Patents by Inventor Yoshiaki Kito

Yoshiaki Kito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190177105
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Application
    Filed: February 14, 2019
    Publication date: June 13, 2019
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki KITO, Masaki KATO, Kei NARA, Masakazu HORI
  • Publication number: 20190148404
    Abstract: A nonvolatile semiconductor memory device that have a new structure are provided, in which memory cells are laminated in a three dimensional state so that the chip area may be reduced. The nonvolatile semiconductor memory device of the present invention is a nonvolatile semiconductor memory device that has a plurality of the memory strings, in which a plurality of electrically programmable memory cells is connected in series. The memory strings comprise a pillar shaped semiconductor; a first insulation film formed around the pillar shaped semiconductor; a charge storage layer formed around the first insulation film; the second insulation film formed around the charge storage layer; and first or nth electrodes formed around the second insulation film (n is natural number more than 1). The first or nth electrodes of the memory strings and the other first or nth electrodes of the memory strings are respectively the first or nth conductor layers that are spread in a two dimensional state.
    Type: Application
    Filed: January 11, 2019
    Publication date: May 16, 2019
    Applicant: Toshiba Memory Corporation
    Inventors: Masaru KITO, Hideaki Aochi, Ryota Katsumata, Akihiro Nitayama, Masaru Kidoh, Hiroyasu Tanaka, Yoshiaki Fukuzumi, Yasuyuki Matsuoka, Mitsuru Sato
  • Publication number: 20190135302
    Abstract: A travel control apparatus including a driving level switching portion switching to a first driving automation level involving a driver responsibility to monitor surroundings or a second driving automation level not involving the driver responsibility to monitor the surroundings, a distance measurement device measuring an inter-vehicle distance to a forward vehicle, and a microprocessor. The microprocessor performs controlling an equipment according to the inter-vehicle distance so as to follow the forward vehicle, controlling the equipment so that the self-driving vehicle starts when the inter-vehicle distance increases up to a predetermined value, and determining a first predetermined value as the predetermined value when the driving automation level is switched to the first driving automation level and a second predetermined value larger than the first predetermined value as the predetermined value when the driving automation level is switched to the second driving automation level.
    Type: Application
    Filed: October 30, 2018
    Publication date: May 9, 2019
    Inventors: Takayuki Kishi, Toshiyuki Mizuno, Akira Kito, Yoshiaki Konishi
  • Publication number: 20190135280
    Abstract: A vehicle control apparatus including a surrounding circumstances detector detecting surrounding circumstances of a self-driving vehicle and an electric control unit including a microprocessor configured to perform generating an action plan of the self-driving vehicle based on the surrounding circumstances and controlling the engine and the transmission so that the self-driving vehicle travels by self-driving in accordance with the action plan. The generating includes generating a first action plan and a second action plan, the first action plan including target position data of the self-driving vehicle, the second action plan including an acceleration instruction to a target vehicle speed not including the target position data, and the controlling includes controlling the engine and the transmission, so that the self-driving vehicle accelerates to the target vehicle speed at a target torque minimizing a fuel consumption quantity per unit travel distance when the second action plan is generated.
    Type: Application
    Filed: October 30, 2018
    Publication date: May 9, 2019
    Inventors: Takayuki Kishi, Yoshiaki Konishi, Toshiyuki Mizuno, Akira Kito
  • Publication number: 20190113741
    Abstract: An exposure device that draws a pattern on a substrate by shining a beam from a light source device on substrate and scanning the beam in a main scanning direction while varying the intensity of beam according to pattern information, including: a scanning unit having a beam scanning unit that includes a polygonal mirror whereby the beam is oriented to scan the beam, and light detector for photoelectric detection of reflected light generated when beam is shined on substrate; an electro-optical element for controlling the beam's intensity modulation according to pattern information such that at least part of second pattern to be newly drawn is drawn on top of at least part of first pattern formed on substrate; and a measurement unit measuring relative positional relationship between the first and second pattern on the basis of a detection signal output by the detector while second pattern is drawn on substrate.
    Type: Application
    Filed: March 28, 2017
    Publication date: April 18, 2019
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki KITO, Masakazu HORI, Yosuke HAYASHIDA, Masaki KATO
  • Patent number: 10246287
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: April 2, 2019
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Masaki Kato, Kei Nara, Masakazu Hori
  • Publication number: 20180308770
    Abstract: To improve the throughput of substrate bonding. A substrate bonding apparatus that bonds first and second substrates so that contact regions in which the first and second substrates contact are formed in parts of the first and second substrates and the contact regions enlarge from the parts, the apparatus including: a detecting unit detecting information about the contact regions; and a determining unit determining that the first and second substrates can be carried out based on the information detected at the detecting unit. In the substrate bonding apparatus, the information may be information, a value of which changes according to progress of enlargement of the contact regions, and the determining unit may determine that the first and second substrates can be carried out if the value becomes constant or if a rate of changes in the value becomes lower than a predetermined value.
