Abstract: Pressure sensors utilizing capacitance variations to sense pressure variations of the silicon-on-silicon type in which dielectric drift, which occurs in such sensors due to the changing characteristics primarily of the dielectric wall support layer (16) extending up from the silicon substrate (12) between it and the silicon diaphragm (11), is minimized by in turn minimizing the contribution of the dielectric layer to the total capacitance of the sensor (10), reducing the dielectric contribution of the capacitance from, for example, about fifty (50%) percent down to a range of no more than about twenty to twenty-five (20-25%) percent and down typically to sixteen to about ten (16%-10%) percent of the total capacitance or lower. Three exemplary approaches are illustrated, namely, etching the outer edges of the dielectric layer, making the wall(s) it form(s) thinner (FIG.

Abstract: The present invention is related to a sight glass(10) that utilizes both reflected light at a glass to air interface(40) as well as the light transmitted through a glass to fluid to glass interface(44) to form a light pattern that is indicative of the true fluid level. By requiring that light always appear in either an "air" or "fluid" channel(42,46), any absence of light is assumed due to film coated surfaces or to other abnormal conditions. An absence of light is a signal that maintenance is required.

Abstract: Various apparatus and their applications to the determination of the flux of a fluid flowing through a region in accordance with the present invention are disclosed. The technique involved is based on the formation of charged particles within the fluid and subjecting these particles to an electric field which is colinear with the direction of fluid travel. Two charged particle collection stations are established, one upstream and the other downstream of the charged particle formation site and the resulting electric currents through such stations are correlated to the flux of the fluid.

Abstract: Apparatus for providing ions having a specific electric charge to a stream of working fluid are disclosed. The ions are produced by a variety of techniques in a volume of the working fluid which is maintained in a protected region within the stream. An electric field draws ions away from the production region and makes them available to the stream of fluid. In many applications an independent electric field is applied to the flowing fluid to move the ions within the working fluid.

Abstract: A sensor for measuring the flux of a gas and some simple alternate embodiments are disclosed. The sensor employs charged particle techniques and includes provision for compensating for environmentally produced changes in the charged particle source. The basic device includes an active region containing the charged particle source located between two upstream charged particle collectors and two downstream charged particle collectors, means for maintaining suitable electric fields between the charged particle source and the collectors, and means for measuring the electric current flowing in each collector. In operation, the sensor is able to compensate for changes in the charged particle source characteristics which would otherwise result in a change of sensor calibration.

Abstract: New and improved ion collection means for use in flow meter apparatus which utilizes the migration of ions transverse to the direction of flow of a moving fluid to determine flow characteristics are disclosed. The ion collector comprises individual strips of electrically conductive material arranged in an orderly manner at the collection site. The strips are physically separate and connected in electrical series with each other through suitable resistors which are protected from the flow of moving fluid.