Patents by Inventor Yoshiho Amada

Yoshiho Amada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9380691
    Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: June 28, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Yezheng Tao, Daniel J. W. Brown, Alexander Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom, Yoshiho Amada
  • Publication number: 20150250045
    Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.
    Type: Application
    Filed: February 28, 2014
    Publication date: September 3, 2015
    Inventors: Yezheng Tao, Daniel J.W. Brown, Alexander Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom, Yoshiho Amada
  • Patent number: 8814522
    Abstract: A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m?n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: August 26, 2014
    Assignee: Cymer, LLC
    Inventors: Yoshiho Amada, Thomas D. Steiger, Richard C. Ujazdowski
  • Patent number: 7819945
    Abstract: A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the me
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: October 26, 2010
    Assignee: Cymer, Inc.
    Inventors: Richard Morton, Yoshiho Amada
  • Publication number: 20100107870
    Abstract: A method for making a metal fluoride trap comprising: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the m
    Type: Application
    Filed: October 30, 2008
    Publication date: May 6, 2010
    Inventors: Richard Morton, Yoshiho Amada
  • Patent number: 7706424
    Abstract: A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.
    Type: Grant
    Filed: September 29, 2005
    Date of Patent: April 27, 2010
    Assignee: Cymer, Inc.
    Inventors: Yoshiho Amada, James A. Carmichael, Richard G. Morton, Richard M. Ness
  • Patent number: 7522650
    Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: April 21, 2009
    Assignee: Cymer, Inc.
    Inventors: William N. Partlo, Yoshiho Amada, James A. Carmichael, Timothy S. Dyer, Walter D. Gillespie, Bryan G. Moosman, Richard G. Morton, Curtis L. Rettig, Brian D. Strate, Thomas D. Steiger, Fedor Trintchouk, Richard C. Ujazdowski
  • Publication number: 20080310960
    Abstract: A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m?n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.
    Type: Application
    Filed: June 15, 2007
    Publication date: December 18, 2008
    Applicant: Cymer, Inc.
    Inventors: Yoshiho Amada, Thomas D. Steiger, Richard C. Ujazdowski
  • Publication number: 20070071058
    Abstract: A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.
    Type: Application
    Filed: September 29, 2005
    Publication date: March 29, 2007
    Applicant: Cymer, Inc.
    Inventors: Yoshiho Amada, James Carmichael, Richard Morton, Richard Ness
  • Patent number: 7068697
    Abstract: A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: June 27, 2006
    Assignee: Cymer, Inc.
    Inventors: Yoshiho Amada, Richard G. Morton, Bryan G. Moosman
  • Publication number: 20050226301
    Abstract: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 13, 2005
    Inventors: William Partlo, Yoshiho Amada, James Carmichael, Timothy Dyer, Walter Gillespie, Bryan Moosman, Richard Morton, Curtis Rettig, Brian Strate, Thomas Steiger, Fedor Trintchouk, Richard Ujazdowski
  • Patent number: 6151350
    Abstract: A gas laser outputs a prescribed high power from the start of laser oscillation immediately after the laser gas is changed. The laser, in which used laser gas in a laser chamber (1) is replaced with a fresh laser gas, is provided with: a gas leaving means, which leaves a prescribed amount of used gas for mixing with the fresh laser gas during laser gas replacement, or an impurity gas adding means which provides a prescribed amount of impurity gas for mixing with the fresh laser gas; and a controller (11). It is preferable that the concentration of the used gas after a replacement is within a range of 1.5-60%. The gas leaving means can be a gas discharge control mechanism (10), which controls the amount of used gas exhausted so that a prescribed amount of used gas can be left for mixing with the fresh gas, or a laser gas container (21), which can provide a prescribed amount of stored used gas for mixing with the fresh gas.
    Type: Grant
    Filed: September 22, 1998
    Date of Patent: November 21, 2000
    Assignee: Komatsu Ltd.
    Inventors: Hiroshi Komori, Yoshiho Amada, Osamu Wakabayashi
  • Patent number: 6008497
    Abstract: A laser apparatus comprises storage means for storing a power source voltage of each pulse at the time of continuous pulse oscillation for one cycle, with each voltage correlated with an identifier which specifies the respective pulse, and output control means for, when a pulse is generated, reading from the storage means the source voltage of a pulse having the same identifier, and performing pulse oscillation on the basis of the source voltage. Thus the influence of the spiking phenomenon during a burst mode operation is eliminated as much as possible, and thereby the accuracy of laser beam machining is still more improved.
    Type: Grant
    Filed: February 25, 1998
    Date of Patent: December 28, 1999
    Assignee: Komatsu Ltd.
