Patents by Inventor Yali Tai

Yali Tai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer cleaning method to remove residual contamination including metal nitride particles
    Patent number: 6585826
    Abstract: A method of removing residual contamination including metal nitride particles from semiconductor wafer surfaces including the steps of: providing at least one semiconductor wafer with metal nitride particles adhering to the at least one semiconductor wafer surface thereto; subjecting the at least one semiconductor wafer to at least one mechanical brushing process while a cleaning solution including a carboxylic acid is supplied to at least one semiconductor wafer surface; and, subjecting the at least one semiconductor wafer to an a sonic cleaning process including the carboxylic acid cleaning solution.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: July 1, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Yali Tai, Shih-Chi Lin, Wen-Long Lee, Francis Wang, Szu-An Wu, Hsi-Kuei Cheng, Ying-Lang Wang
  • SEMICONDUCTOR WAFER CLEANING METHOD TO REMOVE RESIDUAL CONTAMINATION INCLUDING METAL NITRIDE PARTICLES
    Publication number: 20030084919
    Abstract: A method of removing residual contamination including metal nitride particles from semiconductor wafer surfaces including the steps of: providing at least one semiconductor wafer with metal nitride particles adhering to the at least one semiconductor wafer surface thereto; subjecting the at least one semiconductor wafer to at least one mechanical brushing process while a cleaning solution including a carboxylic acid is supplied to the at least one semiconductor wafer surface; and, subjecting the at least one semiconductor wafer to an a sonic cleaning process including the carboxylic acid cleaning solution.
    Type: Application
    Filed: November 2, 2001
    Publication date: May 8, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yali Tai, Shih-Chi Lin, Wen-Long Lee, Francis Wang, Szu-An Wu, Hsi-Kuei Cheng, Ying-Lang Wang