Patents by Inventor Waichi Yamamura

Waichi Yamamura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190169768
    Abstract: A member for an apparatus for manufacturing a semiconductor single crystal having long product life and a tantalum carbide coated carbon material are provided. The tantalum carbide coated carbon material according to the present invention is a tantalum carbide coated carbon material in which at least a part of a surface of a carbon base material is coated with a tantalum carbide coated film containing tantalum carbide as a main component, in which in the tantalum carbide coated film, an intensity of an X-ray diffraction line corresponding to a plane with respect to an out-of-plane direction is larger than intensities of X-ray diffraction lines corresponding to other crystal planes, and the intensity ratio is 60% or more with respect to a sum of intensities of X-ray diffraction lines corresponding to all crystal planes.
    Type: Application
    Filed: December 3, 2018
    Publication date: June 6, 2019
    Inventors: Chikara MORI, Waichi YAMAMURA, Shoji KANO, Akihiro HIRATE
  • Patent number: 9839074
    Abstract: A PBN-coated carbon heater is disclosed in which the carbon base body is anisotropic with respect to thermal expansion coefficient such that the maximum-to-minimum coefficient ratio is 1.02 through 1.50 for temperatures between 50 and 800 degree C.; preferably the carbon base body is also anisotropic with respect to electric resistivity such that the maximum-to-minimum resistivity ratio is greater than 1.04 but not greater than 1.51, and the direction in which the resistivity is maximum coincides the direction of the heater pattern in which the electricity runs the longest distance.
    Type: Grant
    Filed: April 20, 2015
    Date of Patent: December 5, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Koji Kato, Waichi Yamamura
  • Publication number: 20150359042
    Abstract: A PBN-coated carbon heater is disclosed in which the carbon base body is anisotropic with respect to thermal expansion coefficient such that the maximum-to-minimum coefficient ratio is 1.02 through 1.50 for temperatures between 50 and 800 degree C.; preferably the carbon base body is also anisotropic with respect to electric resistivity such that the maximum-to-minimum resistivity ratio is greater than 1.04 but not greater than 1.51, and the direction in which the resistivity is maximum coincides the direction of the heater pattern in which the electricity runs the longest distance.
    Type: Application
    Filed: April 20, 2015
    Publication date: December 10, 2015
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Koji Kato, Waichi Yamamura
  • Patent number: 8829397
    Abstract: The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.
    Type: Grant
    Filed: September 29, 2008
    Date of Patent: September 9, 2014
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Shoji Kano, Waichi Yamamura, Yoshihiro Kubota
  • Patent number: 8440566
    Abstract: The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.
    Type: Grant
    Filed: July 22, 2011
    Date of Patent: May 14, 2013
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Koji Kato, Shoji Kano, Waichi Yamamura
  • Publication number: 20120107613
    Abstract: A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.
    Type: Application
    Filed: September 16, 2011
    Publication date: May 3, 2012
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shoji Kano, Mitsumasa Kubota, Mitsuo Tanaka, Koji Kato, Waichi Yamamura
  • Publication number: 20120100698
    Abstract: The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.
    Type: Application
    Filed: July 22, 2011
    Publication date: April 26, 2012
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Koji Kato, Shoji Kano, Waichi Yamamura
  • Patent number: 8115141
    Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.
    Type: Grant
    Filed: April 10, 2007
    Date of Patent: February 14, 2012
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura, Shoji Kano
  • Patent number: 7952054
    Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    Type: Grant
    Filed: April 10, 2007
    Date of Patent: May 31, 2011
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura, Shoji Kano
  • Patent number: 7854157
    Abstract: The method, in which base material ingot 1 is heated and softened in an electric furnace 3, drawn with a pair of pinch roller 6 and 6, and elongated to make base material rod 7 having a smaller diameter than the ingot, features: forming either a roller groove 11 having a curvature radius which is larger than the outer diameter of the base material rod 7 or a V-shaped roller groove 11 having the cross section consisting of straight lines on the surface of the pinch roller 6 made of metal; nipping with the facing roller grooves 11 and 11 respectively formed on the surfaces of a pair of said pinch rollers 6 and 6; and drawing said base material rod.
