Patents by Inventor Whan Nam-Koong

Whan Nam-Koong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7075074
    Abstract: In a method for testing an operation state of an electron beam inspection apparatus, an electron beam sequentially scans a plurality of scan lines in a predetermined inspection area on a substrate. A detector detects secondary electrons emitted from the scan lines and an image acquisition unit acquires inspection images corresponding to the scan lines from the secondary electrons. An image processing unit analyzes the inspection images using an initial sensitivity in order to detect defects on the scan lines. A graphic unit produces an inspection graph indicating the number of defects and an operation unit compares the inspection graph with a reference graph. A compensator compensates a sensitivity difference corresponding to a difference between the inspection graph and the reference graph.
    Type: Grant
    Filed: June 16, 2004
    Date of Patent: July 11, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Whan Nam-Koong
  • Publication number: 20040262519
    Abstract: In a method for testing an operation state of an electron beam inspection apparatus, an electron beam sequentially scans a plurality of scan lines in a predetermined inspection area on a substrate. A detector detects secondary electrons emitted from the scan lines and an image acquisition unit acquires inspection images corresponding to the scan lines from the secondary electrons. An image processing unit analyzes the inspection images using an initial sensitivity in order to detect defects on the scan lines. A graphic unit produces an inspection graph indicating the number of defects and an operation unit compares the inspection graph with a reference graph. A compensator compensates a sensitivity difference corresponding to a difference between the inspection graph and the reference graph.
    Type: Application
    Filed: June 16, 2004
    Publication date: December 30, 2004
    Inventor: Whan Nam-Koong