Patents by Inventor Ulrich Pohlmann

Ulrich Pohlmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR THE DETERMINATION OF THE POSITION OF A DISK-SHAPED OBJECT
    Publication number: 20100085582
    Abstract: The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).
    Type: Application
    Filed: September 9, 2009
    Publication date: April 8, 2010
    Applicant: VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH
    Inventors: Gert Weniger, Ulrich Pohlmann, Frank Rennicke