Patents by Inventor Xiaowei Wu

Xiaowei Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10443126
    Abstract: Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
    Type: Grant
    Filed: April 6, 2018
    Date of Patent: October 15, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
  • Patent number: 10443125
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: October 15, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20190309413
    Abstract: Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
    Type: Application
    Filed: April 6, 2018
    Publication date: October 10, 2019
    Inventors: Xiaowei Wu, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20190135818
    Abstract: The present invention provides a compound comprising a 5-membered heterocycle fused with a pyridazinone, wherein the compound is used as an FGFR kinase inhibitor, and a manufacturing method and application thereof. The invention specifically provides a compound as represented by formula (I). Various radicals are as defined in the specification. The compound provided by the invention effectively inhibits an activity of an FGFR kinase, and can be used to manufacture a pharmaceutical product for treating a disease related to the activity of the FGFR kinase.
    Type: Application
    Filed: May 24, 2017
    Publication date: May 9, 2019
    Inventors: Hualiang JIANG, Hong LIU, Meiyu GENG, Mingyue ZHENG, Jing AI, Yulan WANG, Xiaowei WU, Shuangjie LI, Xia PENG, Chunpu LI, Kaixian CHEN, Bao WANG
  • Publication number: 20190137194
    Abstract: The present invention relates to a heat exchange tube for a terminal product of an air-conditioning system. Air and a refrigerating medium perform heat exchange through the heat exchange tube, and protrusions are disposed on an inner wall of the heat exchange tube. The present invention further relates to an air-conditioning terminal product provided with the heat exchange tube, an air-conditioning system provided with the air-conditioning terminal product, and a method of manufacturing a heat exchange tube for a terminal product of an air-conditioning system. The heat exchange tube for a terminal product of an air-conditioning system according to the present invention is advantageous in a small volume, high heat-exchange efficiency, low manufacturing costs, and the like.
    Type: Application
    Filed: November 8, 2018
    Publication date: May 9, 2019
    Inventors: Robert Hong-Leung Chiang, LingXiao Zhao, Xiaowei Wu, XiuHong Jiang, Zhigang Wu
  • Publication number: 20190127280
    Abstract: Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.
    Type: Application
    Filed: October 23, 2018
    Publication date: May 2, 2019
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Publication number: 20190078206
    Abstract: An article comprises a body having a coating. The coating comprises a M-O-F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.
    Type: Application
    Filed: February 23, 2018
    Publication date: March 14, 2019
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun
  • Publication number: 20190078199
    Abstract: An article comprises a body having a coating. The coating comprises a M-O—F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.
    Type: Application
    Filed: August 22, 2018
    Publication date: March 14, 2019
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20190078200
    Abstract: An article comprises a body having a coating. The coating comprises a M-O-F coating having a molar O/F ratio that is customized to future processing that the article may be exposed to.
    Type: Application
    Filed: February 23, 2018
    Publication date: March 14, 2019
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun
  • Patent number: 10186400
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a rare earth metal-containing oxide layer and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: January 22, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Publication number: 20180327892
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180327898
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180330923
    Abstract: A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Toan Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He, Cheng-Hsuan Chou, Jennifer Y. Sun
  • Publication number: 20180327899
    Abstract: An article comprises a body having a coating. The coating comprises a Y-O-F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180240648
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a rare earth metal-containing oxide layer and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Application
    Filed: January 20, 2017
    Publication date: August 23, 2018
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Publication number: 20180209042
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Application
    Filed: December 20, 2017
    Publication date: July 26, 2018
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Patent number: D824372
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: July 31, 2018
    Assignee: Airgain Incorporated
    Inventors: Bei Zheng, Wei Chang, Xiaowei Wu, Simon Yang
  • Patent number: D828341
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: September 11, 2018
    Assignee: Airgain Incorporated
    Inventors: Wei Chang, Bei Zheng, Ziming He, Xiaowei Wu, Simon Yang
  • Patent number: D852785
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: July 2, 2019
    Assignee: Airgain Incorporated
    Inventors: Bei Zheng, Xiangjie Bian, Xiaowei Wu
  • Patent number: D853363
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: July 9, 2019
    Assignee: Airgain Incorporated
    Inventors: Bei Zheng, Xiangjie Bian, Xiaowei Wu