Patents by Inventor XIANFEI FANG

XIANFEI FANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240392436
    Abstract: The present application discloses a method for cleaning a process chamber and an application thereof. The method for cleaning a process chamber includes: (a) turning on a remote plasma system, exciting a clean-process gas into plasma, and supplying remote plasma to the process chamber; (b) after operation of the remote plasma system reaches a stable state, turning on a radio-frequency power supply system in the process chamber, re-exciting and enhancing the remote plasma positioned in the process chamber by the radio-frequency power supply system, and using both the remote plasma system and the radio-frequency power supply system for jointly acting and cleaning the process chamber during a period of cleaning time; (c) when the cleaning of the process chamber is completed, firstly turning off the radio-frequency power supply system in the process chamber; and (d) then turning off the remote plasma system.
    Type: Application
    Filed: August 5, 2024
    Publication date: November 28, 2024
    Applicants: Suzhou Maxwell Technologies Co., Ltd., Suzhou Maizheng Technology Co., Ltd.
    Inventors: QINGYUAN QU, XUEYONG HE, JIAN ZHOU, ERCHENG WEN, XIANFEI FANG, DENGZHI WANG