    Type: Grant
    Filed: January 12, 2005
    Date of Patent: December 21, 2010
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Soichiro Kemmochi, Waichi Yamamura, Takaaki Nacao, Mitsukuni Sakashita
  • Patent number: 7679880
    Abstract: The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat.
    Type: Grant
    Filed: March 14, 2007
    Date of Patent: March 16, 2010
    Assignee: Shin-Etsu Chemical Co., Ltd
    Inventors: Hideki Fujii, Waichi Yamamura
  • Publication number: 20100003510
    Abstract: The present invention is a corrosion-resistant multilayer ceramic member including at least: a ceramic substrate, an electrode layer formed on the ceramic substrate, a feeding member that supplies electricity to the electrode layer, and a protection layer that prevents corrosion; wherein the electrode layer is formed on one surface or both surfaces of the ceramic substrate, the feeding member is connected with the electrode layer, the protection layer is formed with a thickness of 0.02 mm or above and 10 mm or less on that surface of the ceramic substrate where the electrode layer is formed so as to cover the electrode layer, and the protection layer contains any one of silicon oxide, rare-earth oxide, aluminum nitride, and aluminum oxide as a main component. Hereby, there is provided a corrosion-resistant multilayer ceramic member that has excellent corrosion resistance and a long life duration even when exposed to a corrosive gas.
    Type: Application
    Filed: June 22, 2009
    Publication date: January 7, 2010
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shoji Kano, Waichi Yamamura, Yoshihiro Kubota
  • Publication number: 20090107635
    Abstract: The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.
    Type: Application
    Filed: September 29, 2008
    Publication date: April 30, 2009
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shoji Kano, Waichi Yamamura, Yoshihiro Kubota
  • Patent number: 7458234
    Abstract: There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened.
    Type: Grant
    Filed: March 7, 2005
    Date of Patent: December 2, 2008
    Assignee: Shin- Etsu Chemical Co., Ltd.
    Inventor: Waichi Yamamura
  • Publication number: 20070274021
    Abstract: An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.
    Type: Application
    Filed: May 7, 2007
    Publication date: November 29, 2007
    Inventors: Shoji Kano, Waichi Yamamura
  • Publication number: 20070253138
    Abstract: The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat.
    Type: Application
    Filed: March 14, 2007
    Publication date: November 1, 2007
    Inventors: Hideki Fujii, Waichi Yamamura
  • Publication number: 20070241096
    Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    Type: Application
    Filed: April 10, 2007
    Publication date: October 18, 2007
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura, Shoji Kano
  • Publication number: 20070241095
    Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.
    Type: Application
    Filed: April 10, 2007
    Publication date: October 18, 2007
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura, Shoji Kano
  • Publication number: 20070169515
    Abstract: Provided is a processing method and a processing apparatus of a glass base material, with which a welding process of a large glass base material and a process of forming ends of the glass base material into spindle shapes are easily and safely performed without causing core deviation or causing an accident of falling off of the glass base material.
    Type: Application
    Filed: March 7, 2005
    Publication date: July 26, 2007
    Inventors: Yuuji Tobisaka, Waichi Yamamura
  • Publication number: 20070163302
    Abstract: The method, in which base material ingot 1 is heated and softened in an electric furnace 3, drawn with a pair of pinch roller 6 and 6, and elongated to make base material rod 7 having a smaller diameter than the ingot, features: forming either a roller groove 11 having a curvature radius which is larger than the outer diameter of the base material rod 7 or a V-shaped roller groove 11 having the cross section consisting of straight lines on the surface of the pinch roller 6 made of metal; nipping with the facing roller grooves 11 and 11 respectively formed on the surfaces of a pair of said pinch rollers 6 and 6; and drawing said base material rod.
    Type: Application
    Filed: January 12, 2005
    Publication date: July 19, 2007
    Inventors: Soichiro Kemmochi, Waichi Yamamura, Takaaki Nacao, Mitsukuni Sakashita