Patents by Inventor Warren M. Farnworth

Warren M. Farnworth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8680680
    Abstract: Semiconductor devices with porous insulative materials are disclosed. The porous insulative materials may include a consolidated material with voids dispersed therethrough. The voids may be defined by shells of microcapsules. The voids impart the dielectric materials with reduced dielectric constants and, thus, increased electrical insulation properties.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: March 25, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Tongbi Jiang
  • Patent number: 8680654
    Abstract: Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods are disclosed. A system in accordance with a particular embodiment includes a first semiconductor substrate having a first substrate material, and a penetrating structure carried by the first semiconductor substrate. The system further includes a second semiconductor substrate having a second substrate material with a preformed recess. The penetrating structure of the first semiconductor substrate is received in the recess of the second semiconductor substrate and is mechanically engaged with the recess and secured to the second semiconductor substrate.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: March 25, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Owen R. Fay, Warren M. Farnworth, David R. Hembree
  • Patent number: 8669179
    Abstract: A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
    Type: Grant
    Filed: July 11, 2013
    Date of Patent: March 11, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Charles M. Watkins, William M. Hiatt, David R. Hembree, James M. Wark, Warren M. Farnworth, Mark E. Tuttle, Sidney B. Rigg, Steven D. Oliver, Kyle K. Kirby, Alan G. Wood, Lu Velicky
  • Publication number: 20140042575
    Abstract: Microelectronic devices and methods for manufacturing microelectronic devices are disclosed herein. In one embodiment, a method includes constructing a radiation sensitive component in and/or on a microelectronic device, placing a curable component in and/or on the microelectronic device, and forming a barrier in and/or on the microelectronic device to at least partially inhibit irradiation of the radiation sensitive component. The radiation sensitive component can be doped silicon, chalcogenide, polymeric random access memory, or any other component that is altered when irradiated with one or more specific frequencies of radiation. The curable component can be an adhesive, an underfill layer, an encapsulant, a stand-off, or any other feature constructed of a material that requires curing by irradiation.
    Type: Application
    Filed: October 17, 2013
    Publication date: February 13, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Warren M. Farnworth, Kristy A. Campbell
  • Patent number: 8637994
    Abstract: Microfeature workpieces having alloyed conductive structures, and associated methods are disclosed. A method in accordance with one embodiment includes applying a volume of material to a target location of a microfeature workpiece, with the volume of material including at least a first metallic constituent. The method can further include elevating a temperature of the volume of material while the volume of material is applied to the microfeature workpiece to alloy the first metallic constituent and a second metallic constituent so that the second metallic constituent is distributed generally throughout the volume of material. In further particular embodiments, the second metallic constituent can be drawn from an adjacent structure, for example, a bond pad or the wall of a via in which the volume of material is positioned.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: January 28, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Rick C. Lake, William M. Hiatt
  • Publication number: 20130330922
    Abstract: The invention includes semiconductor assemblies having two or more dies. An exemplary assembly has circuitry associated with a first die front side electrically connected to circuitry associated with a second die front side. The front side of the second die is adjacent a back side of the first die, and a through wafer interconnect extends through the first die. The through wafer interconnect includes a conductive liner within a via extending through the first die. The conductive liner narrows the via, and the narrowed via is filled with insulative material. The invention also includes methods of forming semiconductor assemblies having two or more dies; and includes electronic systems containing assemblies with two or more dies.
    Type: Application
    Filed: August 14, 2013
    Publication date: December 12, 2013
    Applicant: Micron Technology, Inc.
    Inventors: Steve Oliver, Warren M. Farnworth
  • Patent number: 8597074
    Abstract: Methods and systems for imaging and cutting semiconductor wafers and other microelectronic device substrates are disclosed herein. In one embodiment, a system for singulating microelectronic devices from a substrate includes an X-ray imaging system having an X-ray source spaced apart from an X-ray detector. The X-ray source can emit a beam of X-rays through the substrate and onto the X-ray detector, and X-ray detector can generate an X-ray image of at least a portion of the substrate. A method in accordance with another embodiment includes detecting spacing information for irregularly spaced dies of a semiconductor workpiece. The method can further include automatically controlling a process for singulating the dies of the semiconductor workpiece, based at least in part on the spacing information. For example, individual dies can be singulated from a workpiece via non-straight line cuts and/or multiple cutter passes.
