Patents by Inventor Veera Venkata Narasimha Narendra Phani KOTTAPALLI

Veera Venkata Narasimha Narendra Phani KOTTAPALLI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE
    Publication number: 20240103386
    Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
    Type: Application
    Filed: October 3, 2023
    Publication date: March 28, 2024
    Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Derk Servatius Gertruda BROUNS, Joshua ADAMS, Aage BENDIKSEN, Richard JACOBS, Andrew JUDGE, Veera Venkata Narasimha Narendra Phani KOTTAPALLI, Joseph Harry LYONS, Theodorus Marinus MODDERMAN, Manish RANJAN, Marcus Adrianus VAN DE KERKHOF, Xugang XIONG
  • Apparatus and method for determining a condition associated with a pellicle
    Patent number: 11906907
    Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
    Type: Grant
    Filed: November 27, 2018
    Date of Patent: February 20, 2024
    Assignees: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard Jacobs, Andrew Judge, Veera Venkata Narasimha Narendra Phani Kottapalli, Joseph Harry Lyons, Theodorus Marinus Modderman, Manish Ranjan, Marcus Adrianus Van De Kerkhof, Xugang Xiong
  • APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE
    Publication number: 20200341366
    Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
    Type: Application
    Filed: November 27, 2018
    Publication date: October 29, 2020
    Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Derk Servatius Gertruda BROUNS, Joshua ADAMS, Aage BENDIKSEN, Richard JACOBS, Andrew JUDGE, Veera Venkata Narasimha Narendra Phani KOTTAPALLI, Joseph Harry LYONS, Theodorus Marinus MODDERMAN, Manish RANJAN, Marcus Adrianus VAN DE KERKHOF, Xugang XIONG