Patents by Inventor Yoshikazu Tanabe

Yoshikazu Tanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9551670
    Abstract: A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: January 24, 2017
    Assignees: HITACHI, LTD., HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Patent number: 9194994
    Abstract: A liquid crystal display device includes: a light guide plate including a front surface, a back surface and an edge surface, the light guide plate being arranged such that the edge surface faces a light source, the light guide plate internally reflecting light incident from the edge surface and causing surface emission from the front surface; a liquid crystal display panel; and a reflective sheet arranged so as to face the back surface of the light guide plate. The back surface includes a first portion and a second portion. A surface of the second portion is located at a position recessed relatively from a surface of the first portion. The surface of the first portion is a rough surface. The surface of the second portion is a smooth surface. The reflective sheet is in contact with the first portion but avoids contact with the second portion.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: November 24, 2015
    Assignee: JAPAN DISPLAY INC.
    Inventors: Ken Kagabu, Yasuhisa Shiraishi, Yoshikazu Tanabe, Yoshihiro Nishimine
  • Publication number: 20140218723
    Abstract: A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.
    Type: Application
    Filed: April 10, 2014
    Publication date: August 7, 2014
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Ichiro ISHIMARU, Minori NOGUCHI, Ichiro MORIYAMA, Yoshikazu TANABE, Yasuo YATSUGAKE, Yukio KENBOU, Kenji WATANABE, Hirofumi TSUCHIYAMA
  • Publication number: 20140192293
    Abstract: A liquid crystal display device includes: a light guide plate including a front surface, a back surface and an edge surface, the light guide plate being arranged such that the edge surface faces a light source, the light guide plate internally reflecting light incident from the edge surface and causing surface emission from the front surface; a liquid crystal display panel; and a reflective sheet arranged so as to face the back surface of the light guide plate. The back surface includes a first portion and a second portion. A surface of the second portion is located at a position recessed relatively from a surface of the first portion. The surface of the first portion is a rough surface. The surface of the second portion is a smooth surface. The reflective sheet is in contact with the first portion but avoids contact with the second portion.
    Type: Application
    Filed: January 6, 2014
    Publication date: July 10, 2014
    Applicant: Japan Display Inc.
    Inventors: Ken KAGABU, Yasuhisa SHIRAISHI, Yoshikazu TANABE, Yoshihiro NISHIMINE
  • Patent number: 8729514
    Abstract: A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: May 20, 2014
    Assignee: Hitachi High-Technologies Corporaation
    Inventors: Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Patent number: 8517591
    Abstract: In a method of forming a thin light guide plate which includes a compression step in an injection molding step, an optical pattern is liable to be adhered to a mold. Further, in removing the light guide plate from the mold using an ejector pin, a stress is concentrated on a local area of the light guide plate thus generating warping, deformation or irregularities in size of the light guide plate. To overcome such drawbacks, a liquid crystal display device is configured such that an optical pattern portion is compressed, and the light guide plate is removed by making use of a peripheral portion of a mold thus preventing the generation of stress in a local area of the light guide plate due to an ejector pin.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: August 27, 2013
    Assignees: Hitachi Displays, Ltd., Panasonic Liquid Crystal Display Co., Ltd.
    Inventors: Hiroshi Nakamoto, Yoshikazu Tanabe, Ken Kagabu
  • Patent number: 8502935
    Abstract: In a backlight which arranges light emitting diodes on a side surface of a light guide plate, even when the light guide plate is made thin by further reducing a thickness of the light guide plate and the light emitting diodes having a thickness larger than the thickness of the light guide plate are used, it is possible to manufacture the light guide plate with high accuracy in a short time. In a liquid crystal display device having a backlight which radiates light to a liquid crystal panel, LEDs are mounted on the light guide plate formed on the backlight as a light emitting element, a light radiation portion of the light guide plate is formed by molding by applying pressure and heat to a sheet-shaped resin, and a light incident portion of the light guide plate is formed by injection molding.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: August 6, 2013
    Assignees: Hitachi Displays, Ltd., Panasonic Liquid Crystal Display Co., Ltd.
    Inventors: Hiroshi Nakamoto, Yoshikazu Tanabe, Kouji Fujisawa
  • Publication number: 20120069329
    Abstract: A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.
    Type: Application
    Filed: May 24, 2011
    Publication date: March 22, 2012
    Inventors: Ichiro ISHIMARU, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Patent number: 7952085
    Abstract: The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process.
    Type: Grant
    Filed: August 22, 2008
    Date of Patent: May 31, 2011
    Assignees: Hitachi, Ltd., Hitachi High-Technologies Corporation
    Inventors: Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Patent number: 7799690
    Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of oxide film and uniformity in thickness of the oxide film.
    Type: Grant
    Filed: June 13, 2007
    Date of Patent: September 21, 2010
    Assignee: Renesas Electronics Corporation
    Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
  • Patent number: 7632744
    Abstract: Formation of an WNx film 24 constituting a barrier layer of a gate electrode 7A having a polymetal structure is effected in an atmosphere containing a high concentration nitrogen gas, whereby release of N (nitrogen) from the WNx film 24 is suppressed in the heat treatment step after the formation of the gate electrode 7A.
    Type: Grant
    Filed: April 14, 2008
    Date of Patent: December 15, 2009
    Assignee: Renesas Technology Corp.
