Abstract: The present invention is directed to a dielectric barrier discharge lamp capable of recovering reduced radiation efficiency by easily, quickly cleaning dust or discoloring of a discharge tube or replacing any defective discharge tube. For this end, an internal electrode 22 in a form of electrically conductive rod is inserted into a center hole of a dual discharge tube 20 having discharge gas filled in an internal space 21. Holders 40a and 40b are removably mounted on both ends of the internal electrode 22 using mounting screws 41. A protection tube 30 is mounted onto the holders 40 by way of sealing members 31, pressure blocks 32 and pressure rings 33 in such a manner to cover an external electrode 23 of the discharge tube 20. Cooling water or the like may be permitted to flow in a continuous space 45 formed between the internal electrode 22 and the discharge tube 20 and the holders 40.

Abstract: The present invention provides a substrate transfer apparatus which can hold the substrate without contacting the surface of the substrate while the substrate is transferred and which does not require the additional prealignment mechanism. The substrate is transferred by a handler. The handler comprises a substrate holding apparatus and a substrate contact apparatus. The substrate holding apparatus includes a noncontact chuck for holding the substrate without contacting the surface of the substrate, and an elevating mechanism for lowering and lifting the noncontact chuck. The substrate contact apparatus includes a contact member to be in contact with the end face of the substrate, a moving mechanism for moving the contact member away from the end face of the substrate when the noncontact chuck is lowered and moving the contact member towards the end face of the substrate when the noncontact chuck is lifted.

Abstract: The present invention is directed to a dielectric barrier discharge lamp capable of recovering reduced radiation efficiency by easily, quickly cleaning dust or discoloring of a discharge tube or replacing any defective discharge tube. For this end, an internal electrode 22 in a form of electrically conductive rod is inserted into a center hole of a dual discharge tube 20 having discharge gas filled in an internal space 21. Holders 40a and 40b are removably mounted on both ends of the internal electrode 22 using mounting screws 41. A protection tube 30 is mounted onto the holders 40 by way of sealing members 31, pressure blocks 32 and pressure rings 33 in such a manner to cover an external electrode 23 of the discharge tube 20. Cooling water or the like may be permitted to flow in a continuous space 45 formed between the internal electrode 22 and the discharge tube 20 and the holders 40.

Abstract: The present invention is designed to provide a high intensity light irradiation apparatus having a simpler, lighter, easy to assemble and replace support member for a dielectric barrier electrical discharge lamp. The dielectric barrier electrical discharge lamp 1 comprises concentric outer tube 11 and inner tube 12 to form an inert gas filled electrical discharge space 14 defined by the outer and inner tubes 11,12 and their end walls. A metal rod 3 is inserted into the inner tube 12 of the electrical discharge lamp 1. A pair of clamp members 4 are secured to both ends of the metal rod 3 for clamping the both ends of the electrical discharge lamp 1. An AC voltage is applied between the metal rod 3 and an outer electrode 21 on the surface of the outer tube 11. Cooling water flows through the gap between the metal rod 3 and the inner tube 12.