    Type: Application
    Filed: June 27, 2018
    Publication date: October 25, 2018
    Applicant: NIKON CORPORATION
    Inventors: Isao SUGAYA, Eiji ARIIZUMI, Yoshiaki KITO, Mikio USHIJIMA, Masanori ARAMATA, Naoto KIRIBE, Hiroshi SHIRASU, Hajime MITSUISHI, Minoru FUKUDA, Masaki TSUNODA
  • Publication number: 20170253451
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Application
    Filed: September 3, 2015
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki KITO, Masaki KATO, Kei NARA, Masakazu HORI
  • Patent number: 9539800
    Abstract: Substrates are aligned and then bonded to each other. A substrate bonding apparatus includes a deformer that deforms at least a first one of two substrates that are to be bonded to each other in order to correct misalignment between the two substrates, a holder that holds the deformed first substrate in the deformed state achieved by the deformer, a transporter that transports the holder from a position at which the deformed first substrate is held by the holder while the first substrate remains deformed, and a bonder that bonds the first substrate that has been transported by the transporter to the second substrate.
    Type: Grant
    Filed: October 25, 2013
    Date of Patent: January 10, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Hiroshi Shirasu, Masahiro Yoshihashi, Daisuke Yuki, Kazuhiro Suzuki, Isao Sugaya
  • Patent number: 8994957
    Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.
    Type: Grant
    Filed: August 22, 2013
    Date of Patent: March 31, 2015
    Assignee: Nikon Corporation
    Inventors: Yoshiaki Kito, Masanori Arai, Tatsuo Fukui
  • Publication number: 20140072774
    Abstract: Substrates are aligned and then bonded to each other. A substrate bonding apparatus includes a deformer that deforms at least a first one of two substrates that are to be bonded to each other in order to correct misalignment between the two substrates, a holder that holds the deformed first substrate in the deformed state achieved by the deformer, a transporter that transports the holder from a position at which the deformed first substrate is held by the holder while the first substrate remains deformed, and a bonder that bonds the first substrate that has been transported by the transporter to the second substrate.
    Type: Application
    Filed: October 25, 2013
    Publication date: March 13, 2014
    Inventors: Yoshiaki KITO, Hiroshi Shirasu, Masahiro Yoshihashi, Daisuke Yuki, Kazuhiro Suzuki, Isao Sugaya
  • Publication number: 20140022560
    Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.
    Type: Application
    Filed: August 22, 2013
    Publication date: January 23, 2014
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki KITO, Masanori ARAI, Tatsuo FUKUI
  • Patent number: 8547559
    Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: October 1, 2013
    Assignee: Nikon Corporation
    Inventors: Yoshiaki Kito, Masanori Arai, Tatsuo Fukui
  • Publication number: 20130033712
    Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.
    Type: Application
    Filed: August 7, 2012
    Publication date: February 7, 2013
    Inventors: Yoshiaki Kito, Masanori Arai, Tatsuo Fukui
  • Patent number: 8100482
    Abstract: A brake hydraulic pressure control apparatus for a vehicle includes anti-skid control means for executing an anti-skid control including a pressure reducing control and a pressure increasing control for one of front wheels at which an anti-skid control start condition is established, yaw moment control means for executing a yaw moment control, while the anti-skid control has been executed only for a first front wheel, for a second front wheel, wheel cylinder pressure estimated value calculating means, pressure difference estimated value calculating means, pressure increasing control means, and the pressure difference estimated value calculating means including pressure difference at specific time calculating means for calculating a pressure difference estimated value at specific time on the basis of a pressure difference estimated value at the first front wheel and a wheel cylinder pressure difference between the wheel cylinder pressure estimated values at the second front wheel and the first front wheel.
    Type: Grant
    Filed: June 1, 2007
    Date of Patent: January 24, 2012
    Assignee: Advics Co., Ltd.