    Inventors: Hakaru Mizoguchi, Osamu Wakabayashi, Yukio Kobayashi, Yoshiho Amada, Tatsuo Mimura
  • Patent number: 5710787
    Abstract: An object is to perform controlling operation always accurately to eliminate a spiking phenomenon generated in a laser device. In an output controller (6), excitation intensity data causing energies of continual pulses to be set to have a desired identical value is previously stored in association with the respective continual pulses. In an output monitor (5), the energies of the oscillated pulses are detected. And detected values of energies of pulses in a continual pulse oscillation already done are compared with a desired pulse energy value and previously-stored charging voltages associated with the respective pulses are corrected in the output controller (6) on the basis of the comparison result. When the present invention is applied to control of an output of a light source in an aligner, an accuracy of control of exposure light can be remarkabley improved.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: January 20, 1998
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Yoshiho Amada, Osamu Wakabayashi, Noritoshi Ito
  • Patent number: 5557629
    Abstract: A laser device is capable reducing fluctuation of the beam width of the output laser beam due to abrasion of its discharge electrodes. A part of the contour shape of a section perpendicular to the longitudinal axis of the chamber of the laser device in at least one of the electrodes, which part confronts the other one of the electrodes, has a shape of a circular arc having a predetermined radius. The width of at least one of the two electrode may be substantially equal to the width of electric discharge taken place between the electrodes. Further, a conductor member may be disposed on each side of the electrode along its longitudinal axis to reduce electric field strength therearound.
    Type: Grant
    Filed: August 28, 1992
    Date of Patent: September 17, 1996
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Hakaru Mizoguchi, Yoshiho Amada, Noritoshi Ito
  • Patent number: 5535233
    Abstract: A laser device is capable reducing fluctuation of the beam width of the output laser beam due to abrasion of its discharge electrodes. A part of the contour shape of a section perpendicular to the longitudinal axis of the chamber of the laser device in at least one of the electrodes, which part confronts the other one of the electrodes, has a shape of a circular arc having a predetermined radius. The width of at least one of the two electrode may be substantially equal to the width of electric discharge taken place between the electrodes. Further, a conductor member may be disposed on each side of the electrode along its longitudinal axis to reduce electric field strength therearound.
    Type: Grant
    Filed: October 4, 1993
    Date of Patent: July 9, 1996
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Hakaru Mizoguchi, Yoshiho Amada, Noritoshi Ito
  • Patent number: 5463650
    Abstract: An apparatus used for elimination of the influence of spiking in an excimer laser device. The values of predetermined parameters which contribute to the spiking such as oscillation suspension time in a successive pulse oscillation are obtained. Discharge voltage for each of the successive laser beam pulses is changed on the basis of the obtained parameter values such that subsequent successive laser beam pulses have the same energy. The discharge voltage is stored according to time elapsed after the start of the successive pulse oscillation, and discharge voltage is controlled such that stored discharge voltage corresponds to the measured elapsed time. During the time when a stepper is not performing processing using the laser beam, the laser beam pulse is oscillated under predetermined conditions and the energy of the resulting pulses is detected.
    Type: Grant
    Filed: December 28, 1994
    Date of Patent: October 31, 1995
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Noritoshi Ito, Yoshiho Amada, Osamu Wakabayashi
  • Patent number: 5373523
    Abstract: An excimer laser apparatus is provided with a compact high efficiency dust particle removal means which is capable of maintaining the windows clean with only a small volume of purging gas, and which prevents deterioration of aperture masks without having to increase the cavity length or risking the possibility of leakage from piping connections. The excimer laser apparatus uses, as dust particle removal means, filters (13a and 13b) made of metal or ceramic which is non-reactive with fluorine. A ground potential dust collector can be provided at a downstream side of a static dust particle remover, having an anode and a cathode, for collecting any dust particles which have passed through the static dust particle remover.
    Type: Grant
    Filed: October 14, 1993
    Date of Patent: December 13, 1994
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Junichi Fujimoto, Hakaru Mizoguchi, Yoshiho Amada, Osamu Wakabayashi
  • Patent number: 5291509
    Abstract: A gas laser apparatus in which a gas medium in a case and a lubricant for bearings supporting a blower for circulating the gas medium are isolated from each other, so that the lubricant can be prevented from mixing into the gas medium while no substantially large resistance is applied to the blower drive. To isolate the gas medium and the lubricant, magnetic fluid shaft seals (10, 11) are used for sealing between the lubricant for the bearings (6) for supporting rotation shafts (3a, 3b) of the blower (3) and the gas medium in the case (1).
    Type: Grant
    Filed: July 9, 1992
    Date of Patent: March 1, 1994
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Hakaru Mizoguchi, Junichi Fujimoto, Yoshiho Amada
  • Patent number: 4975919
    Abstract: According to present invention, the central wavelength of the central wave of the output laser beam, and the sideband wave power or central wave power of the output laser beam are detected, and the wavelength selective characteristics of wavelength selective elements disposed between a laser chamber and a rear mirror are controlled such that the detected central wavelength falls within a desired allowable range and that the detected power becomes minimum or maximum.
    Type: Grant
    Filed: November 17, 1988
    Date of Patent: December 4, 1990
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Yoshiho Amada, Osamu Wakabayashi, Masahiko Kowaka