Patents by Inventor Volker R. Todt

Volker R. Todt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6648967
    Abstract: A crystal-pulling apparatus for pulling and growing a monocrystalline silicon ingot comprises a quartz crucible placed in a chamber and containing a silicon melt from which a monocrystalline silicon ingot will be pulled, a graphite crucible container to support the quartz crucible by surrounding the outer circumferential surface and external base surface of crucible, and a heater provided around the outer circumferential surface of the crucible container to heat the silicon melt. This apparatus further comprises a spacer having a top surface whose area is smaller than the base area of the quartz crucible and having a melting point higher than that of silicon, is inserted between the base of the quartz crucible and the base of the crucible container while the monocrystalline silicon ingot is pulled.
    Type: Grant
    Filed: November 20, 2001
    Date of Patent: November 18, 2003
    Assignees: Mitsubishi Materials Silicon Corporation, Mitsubishi Silicon America Corporation
    Inventors: Volker R. Todt, Rocky Oakley, Peter Wildes, Fritz Kirscht, Haresh Siriwardane, Joel Kearns
  • Publication number: 20030116083
    Abstract: An enhanced n+ silicon material for epitaxial substrates and a method for producing it are described. The enhanced material leads to improved gettering characteristics of n/n+ epitaxial wafers based on these substrates. The method for preparing such n+ silicon material includes applying a co-doping of carbon to the usual n dopant in the silicon melt, before growing respective CZ crystals. This improves yield of enhanced n+ silicon material in crystal growing and ultimately leads to device yield stabilization or improvement when such n/n+ epitaxial wafers are applied in device manufacturing.
    Type: Application
    Filed: November 27, 2002
    Publication date: June 26, 2003
    Applicant: SUMCO Oregon corporation
    Inventors: Fritz G. Kirscht, Peter D. Wildes, Volker R. Todt, Nobuo Fukuto, Boris A. Snegirev, Seung-Bae Kim
  • Publication number: 20030084840
    Abstract: A crystal-pulling apparatus for pulling and growing a monocrystalline silicon ingot comprises a quartz crucible placed in a chamber and containing a silicon melt from which a monocrystalline silicon ingot will be pulled, a graphite crucible container to support the quartz crucible by surrounding the outer circumferential surface and external base surface of crucible, and a heater provided around the outer circumferential surface of the crucible container to heat the silicon melt. This apparatus further comprises a spacer having a top surface whose area is smaller than the base area of the quartz crucible and having a melting point higher than that of silicon, is inserted between the base of the quartz crucible and the base of the crucible container while the monocrystalline silicon ingot is pulled.
    Type: Application
    Filed: November 20, 2001
    Publication date: May 8, 2003
    Inventors: Volker R. Todt, Rocky Oakley, Peter Wildes, Fritz Kirscht, Haresh Siriwardane, Joel Kearns
  • Patent number: 6491752
    Abstract: An enhanced n+ silicon material for epitaxial substrates and a method for producing it are described. The enhanced material leads to improved gettering characteristics of n/n+ epitaxial wafers based on these substrates. The method for preparing such n+ silicon material includes applying a co-doping of carbon to the usual n dopant in the silicon melt, before growing respective CZ crystals. This improves yield of enhanced n+ silicon material in crystal growing and ultimately leads to device yield stabilization or improvement when such n/n+ epitaxial wafers are applied in device manufacturing.
    Type: Grant
    Filed: July 16, 1999
    Date of Patent: December 10, 2002
    Assignee: SUMCO Oregon Corporation
    Inventors: Fritz G. Kirscht, Peter D. Wildes, Volker R. Todt, Nobuo Fukuto, Boris A. Snegirev, Seung-Bae Kim
  • Patent number: 5549748
    Abstract: A method of preparing single crystals. The method of preparation involves preparing precursor materials of a particular composition, heating the precursor material to achieve a peritectic mixture of peritectic liquid and crystals, cooling the peritectic mixture to quench directly the mixture on a porous, wettable inert substrate to wick off the peritectic liquid, leaving single crystals on the porous substrate. Alternatively, the peritectic mixture can be cooled to a solid mass and reheated on a porous, inert substrate to melt the matrix of peritectic fluid while leaving the crystals unmelted, allowing the wicking away of the peritectic liquid.
    Type: Grant
    Filed: January 12, 1995
    Date of Patent: August 27, 1996
    Assignee: University of Chicago
    Inventors: Volker R. Todt, Suvankar Sengupta, Donglu Shi
  • Patent number: 5504060
    Abstract: A method of preparing high temperature superconductor single crystals. The method of preparation involves preparing precursor materials of a particular composition, heating the precursor material to achieve a peritectic mixture of peritectic liquid and crystals of the high temperature superconductor, cooling the peritectic mixture to quench directly the mixture on a porous, wettable inert substrate to wick off the peritectic liquid, leaving single crystals of the high temperature superconductor on the porous substrate. Alternatively, the peritectic mixture can be cooled to a solid mass and reheated on a porous, inert substrate to melt the matrix of peritectic fluid while leaving the crystals melted, allowing the wicking away of the peritectic liquid.
    Type: Grant
    Filed: January 12, 1995
    Date of Patent: April 2, 1996
    Assignee: University of Chicago
    Inventors: Volker R. Todt, Suvankar Sengupta, Donglu Shi