Patents by Inventor Wataru Nagatomo
Wataru Nagatomo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230298310Abstract: The present disclosure proposes a pattern matching device capable of achieving matching processing that is characterized by involving a learning function even for a semiconductor pattern including a repetitive pattern, in particular. The pattern matching device pertaining to the present disclosure is provided with a learning unit for estimating a first correlation image having, as pixel values thereof, numerical values representing a correlation between a first image and a second image. The pattern matching device calculates a second correlation image having, as pixel values thereof, numerical values representing the correlation between a derivative image generated from the first image and the first image, and the learning unit performs learning so as to reduce the difference between the first correlation image and the second correlation image (refer to FIG. 1).Type: ApplicationFiled: July 9, 2020Publication date: September 21, 2023Inventors: Liang LI, Wataru NAGATOMO, Yuichi ABE
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Publication number: 20230230886Abstract: To provide a technique capable of quantitatively grasping a change in three-dimensional shape including a cross-sectional shape of a pattern within a surface of a wafer or between wafers in a non-destructive manner before cross-sectional observation.Type: ApplicationFiled: December 14, 2022Publication date: July 20, 2023Applicant: Hitachi High-Tech CorporationInventors: Kenji YASUI, Mayuka OSAKI, Hitoshi NAMAI, Yuki OJIMA, Wataru NAGATOMO, Masami IKOTA, Maki KIMURA
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Patent number: 11669953Abstract: The purpose of the present invention is to provide a pattern matching device and computer program that carry out highly accurate positioning even if edge positions and numbers change. The present invention proposes a computer program and a pattern matching device wherein a plurality of edges included in first pattern data to be matched and a plurality of edges included in second pattern data to be matched with the first pattern data are associated, a plurality of different association combinations are prepared, the plurality of association combinations are evaluated using index values for the plurality of edges, and matching processing is carried out using the association combinations selected through the evaluation.Type: GrantFiled: January 30, 2015Date of Patent: June 6, 2023Assignee: Hitachi High-Tech CorporationInventors: Wataru Nagatomo, Yuichi Abe, Mitsuji Ikeda
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Publication number: 20230071668Abstract: A pattern matching apparatus includes a computer system configured to execute pattern matching processing between first pattern data based on design data 104 and second pattern data representing a captured image 102 of an electron microscope. The computer system acquires a first edge candidate group including one or more first edge candidates, acquires a selection-required number (the number of second edge candidates to be selected based on the second pattern data), acquires a second edge candidate group including the second edge candidates of the selection-required number, acquires an association evaluation value for each of different association combinations between the first edge candidate group and the second edge candidate group, selects one of the combinations based on the association evaluation value, and calculates a matching shift amount based on the selected combination.Type: ApplicationFiled: February 20, 2020Publication date: March 9, 2023Inventors: Liang LI, Yuichi ABE, Wataru NAGATOMO
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Patent number: 10535129Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.Type: GrantFiled: December 7, 2011Date of Patent: January 14, 2020Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Masahiro Kitazawa, Mitsuji Ikeda, Yuichi Abe, Junichi Taguchi, Wataru Nagatomo
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Patent number: 10255519Abstract: To provide means according to which template matching is performed successfully in an apparatus that performs inspection or measurement of a semiconductor pattern, which is formed on a wafer, even in a case in which a pattern for alignment, which is in design data, has been eliminated from an image in which an image of a practical pattern was captured using the apparatus, in which the brightness value contrast of a pattern is lower (more indistinct) than that of other locations, or in which a pattern is deformed and there is a discrepancy with the shape of a template (a pattern for alignment in the design data).Type: GrantFiled: October 13, 2016Date of Patent: April 9, 2019Assignee: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Yuichi Abe
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Publication number: 20180005363Abstract: The purpose of the present invention is to provide a pattern matching device and computer program that carry out highly accurate positioning even if edge positions and numbers change. The present invention proposes a computer program and a pattern matching device wherein a plurality of edges included in first pattern data to be matched and a plurality of edges included in second pattern data to be matched with the first pattern data are associated, a plurality of different association combinations are prepared, the plurality of association combinations are evaluated using index values for the plurality of edges, and matching processing is carried out using the association combinations selected through the evaluation.Type: ApplicationFiled: January 30, 2015Publication date: January 4, 2018Inventors: Wataru NAGATOMO, Yuichi ABE, Mitsuji IKEDA
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Publication number: 20170109607Abstract: To provide means according to which template matching is performed successfully in an apparatus that performs inspection or measurement of a semiconductor pattern, which is formed on a wafer, even in a case in which a pattern for alignment, which is in design data, has been eliminated from an image in which an image of a practical pattern was captured using the apparatus, in which the brightness value contrast of a pattern is lower (more indistinct) than that of other locations, or in which a pattern is deformed and there is a discrepancy with the shape of a template (a pattern for alignment in the design data).Type: ApplicationFiled: October 13, 2016Publication date: April 20, 2017Inventors: Wataru NAGATOMO, Yuichi ABE
