Patents by Inventor Yohei SYUHAMA

Yohei SYUHAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
    Publication number: 20130285164
    Abstract: According to one embodiment, a MEMS device comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face the first electrode, and vertically movable, a second anchor portion formed on the substrate and configured to support the second electrode, and a second spring portion configured to connect the second electrode and the second anchor portion. The second spring portion is continuously formed from an upper surface of the second electrode to an upper surface of the second anchor portion, and has a flat lower surface.
    Type: Application
    Filed: March 15, 2013
    Publication date: October 31, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomohiro SAITO, Yohei SYUHAMA