Abstract: An object is held on a stage of an equipment, the stage is rotated in order to acquire a detection signal corresponding to a position of an outer peripheral edge of the object, a displacement of the object with respect to an alignment reference position is obtained based on this detection signal, and the stage is subjected to movement control so as to eliminate this displacement, thereby aligning the object.

Abstract: Correcting pads, each having a vertically movable pad and an elastic member which is expanded and contracted by a negative pressure generated by air exhaust and moves the pad vertically, are arranged along an outermost peripheral portion of an entire-surface chucking portion.

Abstract: This invention provides a substrate transportation apparatus in which a loader and macroinspection/transportation section are separate to be independent of each other. The loader can be arranged on the left side or rear side of the macroinspection/transportation section when seen from the front side. The substrate transportation apparatus can easily be changed in accordance with various types of specifications of apparatus layout.

Abstract: An object is held on a stage of an equipment, the stage is rotated in order to acquire a detection signal corresponding to a position of an outer peripheral edge of the object, a displacement of the object with respect to an alignment reference position is obtained based on this detection signal, and the stage is subjected to movement control so as to eliminate this displacement, thereby aligning the object.

Abstract: This invention provides a substrate transportation apparatus in which a loader and macroinspection/transportation section are separate to be independent of each other. The loader can be arranged on the left side or rear side of the macroinspection/transportation section when seen from the front side. The substrate transportation apparatus can easily be changed in accordance with various types of specifications of apparatus layout.

Abstract: An ultrasonic piezoelectric transducer and an ultrasonic actuator for performing enhanced elliptical vibration comprise a first laminated piezoelectric element having a first fixed end, a resonator mounted to the opposite end of the first laminated piezoelectric element, a second laminated piezoelectric element having one end thereof fixedly mounted to the resonator in a direction other than a vibrating direction of the first laminated piezoelectric element, and a load mass fixedly mounted to the opposite end of the second laminated piezoelectric element. This structure permits the enhanced elliptical vibration of the transducer to have a large, controllable amplitude.

Abstract: An ultrasonic motor comprising an elastic body, at least two laminated piezoelectric bodies clamped by a portion of the elastic body, an ultrasonic oscillator for exciting simultaneously a plurality of shrunk and retreated oscillation modes on the elastic body, to generate ultrasonic elliptic oscillation, and an element to be driven urged against a portion of the ultrasonic oscillator and movable with respect to the ultrasonic oscillator.

Abstract: The ultrasonic wave diagnosing apparatus of this invention comprises a controlling circuit controlling the rotation, advance and retreat of an ultrasonic wave oscillator, a DC power source feeding an electric power to a DC motor rotating the ultrasonic wave oscillator, a DC motor controlling circuit inputting a controlling signal from the above mentioned controlling circuit and controlling the voltage of the above mentioned DC power source, a photointerrupter detecting the position of the ultrasonic wave oscillator by the advance and retreat, a stepping motor advancing and retreating the above mentioned ultrasonic wave oscillator and a record controlling apparatus controlling an auxiliary memorizing apparatus which can record an ultrasonic wave image obtained by the above mentioned ultrasonic wave oscillator so that, in order to reverse the rotation by inverting the phases of controlling signals A and B of the stepping motor advancing and retreating the above mentioned ultrasonic wave oscillator, a position d

Abstract: In an ultrasonic probe for use in ultrasonic endoscope, ultrasonic diagnosing apparatus and other ultrasonic apparatuses, an ultrasonic vibrator is arranged in a recess formed in a cylindrical housing and is secured thereto such that portions of first and second electrodes are exposed out of the recess. First and second lead wires are embedded in the housing such that tips of the lead wires are exposed within connecting areas formed in the housing in communication with the recess. The tips of the first and second lead wires are connected to first and second electrodes of the ultrasonic vibrator with the aid of conductive members made of solder, conductive paste or conductive adhesive agent. The other end of the first and second lead wires are extended from the same end face of the cylindrical housing.