    Type: Grant
    Filed: November 3, 2011
    Date of Patent: December 3, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Tom A. Muntifering, Paul J. Clawson
  • Patent number: 8592254
    Abstract: Microelectronic devices with improved heat dissipation, methods of making microelectronic devices, and methods of cooling microelectronic devices are disclosed herein. In one embodiment, the microelectronic device includes a microelectronic substrate having a first surface, a second surface facing opposite from the first surface, and a plurality of active devices at least proximate to the first surface. The second surface has a plurality of heat transfer surface features that increase the surface area of the second surface. In another embodiment, an enclosure having a heat sink and a single or multi-phase thermal conductor can be positioned adjacent to the second surface to transfer heat from the active devices.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: November 26, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Joseph T. Lindgren, Warren M. Farnworth, William M. Hiatt, Nishant Sinha
  • Publication number: 20130295766
    Abstract: A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
    Type: Application
    Filed: July 11, 2013
    Publication date: November 7, 2013
    Inventors: Salman Akram, Charles M. Watkins, William M. Hiatt, David R. Hembree, James M. Wark, Warren M. Farnworth, Mark E. Tuttle, Sidney B. Rigg, Steven D. Oliver, Kyle K. Kirby, Alan G. Wood, Lu Velicky
  • Patent number: 8569093
    Abstract: Microelectronic devices and methods for manufacturing microelectronic devices are disclosed herein. In one embodiment, a method includes constructing a radiation sensitive component in and/or on a microelectronic device, placing a curable component in and/or on the microelectronic device, and forming a barrier in and/or on the microelectronic device to at least partially inhibit irradiation of the radiation sensitive component. The radiation sensitive component can be doped silicon, chalcogenide, polymeric random access memory, or any other component that is altered when irradiated with one or more specific frequencies of radiation. The curable component can be an adhesive, an underfill layer, an encapsulant, a stand-off, or any other feature constructed of a material that requires curing by irradiation.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: October 29, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Kristy A. Campbell
  • Publication number: 20130276985
    Abstract: A method of processing a substrate includes physically contacting an exposed conductive electrode of an electrostatic carrier with a conductor to electrostatically bond a substrate to the electrostatic carrier. The conductor is removed from physically contacting the exposed conductive electrode. Dielectric material is applied over the conductive electrode. The substrate is treated while it is electrostatically bonded to the electrostatic carrier. In one embodiment, a conductor is forced through dielectric material that is received over a conductive electrode of an electrostatic carrier to physically contact the conductor with the conductive electrode to electrostatically bond a substrate to the electrostatic carrier. After removing the conductor from the dielectric material, the substrate is treated while it is electrostatically bonded to the electrostatic carrier. Electrostatic carriers for retaining substrates for processing, and such assemblies, are also disclosed.
    Type: Application
    Filed: June 18, 2013
    Publication date: October 24, 2013
    Inventors: Dewali Ray, Warren M. Farnworth, Kyle K. Kirby
  • Publication number: 20130249036
    Abstract: An imager device is disclosed including a first substrate having an array of photo-sensitive elements formed thereon, a first conductive layer formed above the first substrate, a first conductive member extending through the first substrate, the first conductive member being conductively coupled to the first conductive layer, a standoff structure formed above the first substrate, a second conductive layer formed above the standoff structure, the second conductive layer being conductively coupled to the first conductive layer, and an electrically powered device positioned above the standoff structure, the electrically powered device being electrically coupled to the second conductive layer.
    Type: Application
    Filed: April 12, 2013
    Publication date: September 26, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Warren M. Farnworth
  • Publication number: 20130234296
    Abstract: Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods are disclosed. A system in accordance with a particular embodiment includes a first semiconductor substrate having a first substrate material, and a penetrating structure carried by the first semiconductor substrate. The system further includes a second semiconductor substrate having a second substrate material with a preformed recess. The penetrating structure of the first semiconductor substrate is received in the recess of the second semiconductor substrate and is mechanically engaged with the recess and secured to the second semiconductor substrate.
    Type: Application
    Filed: April 26, 2013
    Publication date: September 12, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Owen R. Fay, Warren M. Farnworth, David R. Hembree
  • Patent number: 8513113
    Abstract: The invention includes semiconductor assemblies having two or more dies. An exemplary assembly has circuitry associated with a first die front side electrically connected to circuitry associated with a second die front side. The front side of the second die is adjacent a back side of the first die, and a through wafer interconnect extends through the first die. The through wafer interconnect includes a conductive liner within a via extending through the first die. The conductive liner narrows the via, and the narrowed via is filled with insulative material. The invention also includes methods of forming semiconductor assemblies having two or more dies; and includes electronic systems containing assemblies with two or more dies.
    Type: Grant
    Filed: October 19, 2009
    Date of Patent: August 20, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Steven Oliver, Warren M. Farnworth
  • Patent number: 8502353
    Abstract: A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: August 6, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Charles M. Watkins, William M. Hiatt, David R. Hembree, James M. Wark, Warren M. Farnworth, Mark E. Tuttle, Sidney B. Rigg, Steven D. Oliver, Kyle K. Kirby, Alan G. Wood, Lu Velicky
  • Patent number: 8503156
    Abstract: A method of processing a substrate includes physically contacting an exposed conductive electrode of an electrostatic carrier with a conductor to electrostatically bond a substrate to the electrostatic carrier. The conductor is removed from physically contacting the exposed conductive electrode. Dielectric material is applied over the conductive electrode. The substrate is treated while it is electrostatically bonded to the electrostatic carrier. In one embodiment, a conductor is forced through dielectric material that is received over a conductive electrode of an electrostatic carrier to physically contact the conductor with the conductive electrode to electrostatically bond a substrate to the electrostatic carrier. After removing the conductor from the dielectric material, the substrate is treated while it is electrostatically bonded to the electrostatic carrier. Electrostatic carriers for retaining substrates for processing, and such assemblies, are also disclosed.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: August 6, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Dewali Ray, Warren M. Farnworth, Kyle K. Kirby
  • Patent number: 8435836
    Abstract: Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods are disclosed. A system in accordance with a particular embodiment includes a first semiconductor substrate having a first substrate material, and a penetrating structure carried by the first semiconductor substrate. The system further includes a second semiconductor substrate having a second substrate material with a preformed recess. The penetrating structure of the first semiconductor substrate is received in the recess of the second semiconductor substrate and is mechanically engaged with the recess and secured to the second semiconductor substrate.
    Type: Grant
    Filed: January 14, 2011
    Date of Patent: May 7, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Owen R. Fay, Warren M. Farnworth, David R. Hembree
  • Publication number: 20130001780
    Abstract: An integrated circuit connection is describe that includes a first, securing member and a second, connection member. The first member, in an embodiment, is a spike that has a portion of its body fixed in a layer of an integrated circuit structure and extends outwardly from the integrated circuit structure. The second material is adapted to form a mechanical connection to a further electrical device. The second material (e.g., solder), is held by the first member to the integrated circuit structure. The first member increases the strength of the connection and assists in controlling the collapse of second member to form the mechanical connection to another circuit. The connection is formed by coating the integrated circuit structure with a patterned resist and etching the layer beneath the resist. A first member material (e.g., metal) is deposited. The resist is removed. The collapsible material is fixed to the first member.
    Type: Application
    Filed: September 13, 2012
    Publication date: January 3, 2013
    Applicant: Micron Technology, Inc.
    Inventors: William M. Hiatt, Warren M. Farnworth
  • Publication number: 20130004792
    Abstract: Microfeature workpieces having alloyed conductive structures, and associated methods are disclosed. A method in accordance with one embodiment includes applying a volume of material to a target location of a microfeature workpiece, with the volume of material including at least a first metallic constituent. The method can further include elevating a temperature of the volume of material while the volume of material is applied to the microfeature workpiece to alloy the first metallic constituent and a second metallic constituent so that the second metallic constituent is distributed generally throughout the volume of material. In further particular embodiments, the second metallic constituent can be drawn from an adjacent structure, for example, a bond pad or the wall of a via in which the volume of material is positioned.
    Type: Application
    Filed: September 6, 2012
    Publication date: January 3, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Warren M. Farnworth, Rick C. Lake, William M. Hiatt
  • Publication number: 20130003303
    Abstract: Microelectronic devices with improved heat dissipation, methods of making microelectronic devices, and methods of cooling microelectronic devices are disclosed herein. In one embodiment, the microelectronic device includes a microelectronic substrate having a first surface, a second surface facing opposite from the first surface, and a plurality of active devices at least proximate to the first surface. The second surface has a plurality of heat transfer surface features that increase the surface area of the second surface. In another embodiment, an enclosure having a heat sink and a single or multi-phase thermal conductor can be positioned adjacent to the second surface to transfer heat from the active devices.
    Type: Application
    Filed: September 12, 2012
    Publication date: January 3, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Joseph T. Lindgren, Warren M. Farnworth, William M. Hiatt, Nishant Sinha