Patents by Inventor Yohei Sawada
Yohei Sawada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180012735Abstract: A gas supply system includes: a first flow channel connecting a first gas source and a chamber; a second flow channel connecting a second gas source and the first flow channel; a control valve, provided in the second flow channel, configured to control a flow rate of the second gas; an orifice provided downstream of the control valve and at a terminus of the second flow channel; a switching valve, provided at a connection point between the first flow channel and the terminus of the second flow channel, configured to control a supply timing of the second gas; an exhaust mechanism, connected to a flow channel between the control valve and the orifice in the second flow channel, configured to exhaust the second gas; and a controller configured to bring the control valve, the switching valve and the exhaust mechanism into operation.Type: ApplicationFiled: July 10, 2017Publication date: January 11, 2018Applicant: TOKYO ELECTRON LIMITEDInventors: Atsushi SAWACHI, Norihiko AMIKURA, Kouji NISHINO, Yohei SAWADA, Yoshiharu KISHIDA
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Patent number: 9850700Abstract: An exterior wall structure includes first to fourth waterproofing members. Each of the first to fourth waterproofing members includes a fixing portion, a positioning portion, a separating portion, a supporting portion, and first and second seal portions. The positioning portion extends continuously with the fixing portion toward the exterior side. The positioning portion positions an exterior wall material by coming into abutment with an end face of the exterior wall material. The separating portion extends continuously with the positioning portion toward the sash body side so as to be located between the sash body and the exterior wall material. The first seal portion inhibits the entry of water by coming into abutment with the exterior wall material. The second seal portion inhibits the entry of water by coming into abutment with the sash body.Type: GrantFiled: October 14, 2015Date of Patent: December 26, 2017Assignee: NICHIHA CORPORATIONInventor: Yohei Sawada
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Publication number: 20170309326Abstract: A semiconductor device includes a SRAM circuit. The SRAM circuit includes: a memory array having a plurality of memory cells arranged in a matrix; a ground interconnection commonly connected to each of the memory cells; and a first potential control circuit for controlling a potential of the ground interconnection depending on an operation mode. The first potential control circuit includes a first NMOS transistor and a first PMOS transistor connected in parallel to each other between a around node providing a ground potential and the ground interconnection.Type: ApplicationFiled: March 31, 2015Publication date: October 26, 2017Inventors: Yohei SAWADA, Makoto YABUUCHI, Yuichiro ISHII
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Patent number: 9638560Abstract: In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.Type: GrantFiled: June 28, 2011Date of Patent: May 2, 2017Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Nobukazu Ikeda, Yohei Sawada, Tooru Hirai, Kazuyuki Morisaki, Kouji Nishino, Ryousuke Dohi
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Patent number: 9507352Abstract: In a variable orifice type pressure-controlled flow controller that includes a pressure control unit and a variable orifice unit, computes a flow rate of a fluid distributed through an orifice of the variable orifice unit as QP1=KP1 (P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range and performs flow control in the flow control range by changing a set flow rate signal Qs for a flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit, the variable orifice unit includes the orifice opening degree arithmetic and control unit.Type: GrantFiled: April 1, 2013Date of Patent: November 29, 2016Assignee: FUJIKIN INCORPORATEDInventors: Ryousuke Dohi, Kouji Nishino, Yohei Sawada, Nobukazu Ikeda
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Patent number: 9477232Abstract: An apparatus for dividing and supplying gas is provided with a flow rate control device, a plurality of divided flow passages of gas flowing from the flow rate control device, thermal-type mass flow sensors disposed to the divided flow passages, electrically-operated valves disposed on a downstream side of the thermal-type mass flow sensors, controllers that control the electrically-operated valves, and a flow ratio setting calculator that calculates a total flow rate, then calculates flow rates of the divided flow passages, and then inputs the calculated flow rates as set flow rates to each controllers. One of the divided flow passages with the highest set flow rate is put in an uncontrolled state, and opening degree for each of the rest divided flow passages is controlled, and then feedback control of the divided flow rate of each of the divided flow passages is implemented by each of the controllers.Type: GrantFiled: August 29, 2014Date of Patent: October 25, 2016Assignees: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITEDInventors: Eiji Takahashi, Norikazu Sasaki, Atsushi Sawachi, Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino
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Publication number: 20160265270Abstract: An exterior wall structure includes first to fourth waterproofing members. Each of the first to fourth waterproofing members includes a fixing portion, a positioning portion, a separating portion, a supporting portion, and first and second seal portions. The positioning portion extends continuously with the fixing portion toward the exterior side. The positioning portion positions an exterior wall material by coming into abutment with an end face of the exterior wall material. The separating portion extends continuously with the positioning portion toward the sash body side so as to be located between the sash body and the exterior wall material. The first seal portion inhibits the entry of water by coming into abutment with the exterior wall material. The second seal portion inhibits the entry of water by coming into abutment with the sash body.Type: ApplicationFiled: October 14, 2015Publication date: September 15, 2016Applicant: NICHIHA CORPORATIONInventor: Yohei SAWADA
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Patent number: 9261884Abstract: A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control comType: GrantFiled: February 27, 2013Date of Patent: February 16, 2016Assignee: FUJIKIN INCORPORATEDInventors: Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino
