Abstract: A mass flow controller includes a display unit; an operation unit; a basic functional section that realizes a basic function as the mass flow controller; a display control unit that causes the display unit to display a screen in an orientation corresponding to an instruction on an orientation from an operator; a layout-orientation setting unit that sets the vertical direction of the function layout of the operation unit to match the vertical direction of display by the display unit; and an orientation-instruction acquiring unit that acquires an instruction to specify an orientation of display by the display unit or an orientation of the function layout of the operation unit.

Abstract: A thermal flowmeter includes: a first thermal resistive element disposed on a pipe and sensing a first temperature of a fluid; a second thermal resistive element disposed on the pipe downstream relative to the first thermal resistive element and sensing a second temperature thereof; a control unit causing the second thermal resistive element to generate heat so that the second temperature is kept higher than the first temperature by a predetermined value; a power measurement unit measuring a power supplied to the second thermal resistive element; a temperature difference gradient calculation unit calculating a gradient of a difference between the second and first temperatures; a power compensation unit compensating the measured power based on the gradient of the difference and a value of the power when no fluid is in the pipe; and a flow rate calculation unit calculating a flow rate of the fluid based on the compensated power.

Abstract: A thermal flowmeter includes: a first thermal resistive element disposed on a pipe and sensing a first temperature of a fluid; a second thermal resistive element disposed on the pipe downstream relative to the first thermal resistive element and sensing a second temperature thereof; a control unit causing the second thermal resistive element to generate heat so that the second temperature is kept higher than the first temperature by a predetermined value; a power measurement unit measuring a power supplied to the second thermal resistive element; a temperature difference gradient calculation unit calculating a gradient of a difference between the second and first temperatures; a power compensation unit compensating the measured power based on the gradient of the difference and a value of the power when no fluid is in the pipe; and a flow rate calculation unit calculating a flow rate of the fluid based on the compensated power.