Patents by Inventor Walter H. Worth

Walter H. Worth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems
    Patent number: 4769680
    Abstract: Apparatus for projecting multiple images from a pair of reticles (117) to a photo-sensitive coated substrate (1) to produce large scale electronic devices (2). A pair of parallel and proximate optical systems (29) are used, the optical systems being positioned to project in the z-direction upon a movable stage (11) subject to controlled motion (159, 169) in the x- and y-directions. The apparatus includes means (225) for determining the coordinates of motion of the stage relative to images projected from the reticles, means for using the determined positions to establish a stage transfer function for the apparatus relative to various positions of stage, and means (130) for applying the transfer function to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection, and for thereafter projecting an image upon the substrate.
    Type: Grant
    Filed: October 22, 1987
    Date of Patent: September 6, 1988
    Assignee: MRS Technology, Inc.
    Inventors: Griffith L. Resor, III, Robert A. McEachern, William C. Schneider, Walter H. Worth
  • Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems
    Patent number: RE33836
    Abstract: Apparatus for projecting multiple images from a pair of reticles (117) to a photo-sensitive coated substrate (1) to produce large scale electronic devices (2). A pair of parallel and proximate optical systems (29) are used, the optical systems being positioned to project in the z-direction upon a movable stage (11) subject to controlled motion (159, 169) in the x- and y-directions. The apparatus includes means (225) for determining the coordinates of motion of the stage relative to images projected from the reticles, means for using the determined positions to establish a stage transfer function for the apparatus relative to various positions of stage, and means (130) for applying the transfer function to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection, and for thereafter projecting an image upon the substrate.
    Type: Grant
    Filed: August 24, 1990
    Date of Patent: March 3, 1992
    Assignee: MRS Technology, Inc.
    Inventors: Griffith L. Resor, III, Robert A. McEachern, William C. Schneider, Walter H. Worth