    Inventors: Yoshiaki Kito, Katsuo Obai, Masato Terasaka
  • Patent number: 7857399
    Abstract: An anti-skid control apparatus controls the value of electric current, which is being applied to the first solenoid valve and equal to or greater than the predetermined electric current value, to a value of electric current corresponding to the pressure difference between the master cylinder pressure and the wheel cylinder pressure at a time point where the pressure-increasing control is started; and changes the value of electric current in a direction to be reduced for a first period of time during the pressure-increasing control as the estimated amount of the wheel cylinder pressure reduced by the pressure-reducing control is increased, when the estimated amount of the wheel cylinder pressure reduced by the pressure-reducing control is equal to or greater than a predetermined value.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: December 28, 2010
    Assignee: Advics Co., Ltd.
    Inventors: Yoshiaki Kito, Katsuo Obai
  • Patent number: 7699411
    Abstract: An ABS control apparatus employs a normally-open linear solenoid valve as a pressure-increasing valve, and repeatedly performs ABS control composed of pressure-reducing control and linear pressure-increasing control. This apparatus determines an initial value Pw0 of an estimated wheel cylinder pressure value Pw in consideration of brake operation time before start of ABS control Tstp and vehicle body deceleration at the start of a first-time ABS control, and then determines the estimated wheel cylinder pressure value Pw during the ABS control on the basis of the value Pw0 and the pressure-reducing characteristic of a pressure-reducing valve. This apparatus determines instruction current supplied to the pressure-increasing valve during the linear pressure-increasing control, while using an estimated differential pressure Pdiff (=(Pw0?Pw)+Pup1+Pup2), wherein Pup1 and Pup2 are set in accordance with the time Tstp and additional brake operation during the ABS control, respectively.
    Type: Grant
    Filed: September 26, 2006
    Date of Patent: April 20, 2010
    Assignee: Advics Co., Ltd.
    Inventors: Toru Nakaura, Masato Terasaka, Yoshiaki Kito
  • Publication number: 20080001475
    Abstract: An anti-skid control apparatus includes: electric current controlling means for controlling the value of electric current, which is being applied to the first solenoid valve and equal to or greater than the predetermined electric current value, to a value of electric current corresponding to the pressure difference between the master cylinder pressure and the wheel cylinder pressure at a time point where the pressure-increasing control is started; and changing means for changing the value of electric current controlled by the electric current controlling means in a direction to be reduced for a first period of time during the pressure-increasing control as the estimated amount of the wheel cylinder pressure reduced by the pressure-reducing control is increased, when the estimated amount of the wheel cylinder pressure reduced by the pressure-reducing control is equal to or greater than a predetermined value.
    Type: Application
    Filed: June 18, 2007
    Publication date: January 3, 2008
    Inventors: Yoshiaki Kito, Katsuo Obai
  • Publication number: 20070290552
    Abstract: A brake hydraulic pressure control apparatus for a vehicle includes anti-skid control means for executing an anti-skid control including a pressure reducing control and a pressure increasing control for one of front wheels at which an anti-skid control start condition is established, yaw moment control means for executing a yaw moment control, while the anti-skid control has been executed only for a first front wheel, for a second front wheel, wheel cylinder pressure estimated value calculating means, pressure difference estimated value calculating means, pressure increasing control means, and the pressure difference estimated value calculating means including pressure difference at specific time calculating means for calculating a pressure difference estimated value at specific time on the basis of a pressure difference estimated value at the first front wheel and a wheel cylinder pressure difference between the wheel cylinder pressure estimated values at the second front wheel and the first front wheel.
    Type: Application
    Filed: June 1, 2007
    Publication date: December 20, 2007
    Inventors: Yoshiaki Kito, Katsuo Obai, Masato Terasaka
  • Publication number: 20070069577
    Abstract: An ABS control apparatus employs a normally-open linear solenoid valve as a pressure-increasing valve, and repeatedly performs ABS control composed of pressure-reducing control and linear pressure-increasing control. This apparatus determines an initial value Pw0 of an estimated wheel cylinder pressure value Pw in consideration of brake operation time before start of ABS control Tstp and vehicle body deceleration at the start of a first-time ABS control, and then determines the estimated wheel cylinder pressure value Pw during the ABS control on the basis of the value Pw0 and the pressure-reducing characteristic of a pressure-reducing valve. This apparatus determines instruction current supplied to the pressure-increasing valve during the linear pressure-increasing control, while using an estimated differential pressure Pdiff (=(Pw0?Pw)+Pup1+Pup2), wherein Pup1 and Pup2 are set in accordance with the time Tstp and additional brake operation during the ABS control, respectively.
    Type: Application
    Filed: September 26, 2006
    Publication date: March 29, 2007
    Inventors: Toru Nakaura, Masato Terasaka, Yoshiaki Kito