Abstract: An apparatus for light delivery to magneto-optical trap (MOT) system utilizes only planar optical diffraction devices including a planar-integrated-circuit PIC and a metasurface MS. When MOT is based on the use of a diffraction grating, a grating chip is additionally employed to launch and manipulate light for laser cooling. Bridging the gap between the sub-micrometer-scale guided mode on the PIC and the centimeter-scale beam needed for laser cooling, a magnification of the mode area by about 1010 is demonstrated using an on-chip extreme-mode-converter to launch a Gaussian mode into free space from a PIC-waveguide and a beam-shaping, polarization-dependent MS to form a diverging laser beam with a flat-top spatial profile, which efficiently illuminates the grating chip without loss of light.

Abstract: A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

Abstract: A localized gap plasmon resonator includes: a pad including: a first plasmonic material to support a surface plasmon; and a first plasmon surface; a nanoelectromechanical (NEM) member disposed opposing the first plasmon surface of the pad and spaced apart from the pad by a plasmon gap, the plasmon gap supporting a plasmon resonance; and a plasmonic nanoprism disposed on the NEM member and including: a second plasmonic material to support a surface plasmon; and a second plasmon surface, such that: the second plasmon surface of the plasmonic nanoprism opposes the first plasmon surface of the pad; and the pad, the plasmonic nanoprism, and the plasmon gap support a localized gap plasmon (LGP) mode.

Abstract: A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

Abstract: A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.

Abstract: A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

Abstract: A localized gap plasmon resonator includes: a pad including: a first plasmonic material to support a surface plasmon; and a first plasmon surface; a nanoelectromechanical (NEM) member disposed opposing the first plasmon surface of the pad and spaced apart from the pad by a plasmon gap, the plasmon gap supporting a plasmon resonance; and a plasmonic nanoprism disposed on the NEM member and including: a second plasmonic material to support a surface plasmon; and a second plasmon surface, such that: the second plasmon surface of the plasmonic nanoprism opposes the first plasmon surface of the pad; and the pad, the plasmonic nanoprism, and the plasmon gap support a localized gap plasmon (LGP) mode.

Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.

Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end

Abstract: The present invention provides an apparatus. The apparatus, in one embodiment, includes an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.

Abstract: According to one embodiment, a circuit element for a plasmonic circuit is formed using a dielectric layer having two portions, each characterized by a different electric permittivity. The dielectric layer is adjacent to a metal layer, with the interface between the layers defining a conduit for propagation of surface plasmons. A dielectric boundary between the two portions of the dielectric layer is shaped to enable the circuit element to change one or more of propagation direction, cross-section, spectral composition, and intensity distribution for a beam of surface plasmons received by the circuit element.

Abstract: A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing screen. The laser projector drives the SLM to change spatial modulation patterns at a rate that causes the corresponding sequence of projected images to fuse to mitigate appearance of speckle in the resulting fused image. The SLM can be designed to redirect the illumination using either diffraction or specular reflection of light from the displayed spatial modulation pattern. In one embodiment, the SLM is a MEMS device having an array of individually addressable mirrors supported over a substrate and adapted to move (e.g., translate and/or rotate) with respect to the substrate.

Abstract: The present invention provides an apparatus. The apparatus, may include an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.

Abstract: The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

Abstract: Methods and apparatus are provided for compressed imaging by performing modulation in a pupil plane. Image information is acquired by modulating an incident light field using a waveplate having a pattern that modifies a phase or amplitude of the incident light field, wherein the waveplate is positioned substantially in a pupil plane of an optical system; optically computing a transform between the modulated incident light field at a plane of the waveplate and an image plane; and collecting image data at the image plane.

Abstract: A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing screen. The laser projector drives the SLM to change spatial modulation patterns at a rate that causes the corresponding sequence of projected images to fuse to mitigate appearance of speckle in the resulting fused image. The SLM can be designed to redirect the illumination using either diffraction or specular reflection of light from the displayed spatial modulation pattern. In one embodiment, the SLM is a MEMS device having an array of individually addressable mirrors supported over a substrate and adapted to move (e.g., translate and/or rotate) with respect to the substrate.

Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

Abstract: The present invention provides a process and an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

Abstract: Apparatus including a chip substrate having a first chip surface facing away from a second chip surface; an array of microelectronic elements on the first chip surface; and an array of conductors each in communication with one of the microelectronic elements, the conductors passing through the chip substrate and fully spanning a distance between the first and second chip surfaces.

Abstract: An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.