Abstract: In a method of coating a photo resist over a wafer, dispensing the photo resist from a nozzle over the wafer is started while rotating the wafer, and dispensing the photo resist is stopped while rotating the wafer. After starting and before stopping the dispensing the photo resist, a wafer rotation speed is changed at least 4 times. During dispensing, an arm holding the nozzle may move horizontally. A tip end of the nozzle may be located at a height of 2.5 mm to 3.5 mm from the wafer.

Abstract: The present invention relates to a method for encapsulating a nanostructure, the method comprising the steps of: providing a substrate; forming a plug composed of plug material at said substrate; forming a nanostructure (on or) at said plug; forming a shell composed of at least one shell material on external surfaces of the nanostructure, with the at least one shell material covering said nanostructure and at least some of the plug material, whereby the shell and the plug encapsulate the nanostructure. The invention further relates to a coated nanostructure and to the use of a coated nanostructure.

Abstract: The invention relates to the use of a construct for the detection of an analyte using surface enhanced spectroscopic techniques. The construct includes linked surfaces, where the link is formed by a linker providing a fixed inter-surface separation between the linked surfaces, wherein the linker is a linking compound, and at least one of the surfaces is the surface of a nanoparticle. The linking compound is suitable for interacting with the analyte. The linking compound may be a cucurbituril. The surface enhanced spectroscopic technique may be surface enhanced Raman spectroscopy (SERS).

Abstract: The present invention relates to a method for encapsulating a nanostructure, the method comprising the steps of: providing a substrate; forming a plug composed of plug material at said substrate; forming a nanostructure (on or) at said plug; forming a shell composed of at least one shell material on external surfaces of the nanostructure, with the at least one shell material covering said nanostructure and at least some of the plug material, whereby the shell and the plug encapsulate the nanostructure. The invention further relates to a coated nanostructure and to the use of a coated nanostructure.

Abstract: The invention relates to the use of a construct for the detection of an analyte using surface enhanced spectroscopic techniques. The construct includes linked surfaces, where the link is formed by a linker providing a fixed inter-surface separation between the linked surfaces, wherein the linker is a linking compound, and at least one of the surfaces is the surface of a nanoparticle. The linking compound is suitable for interacting with the analyte. The linking compound may be a cucurbituril. The surface enhanced spectroscopic technique may be surface enhanced Raman spectroscopy (SERS).