Patents by Inventor Vishal S. Jamakhandi

Vishal S. Jamakhandi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11881416
    Abstract: Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: January 23, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Arun Chakravarthy Chakravarthy, Chahal Neema, Abhijit A. Kangude, Elizabeth Neville, Vishal S. Jamakhandi, Kurt R. Langeland, Syed A. Alam, Ming Xu, Kenneth Le
  • Publication number: 20220189793
    Abstract: Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.
    Type: Application
    Filed: December 14, 2020
    Publication date: June 16, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Arun Chakravarthy Chakravarthy, Chahal Neema, Abhijit A. Kangude, Elizabeth Neville, Vishal S. Jamakhandi, Kurt R. Langeland, Syed A. Alam, Ming Xu, Kenneth Le