Abstract: An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen.

Abstract: An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen.

Abstract: A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).

Abstract: A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A two-phase excitation linear motor is provided, having a compact size and a large thrust force simultaneously. Each of two single coils is formed to have an almost rectangular ring-like shape where two sides opposing to each other function as a pair of effective conductors, and the other opposing two sides function as a pair of connecting conductors for connecting between the effective conductors. The connecting conductors are offset at an almost right angle. The two single coils are integrated such that the one effective conductor of the pair of effective conductors of the one single coil is interposed between the pair of effective conductors of the other single coil while the single coils are being combined such that the offset directions of the connecting conductors of the individual single coils are opposite to each other in a direction perpendicular to a traveling direction.

Abstract: A single coil for constituting a compact coil unit for a linear motor is provided. A single coil of a coil unit for a linear motor includes a pair of effective conductors for contributing to generating a thrust force for a moving body of a linear motor, and connecting conductors for connecting between the effective conductors. The connecting conductors are offset from a coil plane which includes the pair of effective conductors, and extend in parallel with the coil plane, and simultaneously a transverse section of the connecting conductors has an approximately trapezoidal shape including parallel sides which are approximately perpendicular to the coil plane, and a tilted side which is opposed to the coil plane, and is tilted toward a direction opposite to the direction of the offset in the extending state.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A single coil for constituting a compact coil unit for a linear motor is provided. A single coil of a coil unit for a linear motor includes a pair of effective conductors for contributing to generating a thrust force for a moving body of a linear motor, and connecting conductors for connecting between the effective conductors. The connecting conductors are offset from a coil plane which includes the pair of effective conductors, and extend in parallel with the coil plane, and simultaneously a transverse section of the connecting conductors has an approximately trapezoidal shape including parallel sides which are approximately perpendicular to the coil plane, and a tilted side which is opposed to the coil plane, and is tilted toward a direction opposite to the direction of the offset in the extending state.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Abstract: A two-phase excitation linear motor is provided, having a compact size and a large thrust force simultaneously. Each of two single coils is formed to have an almost rectangular ring-like shape where two sides opposing to each other function as a pair of effective conductors, and the other opposing two sides function as a pair of connecting conductors for connecting between the effective conductors. The connecting conductors are offset at an almost right angle. The two single coils are integrated such that the one effective conductor of the pair of effective conductors of the one single coil is interposed between the pair of effective conductors of the other single coil while the single coils are being combined such that the offset directions of the connecting conductors of the individual single coils are opposite to each other in a direction perpendicular to a traveling direction.