Patents by Inventor Uzma Rana

Uzma Rana has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230378183
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Application
    Filed: August 8, 2023
    Publication date: November 23, 2023
    Inventors: Anthony K. STAMPER, Uzma RANA, Siva P. ADUSUMILLI, Steven M. SHANK
  • Patent number: 11823948
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Steven M. Shank, Brett T. Cucci
  • Patent number: 11764225
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Anthony K. Stamper, Uzma Rana, Siva P. Adusumilli, Steven M. Shank
  • Patent number: 11749717
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with an embedded isolation layer in a bulk substrate and methods of manufacture. The structure includes: a bulk substrate; an isolation layer embedded within the bulk substrate and below a top surface of the bulk substrate; a deep trench isolation structure extending through the bulk substrate and contacting the embedded isolation layer; and a gate structure over the top surface of the bulk substrate and vertically spaced away from the embedded isolation layer, the deep trench isolation structure and the embedded isolation layer defining an active area of the gate structure in the bulk substrate.
    Type: Grant
    Filed: May 6, 2022
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Johnatan A. Kantarovsky, Steven M. Shank, Siva P. Adusumilli
  • Publication number: 20220399372
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.
    Type: Application
    Filed: June 10, 2021
    Publication date: December 15, 2022
    Inventors: Anthony K. STAMPER, Uzma RANA, Siva P. ADUSUMILLI, Steven M. SHANK
  • Publication number: 20220384659
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure having source/drain regions; at least one isolation structure within the source/drain regions in a substrate material; and semiconductor material on a surface of the at least one isolation structure in the source/drain regions.
    Type: Application
    Filed: May 26, 2021
    Publication date: December 1, 2022
    Inventors: Anthony K. STAMPER, Uzma RANA, Steven M. SHANK, Mark D. LEVY
  • Publication number: 20220262900
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with an embedded isolation layer in a bulk substrate and methods of manufacture. The structure includes: a bulk substrate; an isolation layer embedded within the bulk substrate and below a top surface of the bulk substrate; a deep trench isolation structure extending through the bulk substrate and contacting the embedded isolation layer; and a gate structure over the top surface of the bulk substrate and vertically spaced away from the embedded isolation layer, the deep trench isolation structure and the embedded isolation layer defining an active area of the gate structure in the bulk substrate.
    Type: Application
    Filed: May 6, 2022
    Publication date: August 18, 2022
    Inventors: Uzma RANA, Anthony K. STAMPER, Johnatan A. KANTAROVSKY, Steven M. SHANK, Siva P. ADUSUMILLI
  • Patent number: 11380759
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with an embedded isolation layer in a bulk substrate and methods of manufacture. The structure includes: a bulk substrate; an isolation layer embedded within the bulk substrate and below a top surface of the bulk substrate; a deep trench isolation structure extending through the bulk substrate and contacting the embedded isolation layer; and a gate structure over the top surface of the bulk substrate and vertically spaced away from the embedded isolation layer, the deep trench isolation structure and the embedded isolation layer defining an active area of the gate structure in the bulk substrate.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: July 5, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Johnatan A. Kantarovsky, Steven M. Shank, Siva P. Adusumilli
  • Publication number: 20220208599
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
    Type: Application
    Filed: March 16, 2022
    Publication date: June 30, 2022
    Inventors: Uzma RANA, Anthony K. STAMPER, Steven M. SHANK, Brett T. CUCCI
  • Patent number: 11322387
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: May 3, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Uzma Rana, Anthony K. Stamper, Steven M. Shank, Brett T. Cucci
  • Publication number: 20220115262
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
    Type: Application
    Filed: October 13, 2020
    Publication date: April 14, 2022
    Inventors: Uzma RANA, Anthony K. STAMPER, Steven M. SHANK, Brett T. CUCCI
  • Publication number: 20220028971
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a transistor with an embedded isolation layer in a bulk substrate and methods of manufacture. The structure includes: a bulk substrate; an isolation layer embedded within the bulk substrate and below a top surface of the bulk substrate; a deep trench isolation structure extending through the bulk substrate and contacting the embedded isolation layer; and a gate structure over the top surface of the bulk substrate and vertically spaced away from the embedded isolation layer, the deep trench isolation structure and the embedded isolation layer defining an active area of the gate structure in the bulk substrate.
    Type: Application
    Filed: July 27, 2020
    Publication date: January 27, 2022
    Inventors: Uzma RANA, Anthony K. STAMPER, Johnatan A. KANTAROVSKY, Steven M. SHANK, Siva P. ADUSUMILLI
  • Patent number: 9966735
    Abstract: III-V lasers integrated with silicon photonic circuits and methods for making the same include a three-layer semiconductor stack formed from III-V semiconductors on a substrate, where a middle layer has a lower bandgap than a top layer and a bottom layer; a mirror region monolithically formed at a first end of the stack, configured to reflect emitted light in the direction of the stack; and a waveguide region monolithically formed at a second end of the stack, configured to transmit emitted light.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: May 8, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Cheng-Wei Cheng, Frank R. Libsch, Tak H. Ning, Uzma Rana, Kuen-Ting Shiu
  • Patent number: 9882021
    Abstract: A method of forming a semiconductor substrate including a type III-V semiconductor material directly on a dielectric material that includes forming a trench in a dielectric layer, and forming a via within the trench extending from a base of the trench to an exposed upper surface of an underlying semiconductor including substrate. A III-V semiconductor material is formed extending from the exposed upper surface of the semiconductor substrate filling at least a portion of the trench.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: January 30, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Cheng-Wei Cheng, Edward W. Kiewra, Amlan Majumdar, Uzma Rana, Devendra K. Sadana, Kuen-Ting Shiu, Yanning Sun
  • Patent number: 9679775
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Furthermore, the approach includes alloying a metal layer with a dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: June 13, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Marinus J. P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Publication number: 20160329211
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Furthermore, the approach includes alloying a metal layer with a dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: July 15, 2016
    Publication date: November 10, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Publication number: 20160301192
    Abstract: III-V lasers integrated with silicon photonic circuits and methods for making the same include a three-layer semiconductor stack formed from III-V semiconductors on a substrate, where a middle layer has a lower bandgap than a top layer and a bottom layer; a mirror region monolithically formed at a first end of the stack, configured to reflect emitted light in the direction of the stack; and a waveguide region monolithically formed at a second end of the stack, configured to transmit emitted light.
    Type: Application
    Filed: June 21, 2016
    Publication date: October 13, 2016
    Inventors: Cheng-Wei Cheng, Frank R. Libsch, Tak H. Ning, Uzma Rana, Kuen-Ting Shiu
  • Publication number: 20160254150
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: February 27, 2015
    Publication date: September 1, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9418846
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: August 16, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Marinus J. P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9407066
    Abstract: III-V lasers integrated with silicon photonic circuits and methods for making the same include a three-layer semiconductor stack formed from III-V semiconductors on a substrate, where a middle layer has a lower bandgap than a top layer and a bottom layer; a mirror region monolithically formed at a first end of the stack, configured to reflect emitted light in the direction of the stack; and a waveguide region monolithically formed at a second end of the stack, configured to transmit emitted light.
    Type: Grant
    Filed: July 24, 2013
    Date of Patent: August 2, 2016
    Assignee: GlobalFoundries, Inc.
    Inventors: Cheng-Wei Cheng, Frank R. Libsch, Tak H. Ning, Uzma Rana, Kuen-Ting Shiu