Abstract: A method of physical vapor deposition includes applying a first radio frequency signal having a first phase to a cathode in a physical vapor deposition apparatus, wherein the cathode includes a sputtering target, applying a second radio frequency signal having a second phase to a chuck in the physical vapor deposition apparatus, wherein the chuck supports a substrate, and wherein a difference between the first and second phases creates a positive self bias direct current voltage on the substrate, and depositing a material from the sputtering target onto the substrate.

Abstract: A method of physical vapor deposition includes applying a radio frequency signal to a cathode in a physical vapor deposition apparatus, wherein the cathode includes a sputtering target, electrically connecting a chuck in the physical vapor deposition apparatus to an impedance matching network, wherein the chuck supports a substrate, and wherein the impedance matching network includes at least one capacitor, and depositing material from the sputtering target onto the substrate.

Abstract: An optically powered and optically data-transmitting wireless intraocular pressure sensor device for detecting excessive intraocular pressure above a predetermined threshold pressure, comprising a pressure switch that is sized and configured to be placed in an eye, wherein said pressure switch is activated when the intraocular pressure is higher than the predetermined threshold pressure. In one embodiment, the pressure sensor device is a micro electromechanical system.

Abstract: An implantable intraocular pressure sensor device for detecting excessive intraocular pressure above a predetermined threshold pressure is disclosed. The device includes a pressure switch that is sized and configured to be placed in an eye, wherein said pressure switch is activated when the intraocular pressure is higher than the predetermined threshold pressure. The device is optically powered and transmits data wirelessly using optical energy. In one embodiment, the pressure sensor device is a micro electromechanical system.

Abstract: An optically powered and optically data-transmitting wireless intraocular pressure sensor device for detecting excessive intraocular pressure above a predetermined threshold pressure, comprising a pressure switch that is sized and configured to be placed in an eye, wherein said pressure switch is activated when the intraocular pressure is higher than the predetermined threshold pressure. In one embodiment, the pressure sensor device is a micro electromechanical system.