Abstract: An edge exposure apparatus performing an exposure process on an edge portion of a wafer having a coating film (resist film) formed thereon includes position detection means for detecting positional data of an outer edge of a wafer held by a spin chuck, an exposure portion for performing an exposure process on the edge portion of the wafer, a development nozzle supplying a developer to the exposed region, and alignment means for horizontally moving the spin chuck. An exposure process is performed by the exposure portion on the edge portion of the wafer held by the spin chuck while the alignment means is controlled, based on the positional data of the outer edge of the wafer which is detected by the position detection means, such that the positional relation between the outer edge of the wafer and the exposure portion is kept constant.

Abstract: A pattern forming method includes forming a resist film or sequentially forming a resist film and a protection film in this order on a surface of a substrate; then, performing immersion light exposure that includes immersing the resist film or the resist film and the protection film formed on the substrate in a liquid during light exposure, thereby forming a predetermined light exposure pattern on the resist film; and performing a development process of the light exposure pattern by use of a development liquid, thereby forming a predetermined resist pattern. After the immersion light exposure and before the development process, the method further includes performing a hydrophilic process of turning a surface of the resist film or the protection film serving as a substrate surface into a hydrophilic state to allow the substrate surface to be wetted with the development liquid overall.

Abstract: An apparatus for assembling a head unit has a carriage, a recognition apparatus for image-wise recognizing a position of each of liquid droplet ejection heads, a moving apparatus for moving the carriage, a correction apparatus for slightly moving head holding members, a fixing apparatus for fixing each of the head holding members, and a controller. The controller drives the moving apparatus based on a result of recognition by the recognition apparatus, and then positions each of the liquid droplet ejection heads to the carriage, and then each of the liquid droplet ejection heads is fixed to the head holding members.

Abstract: A circulation system for a high refractive index liquid includes a first collecting section configured to collect a high refractive index liquid used in an immersion light exposure section; a first supply section configured to supply the high refractive index liquid collected in the first collecting section to a cleaning section as a cleaning liquid; a second collecting section configured to collect the high refractive index liquid used in the cleaning section; and a second supply section configured to supply the high refractive index liquid collected in the second collecting section to the immersion light exposure section, wherein the high refractive index liquid is circulated between the immersion light exposure section and the cleaning section.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: A method of manufacturing a device includes introducing each color of material into a plurality of liquid droplet ejection heads and scanning the plurality of liquid droplet ejection heads relative to a substrate through a head unit to selectively eject the material, wherein the head unit includes a carriage with two members recognized for alignment, each member being disposed in an object set in position and having formed therein a mark for image-wise recognition, each member comprising a member main body formed substantially in a columnar shape and having a mirror-finished front end surface, wherein the marks are formed into a depressed shape in a substantially central part of the front end surface of each member main body and the marks are disposed at a distance from each other, and the plurality of liquid droplet ejection heads mounted on the carriage.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: A thermal transfer recording medium include a support; and a heat-sensitive transfer layer on the support, and wherein the heat-sensitive transfer layer includes: a resin made from monomer which includes a glycidyl ester of an unsaturated carboxylic acid; and sulfonamide. The present invention also provides a thermal transfer recording method including transferring an image from the thermal transfer recording medium to an image receiving member.

Abstract: A conjugate which comprises fine porous particles (on which functional substance may be adhered) and a polymer based on water-soluble high molecular chain segment, and the use of the conjugate (for the purpose of stably supporting, or slowly releasing, a physiologically active substance, or the like).

Abstract: The present invention provide with a rinse solution for lithography and a resist pattern forming method using the same, which can prevent an inclination and peeling-off of a resist pattern and form a resist pattern having a high aspect ratio with high reproducibility. The rinse solution for lithography of the present invention comprises water and a nonionic surfactant having an ethyleneoxy group but not having a fluorine atom. The resist forming method of the present invention comprises the step of rinsing the pattern after development treatment with the rinse solution for lithography.

Abstract: A liquid drop ejecting device is provided with liquid drop ejecting heads having different specifications from each other and plural dummy load circuits which apply electric loads to the liquid drop ejecting heads, and analogue switches for switching the dummy load circuit which is connected to the liquid drop ejecting heads according to the liquid drop ejecting head to be driven. By doing this, it is possible to provide a liquid drop ejecting device and a method therefor, a layer forming device and a method for forming a layer, a method for manufacturing a device, and an electronic apparatus without deteriorating a quality of the printed image.

Abstract: A liquid droplet ejection head has a liquid introduction part, a pump part which is in communication with the liquid introduction part, and a nozzle forming plate in which a nozzle port is formed in an overlapped manner with the pump part. The nozzle forming plate is formed substantially into a rectangle as seen from a liquid ejection side. A resin is molded in at least one of side surface portions along at least long sides of the nozzle forming plate.

Abstract: A liquid droplet ejection head has a liquid introduction part, a pump part which is in communication with the liquid introduction part, and a nozzle forming plate in which a nozzle port is formed in an overlapped manner with the pump part. The nozzle forming plate is formed substantially into a rectangle as seen from a liquid ejection side. A resin is molded in at least one of side surface portions along at least long sides of the nozzle forming plate.

Abstract: A liquid droplet ejection apparatus in which a function liquid droplet is selectively ejected toward a workpiece while carrying out a relative movement between a function liquid droplet ejection head and the workpiece is made up of: a plurality of function liquid droplet ejection heads; a carriage for mounting thereon the plurality of function liquid droplet ejection heads; a head stocker for stocking the plurality of function liquid droplet ejection heads; and a head transfer mechanism for transferring each of the plurality of function liquid droplet ejection heads between the carriage and the head stocker. The function liquid droplet ejection heads are automatically replaced, so that the liquid droplet ejection apparatus can perform the workpiece processing efficiently.

Abstract: A liquid droplet ejection apparatus in which a function liquid droplet is selectively ejected toward a workpiece while carrying out a relative movement between a function liquid droplet ejection head and the workpiece is made up of: a plurality of function liquid droplet ejection heads; a carriage for mounting thereon the plurality of function liquid droplet ejection heads; a head stocker for stocking the plurality of function liquid droplet ejection heads; and a head transfer mechanism for transferring each of the plurality of function liquid droplet ejection heads between the carriage and the head stocker. The function liquid droplet ejection heads are automatically replaced, so that the liquid droplet ejection apparatus can perform the workpiece processing efficiently.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptic characteristics of the electrooptic members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.