Abstract: An illumination system for a microlithographic projection exposure apparatus includes a mirror arranged in a multi-mirror array and capable of being tilted via at least one actuator. The illumination system also includes drive electronics, which include a coarse digital-to-analogue converter with a first resolution, and a fine digital-to-analogue converter with a second resolution, and an adder. The second resolution is higher than the first resolution. The adder can add output quantities that are output by the two digital-to-analogue converters to yield an overall quantity that is capable of being applied at least indirectly to the at least one actuator of the mirror.

Abstract: An illumination system for a microlithographic projection exposure apparatus includes a mirror arranged in a multi-mirror array and capable of being tilted via at least one actuator. The illumination system also includes drive electronics, which include a coarse digital-to-analogue converter with a first resolution, and a fine digital-to-analogue converter with a second resolution, and an adder. The second resolution is higher than the first resolution. The adder can add output quantities that are output by the two digital-to-analogue converters to yield an overall quantity that is capable of being applied at least indirectly to the at least one actuator of the mirror.

Abstract: The invention relates to a keyboard, particularly a computer keyboard, comprising a keyboard housing (1, 3) and a capacitive device, which comprises at least one electrode (35) and is provided for inputting position data for a mouse pointer. The inventive keyboard is characterized in that the at least one electrode (35) is situated inside the keyboard housing (1, 3). The invention makes it possible to combine the different functionalities of a keyboard and touch pad on the same'surface. The touchpad functionality constitutes a modular addition to common membrane keyboard technology.

Abstract: The circuit arrangement serves for the voltage supply of the row and column drivers of a liquid crystal display device. It comprises a voltage divider (1) having a plurality of series-connected resistors (R1–R5) and having voltage pick-offs (22–25) arranged between the resistors (R1–R5) for picking off different voltage levels (V2–V5). A single one (25) of the voltage pick-offs (22–25) is provided with means (3) for fine-tuning of the voltage level (V5) picked off there. By individually calibrating each individual circuit arrangement once, the one voltage level (V5) may be fine-tuned such that crosstalk caused by asymmetrical voltage levels, i.e. mutual interaction of pixel contents, is reduced. The advantages of the circuit arrangement come into their own in particular when it is used in liquid crystal display devices with a gray-stage display or color display.

Abstract: The present invention relates to a fast, high precision, interference tolerant impedance measurement apparatus. The apparatus comprises an oscillator circuit having a characteristic frequency determined by the impedance to be measured. The oscillation voltage is converted by one or more high-gain limiting amplifiers to one or more square waves of the same characteristic frequency. The one or more square waves are down-divided by a frequency division circuit to a second square wave, and afterwards transfered to a time-to-digital converter which converts the period of said second square wave signal to a digital state. The digital state is fed to a digital processing unit, which may perform various functions like mapping the digital state to a digital number, filtering, rejection of scatter values, etc. Finally, a number is output from said digital processing unit which gives a measure for the value of the impedance to be measured.

Abstract: The circuit arrangement serves for the voltage supply of the row and column drivers of a liquid crystal display device. It comprises a voltage divider (1) having a plurality of series-connected resistors (R1-R5) and having voltage pick-offs (22-25) arranged between the resistors (R1-R5) for picking off different voltage levels (V2-V5). A single one (25) of the voltage pick-offs (22-25) is provided with means (3) for fine-tuning of the voltage level (V5) picked off there. By individually calibrating each individual circuit arrangement once, the one voltage level (V5) may be fine-tuned such that crosstalk caused by asymmetrical voltage levels, i.e. mutual interaction of pixel contents, is reduced. The advantages of the circuit arrangement come into their own in particular when it is used in liquid crystal display devices with a gray-stage display or color display.