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Patent number: 9163969Abstract: A flow rate measurement device includes a branched pipe passage having an inlet side end portion detachably joined in a branched manner to an upstream portion of on-off valve V0 provided on an outlet end portion of a gas supply line, and an outlet side end portion of the branched pipe passage joined to a gas flow-out side, an on-off valve V provided on the outlet side of the branched pipe passage, a pressure detector and a temperature detector that detect gas pressure and temperature on the upstream side of the on-off valve V, and an arithmetic operation control device receiving detection signals as input from the pressure detector and the temperature detector, and which arithmetically calculates gas flow rate of gas flowing in the branched pipe passage, and the flow rate measurement device is detachably joined in a branched manner to the upstream portion of the on-off valve V0.Type: GrantFiled: July 8, 2013Date of Patent: October 20, 2015Assignee: FUJIKIN INCORPORATEDInventors: Yohei Sawada, Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi
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Patent number: 9038663Abstract: To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.Type: GrantFiled: November 17, 2011Date of Patent: May 26, 2015Assignee: FUJIKIN INCORPORATEDInventors: Ryousuke Dohi, Atsuo Tomita, Kouji Nishino, Yohei Sawada, Nobukazu Ikeda
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Publication number: 20150114499Abstract: In a variable orifice type pressure-controlled flow controller that includes a pressure control unit and a variable orifice unit, computes a flow rate of a fluid distributed through an orifice of the variable orifice unit as QP1=KP1 (P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range and performs flow control in the flow control range by changing a set flow rate signal Qs for a flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit, the variable orifice unit includes the orifice opening degree arithmetic and control unit.Type: ApplicationFiled: April 1, 2013Publication date: April 30, 2015Inventors: Ryousuke Dohi, Kouji Nishino, Yohei Sawada, Nobukazu Ikeda
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Publication number: 20150059859Abstract: An apparatus for dividing and supplying gas is provided with a flow rate control device, a plurality of divided flow passages of gas flowing from the flow rate control device, thermal-type mass flow sensors disposed to the divided flow passages, electrically-operated valves disposed on a downstream side of the thermal-type mass flow sensors, controllers that control the electrically-operated valves, and a flow ratio setting calculator that calculates a total flow rate, then calculates flow rates of the divided flow passages, and then inputs the calculated flow rates as set flow rates to each controllers. One of the divided flow passages with the highest set flow rate is put in an uncontrolled state, and opening degree for each of the rest divided flow passages is controlled, and then feedback control of the divided flow rate of each of the divided flow passages is implemented by each of the controllers.Type: ApplicationFiled: August 29, 2014Publication date: March 5, 2015Inventors: Eiji Takahashi, Norikazu Sasaki, Atsushi Sawachi, Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino
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Patent number: 8833730Abstract: A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.Type: GrantFiled: November 5, 2010Date of Patent: September 16, 2014Assignee: Fujikin IncorporatedInventors: Yohei Sawada, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Patent number: 8635812Abstract: The present invention provides a throating that enables temporary affixing and facilitates construction work. The throating of the present invention includes a rear plate part that is fixed to a building frame, a throating plate part bent obliquely downward and frontward at a lower end of the rear plate part, and a front plate part bent downward from a front end of the throating plate part. The throating has an adhesive layer on each of a front face and a rear face of the rear plate part, and has a release paper on the surface of the adhesive layers. A top end portion of the rear plate part is covered by an adhesive layer and/or release paper. Preferably, the release paper has a cutting line.Type: GrantFiled: February 2, 2011Date of Patent: January 28, 2014Assignee: Nichiha CorporationInventors: Yohei Sawada, Yoshinori Hibino
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Publication number: 20140013838Abstract: A flow rate measurement device includes a branched pipe passage having an inlet side end portion detachably joined in a branched manner to an upstream portion of on-off valve V0 provided on an outlet end portion of a gas supply line, and an outlet side end portion of the branched pipe passage joined to a gas flow-out side, an on-off valve V provided on the outlet side of the branched pipe passage, a pressure detector and a temperature detector that detect gas pressure and temperature on the upstream side of the on-off valve V, and an arithmetic operation control device receiving detection signals as input from the pressure detector and the temperature detector, and which arithmetically calculates gas flow rate of gas flowing in the branched pipe passage, and the flow rate measurement device is detachably joined in a branched manner to the upstream portion of the on-off valve V0.Type: ApplicationFiled: July 8, 2013Publication date: January 16, 2014Applicant: FUJIKIN INCORPORATEDInventors: Yohei Sawada, Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi
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Publication number: 20130319551Abstract: To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.Type: ApplicationFiled: November 17, 2011Publication date: December 5, 2013Applicant: FUJIKIN INCORPORATEDInventors: Ryousuke Dohi, Atsuo Tomita, Kouji Nishino, Yohei Sawada, Nobukazu Ikeda
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Patent number: 8561966Abstract: In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.Type: GrantFiled: August 21, 2007Date of Patent: October 22, 2013Assignee: Fujikin IncorporatedInventors: Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Yohei Sawada
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Patent number: 8555920Abstract: A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.Type: GrantFiled: June 13, 2007Date of Patent: October 15, 2013Assignee: Fujikin IncorporatedInventors: Kaoru Hirata, Yohei Sawada, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20130186471Abstract: In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.Type: ApplicationFiled: June 28, 2011Publication date: July 25, 2013Applicant: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Nobukazu Ikeda, Yohei Sawada, Tooru Hirai, Kazuyuki Morisaki, Kouji Nishino, Ryousuke Dohi
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Publication number: 20120223265Abstract: A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.Type: ApplicationFiled: November 5, 2010Publication date: September 6, 2012Applicant: FUJIKIN INCORPORATEDInventors: Yohei Sawada, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda