Patents by Inventor Ulrich Weber

Ulrich Weber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10969699
    Abstract: A projection exposure apparatus for semiconductor lithography has a connecting element for connecting a component of the apparatus to a supporting cooling structure of the apparatus. The connecting element has a receiving region for receiving the component, and the connecting element has a foot region for connecting the connecting element to the supporting cooling structure. At least one joint is arranged between the receiving and foot regions, and at least one heat conducting element is arranged between the receiving and foot regions. The heat conducting element is soft in the actuation direction of the joint and has a stiffness perpendicularly to the actuation direction of the joint that is at least twice as large as in the actuation direction of the joint.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: April 6, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Weber, Willi Anderl
  • Publication number: 20200378100
    Abstract: A sanitary installation, including a ceramic or porcelain wash basin or wash stand and a vanity unit, wherein the vanity unit has at least one pull-out drawer having two side walls and a front wall, wherein the shape of the side walls and of the front wall conforms to the shape of the front and side end faces of the wash basin or wash stand, wherein the end faces are aligned with the side walls and the front wall, and wherein the side walls, the front wall and the end faces are coated with a veneer, applied via an adhesive bond, or with a paint.
    Type: Application
    Filed: May 27, 2020
    Publication date: December 3, 2020
    Inventors: Thomas STAMMEL, Thomas KONSTANZER, Ulrich WEBER
  • Patent number: 10777958
    Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: September 15, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl, Ulrich Weber, Markus Bauer, Jeffrey Erxmeyer, Michel Le Maire
  • Publication number: 20190384187
    Abstract: A projection exposure apparatus for semiconductor lithography has a connecting element for connecting a component of the apparatus to a supporting cooling structure of the s apparatus. The connecting element has a receiving region for receiving the component, and the connecting element has a foot region for connecting the connecting element to the supporting cooling structure. At least one joint is arranged between the receiving and foot regions, and at least one heat conducting element is arranged between the receiving and foot regions. The heat conducting element is soft in the actuation direction of the joint and has a stiffness perpendicularly to the actuation direction of the joint that is at least twice as large as in the actuation direction of the joint.
    Type: Application
    Filed: August 15, 2019
    Publication date: December 19, 2019
    Inventors: Ulrich Weber, Willi Anderl
  • Patent number: 10215948
    Abstract: An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: February 26, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jens Kugler, Ulrich Weber, Dirk Schaffer
  • Patent number: 10146048
    Abstract: An optical assembly (1) includes an optical element (2), a mount (3) configured to hold the optical element (2), and a plurality of fastening elements (12) with fastening areas (14) configured to fasten the optical element (2) to the mount (3). The fastening elements (12) bridge an interstice (11) between the optical element (2) and the mount (3), and a purge device (15) produces at least one purge gas flow (16) in the region of the optical element (2) such that the purge gas flow flows around the fastening areas (14) of the fastening elements (12).
    Type: Grant
    Filed: October 12, 2016
    Date of Patent: December 4, 2018
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Michael Brehm, Wolfgang Merkel, Ulrich Weber, Henry Wegert
  • Patent number: 10133021
    Abstract: The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: November 20, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Weber, Jens Kugler
  • Publication number: 20180102620
    Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
    Type: Application
    Filed: December 4, 2017
    Publication date: April 12, 2018
    Inventors: Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl, Ulrich Weber, Markus Bauer, Jeffrey Erxmeyer, Michel Le Maire
  • Publication number: 20180024438
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Application
    Filed: July 10, 2017
    Publication date: January 25, 2018
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • Patent number: 9843153
    Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
    Type: Grant
    Filed: August 3, 2015
    Date of Patent: December 12, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl, Ulrich Weber, Markus Bauer, Jeffrey Erxmeyer, Michel Le Maire
  • Publication number: 20170351047
    Abstract: The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
    Type: Application
    Filed: May 23, 2017
    Publication date: December 7, 2017
    Inventors: Ulrich Weber, Jens Kugler
  • Patent number: 9766550
    Abstract: An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: September 19, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Weber, Stefan Hembacher, Armin Schoeppach
  • Patent number: 9709895
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Grant
    Filed: March 16, 2015
    Date of Patent: July 18, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • Patent number: 9664873
    Abstract: The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: May 30, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Weber, Jens Kugler
  • Publication number: 20170102539
    Abstract: An optical assembly (1) includes an optical element (2), a mount (3) configured to hold the optical element (2), and a plurality of fastening elements (12) with fastening areas (14) configured to fasten the optical element (2) to the mount (3). The fastening elements (12) bridge an interstice (11) between the optical element (2) and the mount (3), and a purge device (15) produces at least one purge gas flow (16) in the region of the optical element (2) such that the purge gas flow flows around the fastening areas (14) of the fastening elements (12).
    Type: Application
    Filed: October 12, 2016
    Publication date: April 13, 2017
    Inventors: Michael BREHM, Wolfgang MERKEL, Ulrich WEBER, Henry WEGERT
  • Patent number: 9516976
    Abstract: A sanitary facility including a washstand of ceramic or porcelain and a piece of support furniture, which carries the washstand and has two side walls and a front wall, on the upper end surfaces of which the edges of the washstand rests. The front and side end surfaces of the washstand are processed in such a way that they are flush with the outside surfaces of the side walls and of the front wall. Veneer, covering the outside surfaces, is applied to the end surfaces of the washstand by an adhesive bond and extends up to the right-angled upper corner of the washstand.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: December 13, 2016
    Assignee: DURAVIT AKTIENGESELLSCHAFT
    Inventors: Thomas Stammel, Erich Fuhrer, Ulrich Weber
  • Publication number: 20160041360
    Abstract: The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
    Type: Application
    Filed: June 22, 2015
    Publication date: February 11, 2016
    Inventors: Ulrich Weber, Jens Kugler
  • Publication number: 20150370176
    Abstract: An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.
    Type: Application
    Filed: August 31, 2015
    Publication date: December 24, 2015
    Inventors: Ulrich Weber, Stefan Hembacher, Armin Schoeppach
  • Publication number: 20150340829
    Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
    Type: Application
    Filed: August 3, 2015
    Publication date: November 26, 2015
    Inventors: Michael Schall, Johannes Kraus, Holger Muenz, Ingrid Schuster, Willi Anderl, Ulrich Weber, Markus Bauer, Jeffrey Erxmeyer, Michel Le Maire
  • Publication number: 20150316853
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Application
    Filed: March 16, 2015
    Publication date: November 5, 2015
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert