Patents by Inventor Yasuhito Sasaki
Yasuhito Sasaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10495978Abstract: There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.Type: GrantFiled: November 17, 2015Date of Patent: December 3, 2019Assignee: Canon Kabushiki KaishaInventors: Yasuhito Sasaki, Mitsuru Seki, Takeshi Nakajima
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Patent number: 9944576Abstract: The present invention provides a method for selectively separating a straight-chain conjugated diene with high purity from a mixture containing the straight-chain conjugated diene and at least one type of straight-chain olefin. The method involves separating the straight-chain conjugated diene from the mixture containing the straight-chain conjugated diene and the straight-chain olefin using a zeolite membrane composite. The composite contains a porous support and a zeolite layer formed on the surface and in the fine pores of the support, and the zeolite contains an alkali metal cation.Type: GrantFiled: September 30, 2015Date of Patent: April 17, 2018Assignees: WASEDA UNIVERSITY, JXTG Nippon Oil & Energy CorporationInventors: Masahiko Matsukata, Motomu Sakai, Yasuhito Sasaki, Tatsuo Hamamatsu, Nobuhiro Kimura
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Publication number: 20170349510Abstract: The present invention provides a method for selectively separating a straight-chain conjugated diene with high purity from a mixture containing the straight-chain conjugated diene and at least one type of straight-chain olefin. The method involves separating the straight-chain conjugated diene from the mixture containing the straight-chain conjugated diene and the straight-chain olefin using a zeolite membrane composite. The composite contains a porous support and a zeolite layer formed on the surface and in the fine pores of the support, and the zeolite contains an alkali metal cation.Type: ApplicationFiled: September 30, 2015Publication date: December 7, 2017Applicants: Waseda University, JXTG Nippon Oil & Energy Corporation, JXTG Nippon Oil & Energy CorporationInventors: Masahiko MATSUKATA, Motomu SAKAI, Yasuhito SASAKI, Tatsuo HAMAMATSU, Nobuhiro KIMURA
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Publication number: 20170315448Abstract: There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.Type: ApplicationFiled: November 17, 2015Publication date: November 2, 2017Inventors: Yasuhito Sasaki, Mitsuru Seki, Takeshi Nakajima
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Patent number: 8891054Abstract: A stage device includes a base and a stage movable portion that is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other along an axial direction of the piping element, guides a bend of the at least one of the piping element and the wiring element. A plurality of heat insulating sheets are supported by the plurality of members of the auxiliary member. The plurality of heat insulating sheets are provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.Type: GrantFiled: December 14, 2011Date of Patent: November 18, 2014Assignee: Canon Kabushiki KaishaInventors: Hitoshi Sato, Yasuhito Sasaki, Keiji Emoto
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Publication number: 20120086931Abstract: A stage device that includes a base. A stage movable portion is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other, guides a bend of at least one of the piping element and the wiring element. A heat insulating sheet is supported by the auxiliary member. The heat insulating material is provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.Type: ApplicationFiled: December 14, 2011Publication date: April 12, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Hitoshi Sato, Yasuhito Sasaki, Keiji Emoto
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Patent number: 8102500Abstract: A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.Type: GrantFiled: May 21, 2007Date of Patent: January 24, 2012Assignee: Canon Kabushiki KaishaInventors: Hitoshi Sato, Yasuhito Sasaki, Keiji Emoto
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Patent number: 7408276Abstract: A plane motor device that includes a stator unit, a movable unit movable along a plane above the stator unit, first and second coil units at one or both of the movable unit and the stator unit, in which coil units a current flows for driving the coil unit, and an enclosure partitioned into a plurality of separate regions. The enclosure encloses the first and second coil units in two respective regions of the plurality of separate regions. Each of the two regions has a cooling channel through which cooling refrigerant flows separately from the cooling channel of the other region.Type: GrantFiled: April 27, 2004Date of Patent: August 5, 2008Assignee: Canon Kabushiki KaishaInventors: Hitoshi Sato, Yasuhito Sasaki, Yoshikazu Miyajima
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Patent number: 7391495Abstract: A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.Type: GrantFiled: April 8, 2004Date of Patent: June 24, 2008Assignee: Canon Kabushiki KaishaInventors: Yoshikazu Miyajima, Yasuhito Sasaki, Hitoshi Sato
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Patent number: 7321418Abstract: A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.Type: GrantFiled: October 13, 2005Date of Patent: January 22, 2008Inventors: Yasuhito Sasaki, Yoshikazu Miyajima, Naosuke Nishimura, Hideo Tanaka, Toshihiko Nishida
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Patent number: 7312848Abstract: This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.Type: GrantFiled: March 17, 2006Date of Patent: December 25, 2007Assignee: Canon Kabushiki KaishaInventors: Hideo Tanaka, Yoshikazu Miyajima, Yasuhito Sasaki
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Publication number: 20070273861Abstract: A stage device including a base, a stage movable portion being movable along said base without contact thereto, an interferometer configured to measure a position of the stage movable portion, at least one of a piping element and a wiring element connected to the stage movable portion, and at least one of a heat insulating material and a heat collecting unit configured to reduce a heat to be transmitted from the piping element or wiring element to a space through which measurement light of the interferometer passes.Type: ApplicationFiled: May 21, 2007Publication date: November 29, 2007Applicant: CANON KABUSHIKI KAISHAInventors: Hitoshi Sato, Yasuhito Sasaki, Keiji Emoto
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Patent number: 7301602Abstract: A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.Type: GrantFiled: March 31, 2005Date of Patent: November 27, 2007Assignee: Canon Kabushiki KaishaInventors: Hitoshi Sato, Yoshikazu Miyajima, Yasuhito Sasaki
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Patent number: 7224432Abstract: A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.Type: GrantFiled: May 12, 2005Date of Patent: May 29, 2007Assignee: Canon Kabushiki KaishaInventors: Yasuhito Sasaki, Yoshikazu Miyajima, Hitoshi Sato, Katsumi Asada, Hideo Tanaka
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Publication number: 20060209287Abstract: This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.Type: ApplicationFiled: March 17, 2006Publication date: September 21, 2006Inventors: Hideo Tanaka, Yoshikazu Miyajima, Yasuhito Sasaki
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Publication number: 20060082754Abstract: A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.Type: ApplicationFiled: October 13, 2005Publication date: April 20, 2006Applicant: Canon Kabushiki KaishaInventors: Yasuhito Sasaki, Yoshikazu Miyajima, Naosuke Nishimura, Hideo Tanaka, Toshihiko Nishida
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Publication number: 20050254036Abstract: A stage device includes a movable stage, a base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base as the stage moves. The base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the base. In addition, when the mass body is arranged in the base, the stage device can be more downsized.Type: ApplicationFiled: May 12, 2005Publication date: November 17, 2005Applicant: CANON KABUSHIKI KAISHAInventors: Yasuhito Sasaki, Yoshikazu Miyajima, Hitoshi Sato, Katsumi Asada, Hideo Tanaka
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Publication number: 20050219501Abstract: A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.Type: ApplicationFiled: March 31, 2005Publication date: October 6, 2005Applicant: CANON KABUSHIKI KAISHAInventors: Hitoshi Sato, Yoshikazu Miyajima, Yasuhito Sasaki
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Publication number: 20040223133Abstract: A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.Type: ApplicationFiled: April 8, 2004Publication date: November 11, 2004Applicant: Canon Kabushiki KaishaInventors: Yoshikazu Miyajima, Yasuhito Sasaki, Hitoshi Sato
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Publication number: 20040222707Abstract: A plane motor device having a stator unit, a movable unit, and a coil unit at the movable unit and/or the stator unit, in which coil unit a current flows for driving the movable unit. The plane motor device includes a surrounding member surrounding the coil unit, and a cooling channel provided within the surrounding member, for absorbing heat of the coil unit. It is preferable that the surrounding member is divided in the form of modules.Type: ApplicationFiled: April 27, 2004Publication date: November 11, 2004Applicant: Canon Kabushiki KaishaInventors: Hitoshi Sato, Yasuhito Sasaki, Yoshikazu Miyajima