Patents by Inventor Yasumasa Ishihara
Yasumasa Ishihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10081090Abstract: A method of manufacturing an upper electrode of a plasma processing device includes forming a covering layer having plasma resistance on a surface of a main body portion constituting the upper electrode at a side of the processing space; polishing a surface of the covering layer exposed to the processing space; and after the polishing, blasting the surface of the covering layer polished at the polishing.Type: GrantFiled: March 3, 2016Date of Patent: September 25, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Tsuguo Kitajima, Yasumasa Ishihara
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Publication number: 20160184966Abstract: A plasma processing device according to one embodiment comprises a processing vessel, a gas supply unit, a lower electrode and an upper electrode. The processing vessel defines a processing space. The gas supply unit supplies processing gas into the processing space. The lower electrode is provided below the processing space. The upper electrode is provided above the processing space, and a covering layer having plasma-resistant properties is formed on this upper electrode. The surface of this covering layer is polished.Type: ApplicationFiled: March 3, 2016Publication date: June 30, 2016Applicant: TOKYO ELECTRON LIMITEDInventors: Tsuguo KITAJIMA, Yasumasa ISHIHARA
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Publication number: 20140174662Abstract: A plasma processing device according to one embodiment comprises a processing vessel, a gas supply unit, a lower electrode and an upper electrode. The processing vessel defines a processing space. The gas supply unit supplies processing gas into the processing space. The lower electrode is provided below the processing space. The upper electrode is provided above the processing space, and a covering layer having plasma-resistant properties is formed on this upper electrode. The surface of this covering layer is polished.Type: ApplicationFiled: August 9, 2012Publication date: June 26, 2014Applicant: TOKYO ELECTRON LIMITEDInventors: Tsuguo Kitajima, Yasumasa Ishihara
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Publication number: 20090135312Abstract: An image forming method which generates a video signal corresponding to an image forming command based on a video clock signal, modulates a light beam according to the video signal, and scans the modulated light beam along a main scanning direction by means of an oscillation mirror which resonates based on a drive signal, so as to form a latent image in an effective image region of a latent image carrier, the method includes: synchronizing the drive signal with the video clock signal to synchronize a detection signal with the video clock signal, the detection signal being output from a detector which detect the light beam scanned in the main scanning direction in a region away from an effective scan region which corresponds to the effective image region; controlling a resonant frequency of the oscillation mirror based on the detection signal so that the resonant frequency of the oscillation mirror almost coincides with the frequency of the drive signal; and adjusting a position, at which the latent image is wType: ApplicationFiled: December 17, 2008Publication date: May 28, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Yasumasa ISHIHARA, Yujiro NOMURA, Akihiro GOMI, Ken IKUMA
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Patent number: 7480087Abstract: An image forming method which generates a video signal corresponding to an image forming command based on a video clock signal, modulates a light beam according to the video signal, and scans the modulated light beam along a main scanning direction by means of an oscillation mirror which resonates based on a drive signal, so as to form a latent image in an effective image region of a latent image carrier, the method includes: synchronizing the drive signal with the video clock signal to synchronize a detection signal with the vide clock signal, the detection signal being output from a detector which detect the light beam scanned in the main scanning direction in a region away from an effective scan region which corresponds to the effective image region; controlling a resonant frequency of the oscillation mirror based on the detection signal so that the resonant frequency of the oscillation mirror almost coincides with the frequency of the drive signal; and adjusting a position, at which the latent image is wrType: GrantFiled: August 11, 2006Date of Patent: January 20, 2009Assignee: Seiko Epson CorporationInventors: Yasumasa Ishihara, Yujiro Nomura, Akihiro Gomi, Ken Ikuma
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Publication number: 20070070483Abstract: An image forming method which generates a video signal corresponding to an image forming command based on a video clock signal, modulates a light beam according to the video signal, and scans the modulated light beam along a main scanning direction by means of an oscillation mirror which resonates based on a drive signal, so as to form a latent image in an effective image region of a latent image carrier, the method includes: synchronizing the drive signal with the video clock signal to synchronize a detection signal with the vide clock signal, the detection signal being output from a detector which detect the light beam scanned in the main scanning direction in a region away from an effective scan region which corresponds to the effective image region; controlling a resonant frequency of the oscillation mirror based on the detection signal so that the resonant frequency of the oscillation mirror almost coincides with the frequency of the drive signal; and adjusting a position, at which the latent image is wrType: ApplicationFiled: August 11, 2006Publication date: March 29, 2007Applicant: SEIKO EPSON CORPORATIONInventors: Yasumasa Ishihara, Yujiro Nomura, Akihiro Gomi, Ken Ikuma
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Patent number: 5611655Abstract: A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one preliminary vacuum chamber connected to the convey chamber through a loading/unloading port, a plurality of vacuum process chambers connected to the convey chamber through the loading/unloading ports and each having a vacuum process mechanism, a plurality of gate valves for opening/closing the plurality of loading/unloading ports, and a multi-joint arm member, arranged in the convey chamber, for conveying the target object between the convey chamber and the vacuum process chambers, and between the convey chamber and the preliminary chamber. The convey chamber is evacuated through a bearing for a pivot shaft of the multi-joint arm member.Type: GrantFiled: January 4, 1996Date of Patent: March 18, 1997Assignees: Tokyo Electron Limited, Tokyo Electron Yamanashi LimitedInventors: Yoshio Fukasawa, Shozo Hosoda, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara, Minoru Aoyagi, Mahito Kajihara
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Patent number: 4329047Abstract: An optical velocity measuring apparatus applicable to measurement of the velocity of a vehicle relative to the road. A pair of light sensors mounted on the bottom of the vehicle body spaced from each other in a direction of the movement of the vehicle respectively receive rays of light reflected from different spots on the road through an optical system and produce electric signals indicative of the surface conditions of the spots. A time lag from the detection of a particular spot by the forward light sensor until the backward light sensor detects the same spot is measured to determine the velocity of the vehicle. The optical system is comprised of first and second lenses each having a peripheral portion cut away by a plane parallel to the optical axis. The first and second lenses are aligned so that the cut away faces are in contact with each other and that the optical axes are in parallel to and spaced a predetermined distance from each other.Type: GrantFiled: January 23, 1980Date of Patent: May 11, 1982Assignee: Nippon Soken, Inc.Inventors: Tetsuro Kikuchi, Hideaki Sasaya, Yasumasa Ishihara