Patents by Inventor Turgut TUT

Turgut TUT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8890271
    Abstract: Various embodiments for etching of silicon nitride (SixNy) lightpipes, waveguides and pillars, fabricating photodiode elements, and integration of the silicon nitride elements with photodiode elements are described. The results show that the quantum efficiency of the photodetectors (PDs) can be increased using vertical silicon nitride vertical waveguides.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: November 18, 2014
    Assignees: Zena Technologies, Inc., President and Fellows of Harvard College
    Inventors: Turgut Tut, Peter Duane, Young-June Yu, Winnie N. Ye, Munib Wober, Kenneth B. Crozier
  • Publication number: 20120001284
    Abstract: Various embodiments for etching of silicon nitride (SixNy) lightpipes, waveguides and pillars, fabricating photodiode elements, and integration of the silicon nitride elements with photodiode elements are described. The results show that the quantum efficiency of the photodetectors (PDs) can be increased using vertical silicon nitride vertical waveguides.
    Type: Application
    Filed: December 13, 2010
    Publication date: January 5, 2012
    Applicants: PRESIDENT AND FELLOWS OF HARVARD COLLEGE, ZENA TECHNOLOGIES, INC.
    Inventors: Turgut TUT, Peter Duane, Young-June Yu, Winnie N. Ye, Munib Wober, Kenneth B. Crozier