Patents by Inventor Tushar V. Mandrekar

Tushar V. Mandrekar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for doping non-planar transistors
    Patent number: 8114761
    Abstract: Methods for doping a non-planar structure by forming a conformal doped silicon glass layer on the non-planar structure are disclosed. A substrate having the non-planar structure formed thereon is positioned in chemical vapor deposition process chamber to deposit a conformal SACVD layer of doped glass (e.g. BSG or PSG). The substrate is then exposed to RTP or laser anneal step to diffuse the dopant into the non-planar structure and the doped glass layer is then removed by etching.
    Type: Grant
    Filed: July 26, 2010
    Date of Patent: February 14, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Tushar V. Mandrekar, Shankar Venkataraman, Zhong Qiang Hua, Manuel A. Hernandez
  • METHOD FOR DOPING NON-PLANAR TRANSISTORS
    Publication number: 20110129990
    Abstract: Methods for doping a non-planar structure by forming a conformal doped silicon glass layer on the non-planar structure are disclosed. A substrate having the non-planar structure formed thereon is positioned in chemical vapor deposition process chamber to deposit a conformal SACVD layer of doped glass (e.g. BSG or PSG). The substrate is then exposed to RTP or laser anneal step to diffuse the dopant into the non-planar structure and the doped glass layer is then removed by etching.
    Type: Application
    Filed: July 26, 2010
    Publication date: June 2, 2011
    Applicant: Applied Materials, Inc.
    Inventors: Tushar V. Mandrekar, Shankar Venkataraman, Zhong Qiang Hua, Manuel A. Hernandez