Patents by Inventor Yoshihro Kubota

Yoshihro Kubota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PELLICLE FILM AND A PELLICLE FOR EUV APPLICATION, AND A METHOD FOR MANUFACTURING THE FILM
    Publication number: 20120183757
    Abstract: An EUV pellicle film is provided, which is made from an SOI plate composed of a single crystal silicon membrane of a thickness of 20 nm to 1 ?m and a handling plate (support structure) for reinforcing the membrane, the handling plate being firmly adhered to the single silicon member via a silicon dioxide layer; the handling plate is etched to have a meshed pattern so as to allow light to pass through the pellicle film.
    Type: Application
    Filed: January 13, 2012
    Publication date: July 19, 2012
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shoji AKIYAMA, Yoshihro Kubota