Abstract: A disclose substrate support of a plasma processing apparatus has an electrostatic chuck that holds an edge ring. The electrostatic chuck includes a first electrode and a second electrode. In an execution period of a first plasma processing on a substrate, first potentials which are ones out of potentials same as each other and potentials different from each other are set to the first and second electrodes, respectively. In an execution period of a second plasma processing on the substrate, second potentials which are others out of the potentials same as each other and the potentials different from each other are set to the first and second electrodes, respectively. The respective potentials of the first electrode and the second electrode are switched from the first potentials to the second potentials.

Abstract: A guide of an excavation tool replacement device includes an inner guide member configured to guide advancing and retreating of an excavation tool, and an outer guide member configured to support the inner guide member such that the inner guide member is movable to a face side and an anti-face side. The inner guide member has, at a face side end thereof, a first sealing member configured to come into close contact with a gate plate from the anti-face side.

Abstract: A drill bit exchange device for a shield tunneling machine includes: a housing with an aperture; a valve body housed in a chamber of the housing, the valve body being pivotable about a pivot axis (Ob) inclined at a predetermined angle with respect to an axis perpendicular to the front of a cutter head; a bit-housing hole formed in the valve body to detachably accommodate a bit; and an exchange seal recess located at the front of the chamber and at a symmetrical position from the aperture with respect to the pivot axis (Ob). The valve body is pivoted about the pivot axis (Ob) to move the bit, which faces the aperture, to the exchange seal recess, allowing the bit to be removed from the bit-housing hole and exchanged.

Abstract: An excavation machine having a cutter head with a large diameter while making it possible to excavate excavation objects such as hard bedrock etc. with high efficiency is provided. The excavation machine comprises an outer circumference cutter head 20 having a circular opening and being rotated and contacted to excavation objects and a small diameter cutter head 23 disposed in the opening and rotatable independently from the outer circumference cutter head. Rotation centers of the rotation disk and the rotation plate are gapped and the gap is shorter than a rotation radius of the small diameter cutter head.

Abstract: A drill bit exchange device for a shield tunneling machine includes: a housing with an aperture; a valve body housed in a chamber of the housing, the valve body being pivotable about a pivot axis (Ob) inclined at a predetermined angle with respect to an axis perpendicular to the front of a cutter head; a bit-housing hole formed in the valve body to detachably accommodate a bit; and an exchange seal part located at the front of the chamber and at a symmetrical position from the aperture with respect to the pivot axis (Ob). The valve body is pivoted about the pivot axis (Ob) to move the bit, which faces the aperture, to the exchange seal part, allowing the bit to be removed from the bit-housing hole and exchanged.

Abstract: An excavation machine having a cutter head with a large diameter while making it possible to excavate excavation objects such as hard bedrock etc. with high efficiency is provided. The excavation machine comprises an outer circumference cutter head 20 having a circular opening and being rotated and contacted to excavation objects and a small diameter cutter head 23 disposed in the opening and rotatable independently from the outer circumference cutter head. Rotation centers of the rotation disk and the rotation plate are gapped and the gap is shorter than a rotation radius of the small diameter cutter head.

Abstract: A valve containing portion (35) is formed behind a bit containing portion (34) which opens at the front surface of a main cutter spoke (21). A rotary valve (39) is rotatably disposed in the valve containing portion (35). A bit case (41) containing a roller bit (31) is moved so as to protrude from an attachment/detachment path (39) formed in a rotary valve (38) into the bit containing portion (34), and is fixed by a cotter (38) to support an excavating reactive force. Thus, the sliding gap of the rotary valve (39) is disposed in the bit containing portion (34) and the valve containing portion (35) to be covered with the bit case (41).

Abstract: An opening for a replacement bit can be closed without a large drive force, the replacement bit can be replaced without being moved, and the workability of replacement is not impaired. A rear surface frame (29) forms a workspace (28) on the rear surface side of a spoke front surface plate (21), and openings (33) are formed on the spoke front surface plate (21) such that a replacement bit (31) can be inserted into and removed from the opening (33). A bit guide body (37) having a bit guide hole (38) is provided on the rear surface side of the opening (33). A gate plate (34) is provided which has valve ports (35) capable of communicating and closing the openings (33) and the bit guide holes (38). A gate opening/closing device (36) is provided which can turn the gate plate (34) to open or close the openings (33).

Abstract: A valve containing portion (35) is formed behind a bit containing portion (34) which opens at the front surface of a main cutter spoke (21). A rotary valve (39) is rotatably disposed in the valve containing portion (35). A bit case (41) containing a roller bit (31) is moved so as to protrude from an attachment/detachment path (39) formed in a rotary valve (38) into the bit containing portion (34), and is fixed by a cotter (38) to support an excavating reactive force. Thus, the sliding gap of the rotary valve (39) is disposed in the bit containing portion (34) and the valve containing portion (35) to be covered with the bit case (41).

Abstract: An opening for a replacement bit can be closed without a large drive force, the replacement bit can be replaced without being moved, and the workability of replacement is not impaired. A rear surface frame (29) forms a workspace (28) on the rear surface side of a spoke front surface plate (21), and openings (33) are formed on the spoke front surface plate (21) such that a replacement bit (31) can be inserted into and removed from the opening (33). A bit guide body (37) having a bit guide hole (38) is provided on the rear surface side of the opening (33). A gate plate (34) is provided which has valve ports (35) capable of communicating and closing the openings (33) and the bit guide holes (38). A gate opening/closing device (36) is provided which can turn the gate plate (34) to open or close the openings (33).