Abstract: An inspection system includes circuitry configured to determine whether a predetermined pattern is present in a master image of an inspection target object; acquire an inspection target image of the inspection target object from an image captured by an image capturing device; compare the master image of the inspection target object with the inspection target image, to inspect the inspection target object; and switch a threshold value used in comparing the master image with the inspection target image of the inspection target object depending on a determination result of determining whether the predetermined pattern is present in the master image of the inspection target object.

Abstract: A spectral property acquisition apparatus includes: a first conveying device to convey an object in predetermined conveying direction; a color data acquisition device including a plurality of spectroscopic sensors in the conveying direction, the plurality of spectroscopic sensors receive light emitted and reflected by the object to acquire color data on the object; a second conveying device to convey the color data acquisition device in a direction orthogonal to the conveying direction; and circuitry to estimate a spectral property of the object based on the color data. The circuitry controls the first conveying device so as to generate predetermined tension for the object in a color data acquisition area in which the color data on the object is acquired.

Abstract: A spectral characteristic acquisition device according to one aspect of the disclosed technique includes: a color data acquirer comprising a plurality of spectral sensors receiving light reflected from an object irradiated with light and acquiring color data of the object; circuitry configured to estimate a spectral characteristic of the object on a basis of the color data and calibrate the spectral characteristic calculator on a basis of the color data obtained from a calibration color mark having a color mark of a known spectral characteristic; a first conveyer configured to convey the object in a predetermined conveyance direction and conveying the color data acquirer in a direction intersecting the predetermined conveyance direction; and a second conveyer configured to convey the calibration color mark in the predetermined conveyance direction.

Abstract: An inspection system includes circuitry configured to determine whether a predetermined pattern is present in a master image of an inspection target object; acquire an inspection target image of the inspection target object from an image captured by an image capturing device; compare the master image of the inspection target object with the inspection target image, to inspect the inspection target object; and switch a threshold value used in comparing the master image with the inspection target image of the inspection target object depending on a determination result of determining whether the predetermined pattern is present in the master image of the inspection target object.

Abstract: A spectral property acquisition apparatus includes: a first conveying device to convey an object in predetermined conveying direction; a color data acquisition device including a plurality of spectroscopic sensors in the conveying direction, the plurality of spectroscopic sensors receive light emitted and reflected by the object to acquire color data on the object; a second conveying device to convey the color data acquisition device in a direction orthogonal to the conveying direction; and circuitry to estimate a spectral property of the object based on the color data. The circuitry controls the first conveying device so as to generate predetermined tension for the object in a color data acquisition area in which the color data on the object is acquired.

Abstract: A spectral characteristic obtaining apparatus includes a color information obtaining unit including a plurality of spectral sensors aligned in an array direction, the spectral sensors being configured to receive light reflected from an object so as to obtain first color information of the object; a spectral characteristic calculating unit configured to estimate a spectral characteristic of the object based on the first color information by using a preset transformation matrix; a calibration color index configured to include a region of a color with a known spectral characteristic; and a transformation matrix calibrating unit configured to calibrate the transformation matrix by using second color information obtained from the calibration color index, wherein the spectral sensors are configured to obtain the second color information from the same region included in the calibration color index, while relative positions thereof with respect to the calibration color index are changed at a time of calibration.

Abstract: A spectral characteristic acquiring apparatus includes a color data acquiring unit including a plurality of spectral sensors configured to receive reflected light from an object that has been irradiated with light to acquire color data of the object, a spectral characteristic calculating unit configured to estimate spectral characteristics of the object based on the acquired color data of the object using a preset transformation matrix, a first conveying unit configured to convey the object in a predetermined conveying direction, and a second conveying unit configured to convey the color data acquiring unit in a direction intersecting the predetermined conveying direction. The plurality of spectral sensors are arrayed in the predetermined conveying direction.

Abstract: A spectral characteristic acquisition device according to one aspect of the disclosed technique includes: a color data acquirer comprising a plurality of spectral sensors receiving light reflected from an object irradiated with light and acquiring color data of the object; circuitry configured to estimate a spectral characteristic of the object on a basis of the color data and calibrate the spectral characteristic calculator on a basis of the color data obtained from a calibration color mark having a color mark of a known spectral characteristic; a first conveyer configured to convey the object in a predetermined conveyance direction and conveying the color data acquirer in a direction intersecting the predetermined conveyance direction; and a second conveyer configured to convey the calibration color mark in the predetermined conveyance direction.

Abstract: A spectral characteristic acquiring apparatus includes a color data acquiring unit including a plurality of spectral sensors configured to receive reflected light from an object that has been irradiated with light to acquire color data of the object, a spectral characteristic calculating unit configured to estimate spectral characteristics of the object based on the acquired color data of the object using a preset transformation matrix, a first conveying unit configured to convey the object in a predetermined conveying direction, and a second conveying unit configured to convey the color data acquiring unit in a direction intersecting the predetermined conveying direction. The plurality of spectral sensors are arrayed in the predetermined conveying direction.

Abstract: A spectral characteristic obtaining apparatus includes a color information obtaining unit including a plurality of spectral sensors aligned in an array direction, the spectral sensors being configured to receive light reflected from an object so as to obtain first color information of the object; a spectral characteristic calculating unit configured to estimate a spectral characteristic of the object based on the first color information by using a preset transformation matrix; a calibration color index configured to include a region of a color with a known spectral characteristic; and a transformation matrix calibrating unit configured to calibrate the transformation matrix by using second color information obtained from the calibration color index, wherein the spectral sensors are configured to obtain the second color information from the same region included in the calibration color index, while relative positions thereof with respect to the calibration color index are changed at a time of calibration.

Abstract: A microelectronic interconnect element can include a plurality of first metal lines and a plurality of second metal lines interleaved with the first metal lines. Each of the first and second metal lines has a surface extending within the same reference plane. The first metal lines have surfaces above the reference plane and remote therefrom and the second metal lines have surfaces below the reference plane and remote therefrom. A dielectric layer can separate a metal line of the first metal lines from an adjacent metal line of the second metal lines.

Abstract: A spectral characteristic acquisition device includes a member configured to have a plurality of openings arrayed in a predetermined direction, each of the plurality of openings inclined with respect to the predetermined direction, the plurality of openings being configured to pass light beams from a plurality of positions on an object therethrough, a spectrally dispersing part configured to spectrally disperse the light beams having passed through the plurality of openings in a direction orthogonal to the predetermined direction, and a plurality of one-dimensional image capturing parts provided at a predetermined interval in a plurality of lines and configured to be irradiated with the light beams having been spectrally dispersed by the spectrally dispersing part, a plurality of pixels of the plurality of one-dimensional image capturing parts being arrayed in a direction parallel to the predetermined direction.

Abstract: A microelectronic interconnect element can include a plurality of first metal lines and a plurality of second metal lines interleaved with the first metal lines. Each of the first and second metal lines has a surface extending within the same reference plane. The first metal lines have surfaces above the reference plane and remote therefrom and the second metal lines have surfaces below the reference plane and remote therefrom. A dielectric layer can separate a metal line of the first metal lines from an adjacent metal line of the second metal lines.

Abstract: A microelectronic interconnect element can include a plurality of first metal lines and a plurality of second metal lines interleaved with the first metal lines. Each of the first and second metal lines has a surface extending within the same reference plane. The first metal lines have surfaces above the reference plane and remote therefrom and the second metal lines have surfaces below the reference plane and remote therefrom. A dielectric layer can separate a metal line of the first metal lines from an adjacent metal line of the second metal lines.

Abstract: A spectral characteristic acquisition device includes a light irradiation part configured to irradiate an object with light, a diffraction part configured to diffract light reflected from the object to provide diffracted light, a light-receiving part configured to receive the diffracted light and output a signal based on an amount of the diffracted light, a calibration color index configured to include a color with a known spectral characteristic, and an operation part configured to calculate a spectral characteristic of the object from a signal output from the light-receiving part by using a predetermined transformation matrix and calibrate the transformation matrix by using the calibration color index.

Abstract: A spectral characteristic acquisition apparatus includes a light emitting part configured to emit light onto an object, a light dividing part configured to divide the light reflected from the object into multiple light beams by multiple aperture parts of the light dividing part, a dispersing part configured to form multiple diffraction images corresponding to the aperture parts by spectrally dispersing the light beams, a light receiving part including an array of spectral sensors that receive the diffraction images at substantially the same position on their respective light receiving surfaces and convert the received diffraction images into electrical signals, and an operation part configured to compute a spectral characteristic of the object based on the electrical signals.

Abstract: A spectral characteristic acquisition device includes a light irradiation part configured to irradiate an object with light, a diffraction part configured to diffract light reflected from the object to provide diffracted light, a light-receiving part configured to receive the diffracted light and output a signal based on an amount of the diffracted light, a calibration color index configured to include a color with a known spectral characteristic, and an operation part configured to calculate a spectral characteristic of the object from a signal output from the light-receiving part by using a predetermined transformation matrix and calibrate the transformation matrix by using the calibration color index.

Abstract: A microelectronic interconnect element can include a plurality of first metal lines and a plurality of second metal lines interleaved with the first metal lines. Each of the first and second metal lines has a surface extending within the same reference plane. The first metal lines have surfaces above the reference plane and remote therefrom and the second metal lines have surfaces below the reference plane and remote therefrom. A dielectric layer can separate a metal line of the first metal lines from an adjacent metal line of the second metal lines.

Abstract: A spectrometer includes a light source to project a light beam to a target object, an optical element including a plurality of apertures through which the light beam reflected by the target object transmits, a diffraction element to form diffracted images from a plurality of light beams having transmitted through the optical element, and a light receiving element to receive the diffracted images formed by the diffraction element and including an optical shield to block a diffracted image other than a certain-order diffracted image.

Abstract: A spectral characteristic acquisition apparatus includes a light emitting part configured to emit light onto an object, a light dividing part configured to divide the light reflected from the object into multiple light beams by multiple aperture parts of the light dividing part, a dispersing part configured to form multiple diffraction images corresponding to the aperture parts by spectrally dispersing the light beams, a light receiving part including an array of spectral sensors that receive the diffraction images at substantially the same position on their respective light receiving surfaces and convert the received diffraction images into electrical signals, and an operation part configured to compute a spectral characteristic of the object based on the electrical signals.