Abstract: The present invention relates to magnetic support of the rotor structure in vacuum pumps, particularly turbomolecular pumps. This magnetic support eliminates the requirements for bearing lubricants, and the consequent degradation of the vacuum to be produced by lubricant vapors.

Abstract: A flow machine for pumping and/or measuring the flow of agressive, radioactive, or special-purity flow mediums. The flow machine is provided with a rotatable impeller magnetically supported within a machine casing such that the impeller is spaced at all points from the inside walls of the machine casing. The casing inside walls and the outer configuration of the impeller include a central cylindrical center section joined by conically outwardly flared end sections. Electromagnetics are arranged in the conical flared section outside of the inside wall for cooperation with magnetic material arranged in the corresponding conically flared sections of the impeller to support the impeller in position. The conically flared section facilitate both radial and axial support of the impeller, since both axial and radial components of electromagnetic force is experienced at the conically flared sections of the impeller.