    Inventors: Naoki Yamamoto, Yoshikazu Tanabe, Hiroshige Kogayu, Takehiko Yoshida
  • Publication number: 20090213619
    Abstract: In a method of forming a thin light guide plate which includes a compression step in an injection molding step, an optical pattern is liable to be adhered to a mold. Further, in removing the light guide plate from the mold using an ejector pin, a stress is concentrated on a local area of the light guide plate thus generating warping, deformation or irregularities in size of the light guide plate. To overcome such drawbacks, a liquid crystal display device is configured such that an optical pattern portion is compressed, and the light guide plate is removed by making use of a peripheral portion of a mold thus preventing the generation of stress in a local area of the light guide plate due to an ejector pin.
    Type: Application
    Filed: February 18, 2009
    Publication date: August 27, 2009
    Inventors: Hiroshi Nakamoto, Yoshikazu Tanabe, Ken Kagabu
  • Publication number: 20090103078
    Abstract: An apparatus for detecting defects, including: a table unit which mounts a specimen to be inspected having a linearly moving stage and a rotationally moving stage; a first illumination optical unit which illuminates an inspection region of a surface of the specimen from a normal direction or in the vicinity of the normal direction while the specimen is rotating by the rotationally moving stage and moving in one direction by the linearly moving stage; a second illumination optical unit which illuminates the inspection region from a first elevation angle toward the inspection region while the specimen is rotating and moving; a first detection optical unit which detects light reflected from the inspection region by the illumination of the first illumination optical unit or the second illumination optical unit with plural detectors arranged in plural portions of a second elevation angle toward the inspection region; a second detection optical unit which detects light reflected from the inspection region by the il
    Type: Application
    Filed: August 22, 2008
    Publication date: April 23, 2009
    Inventors: Ichiro ISHIMARU, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Publication number: 20090059127
    Abstract: In a backlight which arranges light emitting diodes on a side surface of a light guide plate, even when the light guide plate is made thin by further reducing a thickness of the light guide plate and the light emitting diodes having a thickness larger than the thickness of the light guide plate are used, it is possible to manufacture the light guide plate with high accuracy in a short time. In a liquid crystal display device having a backlight which radiates light to a liquid crystal panel, LEDs are mounted on the light guide plate formed on the backlight as a light emitting element, a light radiation portion of the light guide plate is formed by molding by applying pressure and heat to a sheet-shaped resin, and a light incident portion of the light guide plate is formed by injection molding.
    Type: Application
    Filed: August 12, 2008
    Publication date: March 5, 2009
    Inventors: Hiroshi Nakamoto, Yoshikazu Tanabe, Kouji Fujisawa
  • Publication number: 20080227251
    Abstract: Formation of an WNx film 24 constituting a barrier layer of a gate electrode 7A having a polymetal structure is effected in an atmosphere containing a high concentration nitrogen gas, whereby release of N (nitrogen) from the WNx film 24 is suppressed in the heat treatment step after the formation of the gate electrode 7A.
    Type: Application
    Filed: April 14, 2008
    Publication date: September 18, 2008
    Inventors: Naoki Yamamoto, Yoshikazu Tanabe, Hiroshige Kogayu, Takehiko Yoshida
  • Patent number: 7417244
    Abstract: An apparatus for detecting defects, including: a first illumination optical unit which illuminates from a normal direction or in the vicinity of the normal direction; a second illumination optical unit which illuminates from a first elevation angle; a first detection optical unit which detects light reflected by the illumination of the first illumination optical unit or the second illumination optical unit with plural detectors; a second detection optical unit which detects light reflected by the illumination of the first illumination optical unit or the second illumination optical unit with plural detectors; wherein the plural detectors of the first detection optical unit and the plural detectors of the second detection optical unit are photomultipliers, and the signal processor processes the signals outputted from the photomultipliers and are adjusted to balance in sensitivities.
    Type: Grant
    Filed: January 25, 2007
    Date of Patent: August 26, 2008
    Assignees: Hitachi, Ltd., Hitachi High-Technologies Corporation
    Inventors: Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou, Kenji Watanabe, Hirofumi Tsuchiyama
  • Patent number: 7375013
    Abstract: Formation of an WNX film 24 constituting a barrier layer of a gate electrode 7A having a polymetal structure is effected in an atmosphere containing a high concentration nitrogen gas, whereby release of N (nitrogen) from the WNX film 24 is suppressed in the heat treatment step after the formation of the gate electrode 7A.
    Type: Grant
    Filed: April 3, 2006
    Date of Patent: May 20, 2008
    Assignee: Renesas Technology Corp.
    Inventors: Naoki Yamamoto, Yoshikazu Tanabe, Hiroshige Kogayu, Takehiko Yoshida
  • Publication number: 20080045027
    Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of oxide film and uniformity in thickness of the oxide film.
    Type: Application
    Filed: June 13, 2007
    Publication date: February 21, 2008
    Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
  • Publication number: 20070184618
    Abstract: In order to provide a light oxidation process technique for use in a CMOS LSI employing a polymetal gate structure and a dual gate structure, so that both oxidation of a refractory metal film constituting a part of a gate electrode and diffusion of boron contained in a p-type polycrystalline silicon film constituting a part of the gate electrode can be prevented, a mixed gas containing a hydrogen gas and steam synthesized from an oxygen gas and a hydrogen gas is supplied to a major surface of a semiconductor wafer A1, and a heat treatment for improving a profile of a gate insulating film that has been cut by etching under an edge part of the gate electrode is conducted under a low thermal load condition in that the refractor metal film is substantially not oxidized, and boron contained in a p-type polycrystalline silicon film constituting a part of the gate electrode is not diffused to the semiconductor substrate through the gate oxide film.
    Type: Application
    Filed: April 16, 2007
    Publication date: August 9, 2007
    Inventors: Yoshikazu Tanabe, Naoki Yamamoto, Shinichiro Mitani, Yuko Hanaoka
  • Patent number: 7250376
    Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: July 31, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki