Abstract: A method for manufacturing a blade for a gas turbine includes forming a blade body, forming a groove in an outer surface of the blade body, positioning a cover on the blade body such that it covers the groove and such that an outer surface of the cover forms a continuous surface with the outer surface of the blade body, and joining the cover to the blade body so that the cover and the groove define a cooling channel.

Abstract: The present application relates to a micromechanical component (1) and a method for producing a micromechanical component (1). The proposed micromechanical component (1) comprises a layered structure and at least one piezoelectric element (10). The piezoelectric element (10) contains a first electrode (5) and second electrode (27) for generating and/or detecting deflections of a deflection element (16). The deflection element (16) is connected to a holder (17). The layered structure of the micromechanical component (1) comprises a silicon substrate (2), a conductive semiconductor layer (26), a piezoelectric layer (7) and a conductive layer film (12). The conductive semiconductor layer (26) forms the first electrode (5) and the conductive layer film (12) forms the second electrode (27) of the piezoelectric element, wherein the conductive semiconductor layer (26) at the same time forms a carrier layer (28) for the deflection element (16).

Abstract: Methods and device for measuring depth information relating to a scene on the basis of structured light generated by means of at least one parallel radiation source, wherein the method comprises: generating a respective electromagnetic beam by means of at least one parallel radiation source; time-dependent sequential aligning or optically imaging the beam or at least one of the beams on different locations, in particular punctiform or line segment-shaped locations of a three-dimensional scene in order to irradiate the scene by means of the at least one imaged beam in the form of an irradiation pattern defined by the trajectory of the beam arising from the time-dependent alignment or imaging of the beam; detecting, at least in portions, an image representation of the irradiation pattern generated by an at least partial reflection of the irradiation pattern at one or more surfaces of at least one object present in the scene (namely, a physical object), and generating image information representing the detected

Abstract: A microscanner has: a deflection element for deflecting an incident electromagnetic beam; a support structure; and a spring device comprising one or more springs, by means of which the deflection element is suspended on the support structure in an oscillating manner in such a way that it can simultaneously carry out a first rotational oscillation around a first oscillation axis and a second rotational oscillation around a second oscillation axis orthogonal thereto relative to the support structure, in order to be able to effectuate a Lissajous projection in an observation field by reflection of an electromagnetic beam incident on the deflection element during the simultaneous oscillations.

Abstract: A microscanner for projecting electromagnetic radiation onto an observation field comprises: a deflection element having a mirror surface designed as a micromirror for deflecting an incident electromagnetic beam; a support structure that surrounds the deflection element at least in some sections; and a spring device having a plurality of springs. By means of the springs, the deflection element is suspended on the support structure in an oscillating manner in such a way that it can simultaneously carry out a first rotational oscillation around a first oscillation axis and a second rotational oscillation around a second oscillation axis orthogonal thereto relative to the support structure, in order to be able to effectuate a Lissajous projection in an observation field by reflection of an electromagnetic beam incident on the deflection element during the simultaneous oscillations.

Abstract: A projection system for projecting Lissajous figures on an observation field includes a microscanner. This has a deflection unit having a deflection element for deflecting an incident electromagnetic beam, a support structure, and a spring device, by means of which the deflection element is suspended in a gimballess manner on the support structure in such a way that, relative to the support structure, it can simultaneously perform a first rotary oscillation around a first oscillation axis and a second rotary oscillation around a second oscillation axis orthogonal thereto to cause a non-linear Lissajous projection in an observation field by deflecting an electromagnetic beam incident on the deflection element during the simultaneous oscillations.

Abstract: A method for defect detection in a sample, such as in a semiconductor sample, includes the following steps: providing a reference image of the sample; providing a sample image generated via a particle beam inspection system, wherein the sample image comprises a rotation with respect to the reference image; dividing the sample image into sample image regions; dividing the reference image into reference image regions, wherein each sample image region is assigned one reference image region to form an image region pair; identifying in each image region pair a structure that is present both in the sample image region and also in the associated reference image region of the image region pair; registering the sample image regions by correcting a lateral offset of the identified structure in each sample image region on the basis of the location of the identified structure in the respectively associated reference image region, as a result of which corrected sample image regions are formed; and comparing each corrected

Abstract: The invention relates to a driver assistance system (11) for an at least partially automatically driving motor vehicle (10), wherein the driver assistance system (11) comprises at least one environment detection means (13) which is designed to detect at least one area of an environment (U) of the motor vehicle (10), an evaluation device (14) which is designed to determine a target trajectory (T) to be traveled by the motor vehicle (10) according to the detected at least one area of the environment (U), and a control device (18) which is designed to adjust the target trajectory (T) determined by the evaluation device (14).

Abstract: The disclosure relates to an apparatus device for projecting an image on the retina of an eye with a laser projection device, a device for determining the orientation of the eye, and with a tracking unit for tracking the laser beam of the laser projection device according to the determined orientation.

Abstract: There is provided a micro-electromechanical system (MEMS) device (102, 200, 300, 404) for cancelling noise generated by oscillation of a movable micro-electromechanical system (MEMS) element (104, 204, 304, 406). The micro-electromechanical system (MEMS) device (102, 200, 300, 404) includes the movable micro-electromechanical system (MEMS) element (104, 204, 304, 406), an actuator (106, 208, 306, 408), a controller (108, 410) and a movable noise cancelling element (110, 202, 312, 412). The controller (108, 410) provides electrical signals to drive the actuator (106, 208, 306, 408) and the movable noise cancelling element (110, 202, 312, 412) in a way to cancel the noise generated in the micro-electromechanical system (MEMS) device (102, 200, 300, 404) by oscillation of the movable MEMS element (104, 204, 304, 406).

Abstract: The present disclosure provides a Lissajous dual-axial scan component (100) that includes an outer frame (102), a first pair of supports (104A-B), a second pair of supports (106A-B), an inner frame (108), a mirror (110), a sensing arrangement (112), a controller (114) and a memory (116). The memory (116) stores multiple tuples each including a first-axial bias frequency value, a second-axial bias frequency value, and a phase difference between actual driving frequencies (i.e. a first-axial bias frequency and a second-axial bias frequency) of the mirror (110). The controller (114) is coupled to the sensing arrangement (112) to receive signals indicative of current resonant frequencies of the mirror (110) and configured to select one of the tuples from the memory (116) based on the signals received from the sensing arrangement (112) and set the applied bias frequencies, and their phase difference, according to the selected tuple.

Abstract: The present disclosure provides a deflection device (100, 200, 300, 400) for use in a scanner. The deflection device (100, 200, 300, 400) includes a substrate (102, 202), a mirror (106, 206, 304, 404) and actuator means (110). The mirror (106, 206, 304, 404) arranged in a recess (104, 204, 306, 406) in the substrate (102, 202) by connector means (108) in such a way that it can rotate about at least two axes in an oscillatory manner. The actuator means (110) causes the mirror (106, 206, 304, 404) to oscillate. The actuator means (110) are arranged in one or more trenches (112A-D) in the substrate (102, 202) surrounding the recess (104, 204, 306, 406), in such a way that a change of shape of the actuator means (110) will cause a movement in the substrate (102, 202), thereby inducing oscillatory movement of the mirror (106, 206, 304, 404).

Abstract: A micromechanical resonator wafer assembly includes an actuator wafer supporting an outer actuator layer. The outer actuator layer includes an oscillating part configured to be driven by an electrical drive signal. The micromechanical resonator wafer assembly further includes a device wafer mounted on top of the actuator wafer. The device wafer includes a plurality of inner actuators. Each of the inner actuators include an oscillation body configured to oscillate about one or more axes. The device wafer is physically connected to the actuator wafer such that each of the inner actuators forms with the outer actuator layer a coupled oscillation system for excitation of the oscillation body of the respective inner actuator. The micromechanical resonator wafer assembly provides external actuation of the oscillation body of each of the inner actuators by use of the outer actuator layer and hence, provides improved scan angles with fast start-up time.

Abstract: A deflection device for Lissajous scanning is provided. The deflection device includes a frame and a mirror. The mirror is movably arranged in a recess in the frame by means of a suspension mount including one or more springs. The mirror may be configured to swing back and forth about each of two or three axes with a respective eigenfrequency for reflecting incoming light at different angles to form a two-dimensional Lissajous pattern. The deflection device may include a driving device configured to excite swing motion of the mirror about each of the two or three axes at or near the respective eigenfrequency. Each of the one or more springs has a shape of a path segment along a circumference of the mirror together covering more than 360 degrees. An arrangement of the one or more springs provides a compact suspension for the mirror and larger tilt angles.

Abstract: A micromechanical resonator assembly which includes an internal actuator. The internal actuator further includes an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies. The micromechanical resonator assembly further includes an external actuator that includes an oscillating part. The micromechanical resonator assembly further includes a mounting base that includes electronic driving part. The external actuator being mounted on the mounting base and being electrically connected to the electronic driving part, for allowing excitation of the oscillation body of the internal actuator by transfer of energy from the oscillating part to the oscillating body. The micromechanical resonator assembly provides external actuation of the oscillation body of the internal actuator by use of the external actuator and hence, provides extremely large scan angles of 180°.

Abstract: The invention relates to a glass substrate-based MEMS mirror device for variable deflection of an incident electromagnetic beam, as well as a method for its production. The MEMS mirror device has a disk-shaped first glass substrate structured into a plurality of subregions with a mirror subregion formed at least partially as a MEMS mirror for reflecting electromagnetic radiation and a frame subregion surrounding the mirror subregion at least in sections. The mirror subregion is designed as a subregion of the first glass substrate suspended so as to be capable of oscillating in several dimensions relative to the frame subregion by means of at least one connecting element connecting the mirror subregion and the frame subregion and which can be designed in particular as a connecting web or mechanical spring.

Abstract: The invention relates to a MEMS mirror assembly for detecting a large angular range up to 180°, preferably up to 160°, and to a method for producing a MEMS mirror assembly. The mirror assembly comprises a carrier substrate (1), on which a mirror (2) vibrating about at least one axis is mounted, a transparent cover (4), which is connected in a hermetically sealed manner to the carrier substrate (1) and which comprises an ellipsoidal dome (6) having a substantially round base area, and a compensation optical system (8), which is arranged in a predefined beam path for an incident beam outside the dome (6). The middle of the mirror (2) lies in the centre point of the dome, and the compensation optical system (8) collimates the incident beam in such a way that a divergence or convergence of the beam caused by the boundary surfaces of the dome once said beam has exited from the dome (6) is substantially compensated.

Abstract: The invention relates to an image generating device having a radiation source for one or more output beams having Gaussian radiation characteristic, in particular a laser beam source, having a device for generating Bessel-like beams from one or more output beams, having a controllably drivable MEMS scanner, wherein the Bessel-like beams are directed onto the MEMS scanner and are deliberately deflected by the MEMS scanner to generate an image, and having at least one display body at least partially transmissive to the Bessel-like beams, onto which the Bessel-like beams are guided by the MEMS scanner.

Abstract: The disclosure relates to an apparatus device for projecting an image on the retina of an eye with a laser projection device, a device for determining the orientation of the eye, and with a tracking unit for tracking the laser beam of the laser projection device according to the determined orientation.

Abstract: The invention relates to a driver assistance system (11) for an at least partially automatically driving motor vehicle (10), wherein the driver assistance system (11) comprises at least one environment detection means (13) which is designed to detect at least one area of an environment (U) of the motor vehicle (10), an evaluation device (14) which is designed to determine a target trajectory (T) to be traveled by the motor vehicle (10) according to the detected at least one area of the environment (U), and a control device (18) which is designed to adjust the target trajectory (T) determined by the evaluation device (14).