Patents by Inventor Vincent James McGahay

Vincent James McGahay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6559046
    Abstract: An insulator for covering an interconnection wiring level in a surface thereof on a semiconductor substrate containing semiconductor devices formed by curing a flowable oxide layer and annealing. The annealing is carried out in the presence of hydrogen and aluminum to obtain a dielectric constant of the oxide layer to a value below 3.2. Also provided is electrical insulation between neighboring devices using the flowable oxide which is cured and annealed. In this case, the annealing can be carried out in hydrogen with or without the presence of aluminum.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: May 6, 2003
    Assignee: International Business Machines Corporation
    Inventors: Stephan Alan Cohen, Vincent James McGahay, Ronald Robert Uttecht
  • Patent number: 6478212
    Abstract: A bond pad structure for an integrated circuit has bondable base member for receiving a wire bonded thereon. A cavity is formed within the base member, with the cavity being configured to capture the wire therein. The cavity has one end having a first width and an opposite end having a second width, with the first width being greater than second width.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: November 12, 2002
    Assignee: International Business Machines Corporation
    Inventors: Brett H. Engel, Vincent James McGahay, Henry Atkinson Nye, III
  • Patent number: 5712702
    Abstract: A marker element is included in a deposition chamber. After use of the chamber to deposit films or coatings on workpieces, the chamber is cleaned to remove materials which may contaminate future processing of workpieces in the chamber. The composition of the gas exhausted from the chamber during the cleaning process is monitored, and a characteristic of the marker element is sensed. The cleaning gas is terminated in response to the sensed characteristic of the marker element having a predetermined value, such as a peak intensity or the return to a baseline value after peaking. The present invention effectively solves the problem of overcleaning or undercleaning the chamber based upon an estimated film thickness build up.
    Type: Grant
    Filed: December 6, 1996
    Date of Patent: January 27, 1998
    Assignee: International Business Machines Corporation
    Inventors: Vincent James McGahay, James Gardner Ryan, Michael Jay Shapiro, Christopher Joseph Waskiewicz