects (wirings) and a reliable MIM capacitor. An interconnect and a capacitor bottom electrode are formed inside a hole made in six insulation films. Then a barrier insulation film is formed on the uppermost film (of the above six insulation films) including the interconnect and the top face of the bottom electrode. After two insulation films are formed above the barrier insulation film, a hole is made in the two insulation films and a capacitor top electrode is buried in that hole. The barrier insulation film also functions as a capacity insulation film for the capacitor. Then, after three other insulation films are formed on the upper film (of the above two insulation films) including the top face of the top electrode, a hole is made in the barrier insulation film, the two insulation films, and the three other insulation films, and another interconnect is buried in that hole.

Abstract: A silicon oxide film on which a capacitor of a semiconductor integrated circuit device is formed is formed by the plasma CVD method at a temperature of 450° C. to 700° C. In this semiconductor integrated circuit device, a memory cell formed of a MISFET for data transfer and a capacitor is formed in a memory cell forming area, and an n channel MISFET and a p channel MISFET constituting a logic circuit is formed in a logic circuit forming area. As a result, the amount of degassing from the silicon oxide film can be reduced. Therefore, the growth of silicon grains on a surface of the silicon film constituting a lower electrode of the capacitor is not hindered by the degassing, and it becomes possible to increase the capacitance. Also, the step of a heat treatment for removing the moisture and the like after forming the silicon oxide film can be omitted, and it becomes possible to prevent the deterioration of the property of the MISFET.

Abstract: Purine nucleotide derivative disodium crystals having a minimized amount of remaining alcohol such as methanol, ethanol or a mixture thereof are produced by overdrying purine nucleotide derivative disodium crystals containing the alcohol; and bringing the overdried purine nucleotide derivative disodium crystals into contact with an aqueous solution containing a hydrophilic organic solvent to control the humidity of the purine nucleotide derivative disodium crystals under a high humidity condition.

Abstract: Peeling between a bonding pad and an insulating film which underlies the bonding pad is to be prevented. A laminate film constituted mainly by W which is higher in mechanical strength than a wiring layer using an Al alloy film as a main conductive layer and than a bonding pad, is formed within an aperture formed in silicon oxide films and is interposed between the wiring line and the bonding pad.

Abstract: Provided are a semiconductor device comprising a semiconductor substrate, a first insulating film formed thereover, interconnects formed over the first insulating film and having copper as a main component, a second insulating film formed over the upper surface and side surfaces of each of the interconnects and over the first insulating film and having a function of suppressing or preventing copper diffusion, and a third insulating film formed over the second insulating film and having a dielectric constant lower than that of the second insulating film; and a method of manufacturing the semiconductor device. This invention makes it possible to improve dielectric breakdown strength between copper interconnects and reduce capacitance between the copper interconnects.

Abstract: A silicon oxide film on which a capacitor of a semiconductor integrated circuit device is formed is formed by the plasma CVD method at a temperature of 450° C. to 700° C. In this semiconductor integrated circuit device, a memory cell formed of a MISFET for data transfer and a capacitor is formed in a memory cell forming area, and an n channel MISFET and a p channel MISFET constituting a logic circuit is formed in a logic circuit forming area. As a result, the amount of degassing from the silicon oxide film can be reduced. Therefore, the growth of silicon grains on a surface of the silicon film constituting a lower electrode of the capacitor is not hindered by the degassing, and it becomes possible to increase the capacitance. Also, the step of a heat treatment for removing the moisture and the like after forming the silicon oxide film can be omitted, and it becomes possible to prevent the deterioration of the property of the MISFET.

Abstract: A cushion for protecting a vehicle occupant's head. The cushion inflates and deploys smoothly and is configured so that gas leakage out of the cushion is reduced in order to maintain the inner pressure high for an extended period of time. The cushion includes a protective cushion element and outer shell fabrics superposed on both outer surfaces of the protective cushion element. The cushion element includes a cabin-side base fabric and a window-side base fabric that are sewn together by sewing yarns after being bonded to each other by adhesive. The outer shell fabrics are bonded to the protective cushion element by adhesives. When the protective cushion element is inflated, the outer shell fabrics are tightly stretched over the outer surfaces of the inflated protective cushion element so as to cover a depressed portions of the base fabrics.

Abstract: A cushion for protecting a vehicle occupant's head. The cushion inflates and deploys smoothly and is configured so that gas leakage out of the cushion is reduced in order to maintain the inner pressure high for an extended period of time. The cushion includes a protective cushion element and outer shell fabrics superposed on both outer surfaces of the protective cushion element. The cushion element includes a cabin-side base fabric and a window-side base fabric that are sewn together by sewing yarns after bonded to each other by adhesive. The outer shell fabrics are bonded to the protective cushion element by adhesive. The adhesive is applied to the outer surfaces of the protective cushion element the joint wherein the base fabrics are sewn together.

Abstract: Peeling between a bonding pad and an insulating film which underlies the bonding pad is to be prevented. A laminate film constituted mainly by W which is higher in mechanical strength than a wiring layer using an Al alloy film as a main conductive layer and than a bonding pad, is formed within an aperture formed in silicon oxide films and is interposed between the wiring line and the bonding pad.

Abstract: The invention is provided to prevent breakage and separation of wiring of a semiconductor integrated circuit device such as a bit-line of a DRAM. An HDP silicone oxide film is deposited on a bit-line that is connected to the source and drain region of a memory cell selection MISFET of a DRAM memory cell by means of high density plasma CVD technique, and subjected to RTA (heat treatment) at 750° C. The surface is polished, and then a capacitor to be connected to other source and drain region of the memory cell selection MISFET is formed. As the result, even when a tantalum oxide film that is an capacitance insulating film of the capacitor is subjected to heat treatment, the film stress exerted on the bit-line is reduced, and breakage and separation of the bit-line are prevented.

Abstract: When entrance administration equipment detects an approaching user, it transmits a communication trigger command to a portable telephone, carried by the approaching user. When it receives a response signal from the portable telephone, it transmits a transmitting command of embarkation person information. When it receives the person's embarkation information from the portable telephone, it executes an authentication process. When the person's embarkation information does not coincide with data of the embarkation-scheduled person database, the entrance administration equipment displays a message of a failure of the authentication process. When the authentication process succeeds, the entrance administration equipment records the person's embarkation information, opens the door, issues a printed ticket containing the person's embarkation information, and transmits a control signal for turning off power of the portable telephone to the portable telephone.

Abstract: A predetermined initialization is made on a CD-R disc or a CD-RW disc using an existing formatting method to a specific disc on which recorded are a media number forming an encryption key based on a combination of a decimal six-digit disc ID, a decimal thirteen-digit MCN and a decimal five-digit ISRC serial number and encrypted data obtained by the encryption using this media number. This allows a user to make the copy of copyrighted data such as music, movie and computer program data only once, but inhibits the secondary copy from this copy disc to another disc, which achieves the protection of the copyrighted data.

Abstract: A heat retaining knit fabric is comprised of a knit textile design for outer clothing exposed in an open air wherein heat is retained inside a knit structure and a dispersion of heat is prevented when using heat of wetting generating fiber which generates heat by water adsorption and steam adsorption in a interlock stitch of plating stitch comprising minute space surrounded by two kinds of yarn at the front and the back of each knitted loop in a knit-loop portion.

Abstract: A child seat is formed of a child seat main portion for holding a child having an engaging member, and a base on which the child seat main portion is detachably mounted. The base has a connecting portion to be connected to a vehicle, and a fixing member to be engageable with the engaging member of the child seat main portion. An engagement releasing member is installed in the base or the child seat main portion for releasing an engagement between the fixing member and the engaging member. Since the base can be connected to the vehicle without the child seat main portion, the child seat can be extremely simply fixed to the vehicle.

Abstract: Polyisocyanurate foam is produced by reacting a polyisocyanate component with an anhydrous reaction product between a dibasic acid anhydride and a partially alcoholated polyether-polyol with an alkali metal hydroxide and/or alkaline earth metal hydroxide. The reaction product acts as a catalyst for trimerizing the polyisocyanate and also as a polyether-polyol component.

Abstract: A two-way CATV system having a substantial number of terminals incorporates a central processor and transmitter system which continually interrogates the terminals at high speed, monitoring changes of usage of premium programs and other data while also permitting central control of access to restricted premium programs. For inexpensive but reliable intercommunication, short, fixed word length digital messages are frequency multiplexed onto the cable in both upstream and downstream directions, and subscriber groups are controllably selected in turn, with each subscriber being scanned in what may be an arbitrary order by transmission of unique private messages which are recognized at the terminal and in response to which previously prepared fixed length messages are immediately transmitted in return.

Abstract: A device for massaging the sole of foot comprises a plurality of rows of projection rollers having projections extending in substantially radial directions of the respective rollers. The positions of the rollers and the lengths of the projections are so determined that a surface connecting the uppermost points of the projections is raised at the central portion thereof. Such arrangement of the rollers renders the projections as a whole into conformity with the soles of feet, particularly to the arches of feet. One may place both feet on the device and move the feet back and forth in a direction perpendicular to the rows to conduct press massaging on the soles of feet.

Abstract: In a CATV system, a received signal band containing video channels and a data signal at a selected frequency is successively converted in frequency so as to provide a chosen video signal at the frequency of a selected channel. After the first conversion a residual fundamental of the data signal carrier is bandpass filtered, amplified and then demodulated to extract the data signal. The needed filtering and signal processing can thereby be more economically accomplished without adverse effects on adjacent video signal channels.