Patents by Inventor Weilu H. Xu

Weilu H. Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser cutting array with multiple laser source arrangement
    Patent number: 10384306
    Abstract: Provided herein is an apparatus that includes a first and second laser source. The first and second laser sources are each operable to cut a substrate and are each independently movable with respect to one another. Further, the first and second laser sources are included within a multitude of laser sources that are arranged in a circular array.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: August 20, 2019
    Assignee: Seagate Technology LLC
    Inventors: Ian J. Beresford, Joachim Walter Ahner, David M. Tung, Weilu H. Xu, Kuo-Hsing Hwang
  • Sputtering shield
    Patent number: 9865440
    Abstract: A sputtering apparatus includes a sputtering cathode and a target overlying the sputtering cathode. A shield overlies the target and forms an aperture configured to direct sputtering particles onto a substrate. The shield includes a lower shield portion overlying the target, a channel outlet overlying the lower shield portion, and an upper shield portion overlying the channel. In some embodiments the shield includes a first shield and a second shield. The first shield includes a front gas injection outlet. The second shield overlies the first shield and forms the aperture. In various embodiments, the second shield is operable to adjust plasma confinement between the first shield and the second shield.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: January 9, 2018
    Assignee: Seagate Technology LLC
    Inventors: Stan Kassela, Wei Xu, Lim Boon Leong, Liu Hao Jun, Chun Wai Tong, Weilu H. Xu, Thomas Larson Greenberg, Antonio Javier Zambano, Robin Andrew Davies