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Patent number: 9619727Abstract: An inspection device that performs pattern matching on a searched image performs matching between a template image of an inspection object and the searched image by using: a feature region extraction process unit that extracts a feature quantity from the template image acquired for learning; a feature quantity extraction process unit that extracts a feature quantity from the searched image acquired for learning; a mutual feature quantity calculation process unit that calculates a mutual feature quantity of the template image and the searched image from the feature quantity extracted from the template image and the feature quantity extracted from the searched image; a learning process unit that calculates, using a plurality of the mutual feature quantities, a discrimination boundary surface that determines matching success or failure; a process unit that calculates a plurality of the mutual feature quantities from an image acquired from the inspection object; and the plurality of mutual feature quantities andType: GrantFiled: July 16, 2013Date of Patent: April 11, 2017Assignee: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Yuichi Abe, Hiroyuki Ushiba
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Publication number: 20160140287Abstract: A template creation device for a sample observation device for creating a template for image processing using design data includes a storage unit for storing process information in which information concerning a plurality of process processings is defined, and a template creation unit for processing the design data using the process information and creating the template for the image processing.Type: ApplicationFiled: May 19, 2014Publication date: May 19, 2016Inventors: Yuki OJIMA, Shigeki SUKEGAWA, Yuichi ABE, Toshikazu KAWAHARA, Wataru NAGATOMO, Shinji KUBO
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Publication number: 20150199583Abstract: An inspection device that performs pattern matching on a searched image performs matching between a template image of an inspection object and the searched image by using: a feature region extraction process unit that extracts a feature quantity from the template image acquired for learning; a feature quantity extraction process unit that extracts a feature quantity from the searched image acquired for learning; a mutual feature quantity calculation process unit that calculates a mutual feature quantity of the template image and the searched image from the feature quantity extracted from the template image and the feature quantity extracted from the searched image; a learning process unit that calculates, using a plurality of the mutual feature quantities, a discrimination boundary surface that determines matching success or failure; a process unit that calculates a plurality of the mutual feature quantities from an image acquired from the inspection object; and the plurality of mutual feature quantities andType: ApplicationFiled: July 16, 2013Publication date: July 16, 2015Applicant: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Yuichi Abe, Hiroyuki Ushiba
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Patent number: 8971627Abstract: The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.Type: GrantFiled: March 17, 2011Date of Patent: March 3, 2015Assignee: Hitachi High-Technologies CorporationInventors: Jun'ichi Taguchi, Mitsuji Ikeda, Yuichi Abe, Masahiro Kitazawa, Wataru Nagatomo
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Patent number: 8885950Abstract: Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.Type: GrantFiled: October 6, 2010Date of Patent: November 11, 2014Assignee: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Yuichi Abe, Mitsuji Ikeda
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Patent number: 8881067Abstract: To enable SEM-based management of a cross-sectional shape or manufacturing process parameters of a semiconductor device pattern to be measured, the association between the shape or parameters and SEM image characteristic quantities effective for estimating the shape or parameters is saved as learning data. The image characteristic quantities are collated with learning data to estimate the shape or to monitor the process parameters. Accuracy and reliability is achievable by calculating three kinds of reliability (reliability of the image characteristic quantities, reliability of estimation engines, and reliability of estimating results) based on the distribution of the image characteristic quantities and then judging whether additional learning is necessary, or selecting and adjusting image characteristic quantities and estimation engine based on the reliability.Type: GrantFiled: January 10, 2013Date of Patent: November 4, 2014Assignee: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Atsushi Miyamoto, Hidetoshi Morokuma
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Patent number: 8853630Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.Type: GrantFiled: January 29, 2014Date of Patent: October 7, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
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Publication number: 20140145078Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.Type: ApplicationFiled: January 29, 2014Publication date: May 29, 2014Applicant: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
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Patent number: 8642957Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.Type: GrantFiled: March 28, 2012Date of Patent: February 4, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
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Publication number: 20140023265Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.Type: ApplicationFiled: December 7, 2011Publication date: January 23, 2014Inventors: Masahiro Kitazawa, Mitsuji Ikeda, Yuichi Abe, Junichi Taguchi, Wataru Nagatomo
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Patent number: RE45204Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.Type: GrantFiled: November 6, 2009Date of Patent: October 21, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani
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Patent number: RE45224Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.Type: GrantFiled: November 18, 2009Date of Patent: October 28, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani