Patents by Inventor Yasushi Akiyama
Yasushi Akiyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220236560Abstract: Provided is a head-up display having improved properties for heat insulation against external light, without increasing the number of components. Disclosed is a head-up display comprising: a lighting device; a display that is illuminated by the lighting device to emit a display light; and a reflector that reflects the display light. The reflector comprises: a reflective layer formed by layering a plurality of resin films having different refractive indices; an adhesive layer; and a base material to which the reflective layer is bonded via the adhesive layer.Type: ApplicationFiled: June 4, 2020Publication date: July 28, 2022Inventors: Yasushi AKIYAMA, Akira TANAKAJIMA, Kouki SAKAUE
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Publication number: 20160122580Abstract: The present invention relates to a two novel processes, “Dual Coating Process and Single Coating Process,” for forming an array of via's by employing a graphoepitaxy approach, where an array of pillars the surface of the pillars has been modified by the formation of a hydrophobic poly(vinyl aryl) brush at the surface of the pillars. The present invention also relates to a composition comprising a poly(vinyl aryl) hydrophopic polymer brush precursor terminated at one chain end with a reactive functional group, a diblock copolymer comprising an etch resistant hydrophobic block and a highly etchable hydrophilic block, a thermal acid generator and a solvent.Type: ApplicationFiled: October 30, 2014Publication date: May 5, 2016Inventors: SungEun HONG, Naoki MATSUMOTO, Yasushi AKIYAMA, Kazunori KUROSAWA, Shinji MIYAZAKI, Guanyang LIN
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Publication number: 20140233208Abstract: Disclosed is a pointer-type display device having a high degree of design freedom, with which a design can be efficiently illuminated. Said device is provided with a light guide letter board (10), a light guide body (20), and a pointer (30), and a first light source (51). The light guide letter board (10) comprises: a transparent light guide section (11) having a letter plate hole section (111) through which a pointer shaft (41) is inserted; a design display section (12) that displays a design and is formed on the front face of the light guide section (11); a first optically transparent emission section (122a) of the design display section (12) that emits light; and an optical diffusion section (13) provided in a position corresponding to this first optically transparent emission section (122a). Light is emitted from the first optically transparent emission section (122a) by means of light-diffusion that is achieved by this optical diffusion section (13).Type: ApplicationFiled: July 5, 2012Publication date: August 21, 2014Applicant: NIPPON SEIKI CO., LTD.Inventors: Kazunari Hamada, Sadao Yabe, Yasushi Akiyama
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Patent number: 8697336Abstract: The present invention provides a composition for forming a bottom anti-reflective coating, and also provides a photoresist pattern formation method employing that composition. The composition gives a bottom anti-reflective coating used in a lithographic process for manufacturing semiconductor devices, and the coating can be developed with a developing solution for photoresist. The composition contains a solvent, a polymer having a condensed polycyclic aromatic group, and a compound having a maleimide derivative or a maleic anhydride derivative. The composition may further contain a photo acid generator or a crosslinking agent.Type: GrantFiled: December 15, 2011Date of Patent: April 15, 2014Assignee: AZ Electronic Materials USA Corp.Inventors: Shigemasa Nakasugi, Kazuma Yamamoto, Yasushi Akiyama, Shinji Miyazaki, Munirathna Padmanaban, Srinivasan Chakrapani
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Patent number: 8568955Abstract: Disclosed is a composition for forming a top antireflective film, which comprises at least one fluorine-containing compound and a quaternary ammonium compound represented by the formula (1) [wherein at least one of R1, R2, R3, and R4 represents a hydroxyl group or an alkanol group, and the others independently represent a hydrogen or an alkyl group having 1 to 10 carbon atoms; and X? represents a hydroxyl group, a halide ion or a sulfate ion], and optionally a water-soluble polymer, an acid, a surfactant and an aqueous solvent. The composition for forming a top antireflective film can exhibit the same levels of functions as those of conventional top antireflective film-forming compositions when applied in a smaller amount.Type: GrantFiled: December 10, 2008Date of Patent: October 29, 2013Assignee: Electronic Materials USA Corp.Inventors: Yasushi Akiyama, Go Noya, Katsutoshi Kuramoto, Yusuke Takano
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Publication number: 20130157196Abstract: The present invention provides a composition for forming a bottom anti-reflective coating, and also provides a photoresist pattern formation method employing that composition. The composition gives a bottom anti-reflective coating used in a lithographic process for manufacturing semiconductor devices, and the coating can be developed with a developing solution for photoresist. The composition contains a solvent, a polymer having a condensed polycyclic aromatic group, and a compound having a maleimide derivative or a maleic anhydride derivative. The composition may further contain a photo acid generator or a crosslinking agent.Type: ApplicationFiled: December 15, 2011Publication date: June 20, 2013Applicant: AZ ELECTRONIC MATERIALS USA CORP.Inventors: Shigemasa Nakasugi, Kazuma Yamamoto, Yasushi Akiyama, Shinji Miyazaki, Munirathna Padmanaban, Srinivasan Chakrapani
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Patent number: 8043792Abstract: The present invention provides a composition for forming a top anti-reflection coating having such a low refractive index that it can be suitably used in pattern formation with an ArF excimer laser beam, and further the invention also provides a pattern formation method employing that composition. The top anti-reflection coating composition comprises a particular naphthalene compound, a polymer, and a solvent. The composition is used for forming a top anti-reflection coating provided on a photoresist layer. From the photoresist layer, a pattern can be formed by use of light in 160 to 260 nm.Type: GrantFiled: December 21, 2007Date of Patent: October 25, 2011Assignee: AZ Electronic Materials USA Corp.Inventors: Katsutoshi Kuramoto, Masakazu Kobayashi, Yasushi Akiyama
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Publication number: 20100324330Abstract: The composition for preventing development-defects containing (1) an ammonium salt, a tetraalkylammonium salt or a C1 to C4 alkanolamine salt of C4 to C15 perfluoroalkylcarboxylic acid, C4 to C10 perfluoroalkylsulfonic acid and perfluoroadipic acid, or (2) a fluorinated alkyl quaternary ammonium salt of inorganic acid, wherein said surfactant is formed at the equivalent ratio of acid to base of 1:1-1:3 is applied on a chemically amplified photoresist coating on a substrate having a diameter of 8 inches or more. The chemically amplified photoresist coating is baked before and/or after applying the composition for preventing development-defects described above. Then, the baked coating with the development-defect preventing composition coating is exposed to light, post-exposure-baked, and developed.Type: ApplicationFiled: August 10, 2010Publication date: December 23, 2010Inventors: Yasushi Akiyama, Yusuke Takano, Kiyohisa Takahashi, Sung-Eun Hong, Tetsuo Okayasu
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Publication number: 20100286318Abstract: Disclosed is a composition for forming a top antireflective film, which comprises at least one fluorine-containing compound and a quaternary ammonium compound represented by the formula (1) [wherein at least one of R1, R2, R3, and R4 represents a hydroxyl group or an alkanol group, and the others independently represent a hydrogen or an alkyl group having 1 to 10 carbon atoms; and X? represents a hydroxyl group, a halide ion or a sulfate ion], and optionally a water-soluble polymer, an acid, a surfactant and an aqueous solvent. The composition for forming a top antireflective film can exhibit the same levels of functions as those of conventional top antireflective film-forming compositions when applied in a smaller amount.Type: ApplicationFiled: December 10, 2008Publication date: November 11, 2010Inventors: Yasushi Akiyama, Go Noya, Katsutoshi Kuramoto, Yusuke Takano
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Publication number: 20100279235Abstract: The present invention provides a composition for forming a top anti-reflection coating having a low refractive index, realizing a gradual swing curve and giving a small swing ratio. This composition comprises a solvent and an anthracene skeleton-containing polymer having a hydrophilic group. The composition forms an anti-reflection coating on a photoresist film, and can be used in a photolithographic process for forming a pattern by use of light having a wavelength of 160 to 260 nm.Type: ApplicationFiled: December 12, 2008Publication date: November 4, 2010Inventors: Go Noya, Yasushi Akiyama, Yusuke Takano
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Patent number: 7799513Abstract: The composition for preventing development-defects containing (1) an ammonium salt, a tetraalkylammonium salt or a C1 to C4 alkanolamine salt of C4 to C15 perfluoroalkylcarboxylic acid, C4 to C10 perfluoroalkylsulfonic acid and perfluoroadipic acid, or (2) a fluorinated alkyl quaternary ammonium salt of inorganic acid, wherein said surfactant is formed at the equivalent ratio of acid to base of 1:1-1:3 is applied on a chemically amplified photoresist coating on a substrate having a diameter of 8 inches or more. The chemically amplified photoresist coating is baked before and/or after applying the composition for preventing development-defects described above. Then, the baked coating with the development-defect preventing composition coating is exposed to light, post-exposure-baked, and developed.Type: GrantFiled: June 10, 2003Date of Patent: September 21, 2010Assignee: AZ Electronic Materials USA Corp.Inventors: Yasushi Akiyama, Yusuke Takano, Kiyohisa Takahashi, Sung-Eun Hong, Tetsuo Okayasu
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Publication number: 20100081087Abstract: The present invention provides a composition for forming a top anti-reflection coating having such a low refractive index that it can be suitably used in pattern formation with an ArF excimer laser beam, and further the invention also provides a pattern formation method employing that composition. The top anti-reflection coating composition comprises a particular naphthalene compound, a polymer, and a solvent. The composition is used for forming a top anti-reflection coating provided on a photoresist layer. From the photoresist layer, a pattern can be formed by use of light in 160 to 260 nm.Type: ApplicationFiled: December 21, 2007Publication date: April 1, 2010Inventors: Katsutoshi Kuramoto, Masakazu Kobayashi, Yasushi Akiyama
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Publication number: 20100062363Abstract: The present invention provides a composition for forming a top anti-reflection coating and also provides a pattern formation method employing that composition. The composition prevents pattern failures caused by light reflected in the resist layer in the exposure step, and it further avoids troubles caused by residues produced in the etching step. The composition contains a solvent and fine particles having a mean particle size of 1 to 100 nm. In the pattern formation method of the present invention, a top anti-reflection coating is formed from the composition. The composition and the method according to the present invention can be used to form a composite film composed of a resist layer and a top anti-reflection coating.Type: ApplicationFiled: November 15, 2007Publication date: March 11, 2010Inventors: Go Noya, Masakazu Kobayashi, Yasushi Akiyama, Katsutoshi Kuramoto
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Patent number: 7537882Abstract: The object of the present invention is to provide an anti-reflective coating composition having excellent coating properties while maintaining performance as an anti-reflective film. An anti-reflective coating composition comprising at least the following components (A), (B), (C), (D), and (E) and a production method for a pattern using the anti-reflective coating composition, (A) perfluoroalkyl•alkylenesulfonic acid represented by the following formula (1): CnF2n+1(CH2CH2)mSO3H (1) (wherein, n represents an integer from 1 to 20, and m represents an integer from 0 to 20); (B) organic amine; (C) water-soluble polymer; (D) perfluoroalkylethyl group containing compound represented by the following formula (2): CkF2k+1CH2CH2—X—Y (2) (wherein, k represents an integer from 1 to 20, x represents a single bond or a divalent linking group, y represents an anionic group or a nonionic group, and this compound has a structure different from that of the component (A)); and (E) water.Type: GrantFiled: June 29, 2005Date of Patent: May 26, 2009Assignees: Dainippon Ink and Chemicals, Inc., AZ Electronic Materials (Japan) K.K.Inventors: Jirou Matsuo, Kiyofumi Takano, Yusuke Takano, Yasushi Akiyama
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Patent number: 7365115Abstract: An anti-reflective coating film is formed by applying on a chemically amplified photoresist film an anti-reflective coating composition comprising an alkali-soluble fluorine-containing polymer, an acid, an amine and a solvent capable of dissolving these components and having a pH of 7 or less. The formed anti-reflective coating film can serve to prevent multiple reflections within the photoresist film, increase the amount of reduction in thickness of the photoresist film upon development with a developer after exposure, and form a pattern having a rectangular cross-sectional pattern and not having T-top or round top.Type: GrantFiled: June 26, 2003Date of Patent: April 29, 2008Assignee: AZ Electronic Materials USA Corp.Inventors: Yasushi Akiyama, Yusuke Takano
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Publication number: 20070238048Abstract: The object of the present invention is to provide an anti-reflective coating composition having excellent coating properties while maintaining performance as an anti-reflective film. An anti-reflective coating composition comprising at least the following components (A), (B), (C), (D), and (E) and a production method for a pattern using the anti-reflective coating composition, (A) perfluoroalkyl•alkylenesulfonic acid represented by the following formula (1): CnF2n+1(CH2CH2)mSO3H (1) (wherein, n represents an integer from 1 to 20, and m represents an integer from 0 to 20); (B) organic amine; (C) water-soluble polymer; (D) perfluoroalkylethyl group containing compound represented by the following formula (2): CkF2k+1CH2CH2—X—Y (2) (wherein, k represents an integer from 1 to 20, x represents a single bond or a divalent linking group, y represents an anionic group or a nonionic group, and this compound has a structure different from that of the component (A)); and (E) water.Type: ApplicationFiled: June 29, 2005Publication date: October 11, 2007Applicants: DAINIPPON INK AND CHEMICALS, INC., AZ ELECTRONIC MATTERIALS (JAPAN) K.K.Inventors: Jirou Matsuo, Kiyofumi Takano, Yusuke Takano, Yasushi Akiyama
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Publication number: 20050239932Abstract: An anti-reflective coating film is formed by applying on a chemically amplified photoresist film an anti-reflective coating composition comprising an alkali-soluble fluorine-containing polymer, an acid, an amine and a solvent capable of dissolving these components and having a pH of 7 or less. The formed anti-reflective coating film can serve to prevent multiple reflections within the photoresist film, increase the amount of reduction in thickness of the photoresist film upon development with a developer after exposure, and form a pattern having a rectangular cross-sectional pattern and not having T-top or round top.Type: ApplicationFiled: June 26, 2003Publication date: October 27, 2005Inventors: Yasushi Akiyama, Yusuke Takano
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Publication number: 20050221236Abstract: The composition for preventing development-defects containing (1) an ammonium salt, a tetraalkylammonium salt or a C1 to C4 alkanolamine salt of C4 to C15 perfluoroalkylcarboxylic acid, C4 to C10 perfluoroalkylsulfonic acid and perfluoroadipic acid, or (2) a fluorinated alkyl quaternary ammonium salt of inorganic acid, wherein said surfactant is formed at the equivalent ratio of acid to base of 1:1-1:3 is applied on a chemically amplified photoresist coating on a substrate having a diameter of 8 inches or more. The chemically amplified photoresist coating is baked before and/or after applying the composition for preventing development-defects described above. Then, the baked coating with the development-defect preventing composition coating is exposed to light, post-exposure-baked, and developed.Type: ApplicationFiled: June 10, 2003Publication date: October 6, 2005Inventors: Yasushi Akiyama, Yusuke Takano, Kiyohisa Takahashi, Sung-Eun Hong, Tetsuo Okayasu
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Publication number: 20040241133Abstract: Described are a deodorizer agent for a mouth cavity with excellent odor eliminating ability, and a composition, a food composition and a deodorizing composition which contain the deodorizer agent.Type: ApplicationFiled: March 24, 2004Publication date: December 2, 2004Inventors: Yasushi Akiyama, Katsuko Nakajima, Satoko Kawai, Shinichi Matsumura