Patents by Inventor Vivian W. Chao

Vivian W. Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polystyrene-tetrathiafulvalene polymers as deep-ultraviolet mask material
    Patent number: 4543319
    Abstract: A method is provided for providing a polystyrene-tetrathiafulvalene (PSTTF)/deep-ultraviolet hydrid system which combines the advantages of E-beam or X-ray lithography systems with those of deep-UV conformable printing to produce low bias, high aspect ratio resist images over the topography of microelectronic devices.
    Type: Grant
    Filed: January 15, 1985
    Date of Patent: September 24, 1985
    Assignee: International Business Machines Corporation
    Inventors: Vivian W. Chao, Frank B. Kaufman, Steven R. Kramer, Burn J. Lin